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Patent applications and USPTO patent grants for Hinckley; Kelly.The latest application filed is for "selective isotropic etch for titanium-based materials".
Patent | Date |
---|---|
Selective isotropic etch for titanium-based materials Grant 7,476,951 - Campbell , et al. January 13, 2 | 2009-01-13 |
Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching Grant 7,157,375 - Campbell , et al. January 2, 2 | 2007-01-02 |
Selective isotropic etch for titanium-based materials App 20060226553 - Campbell; Timothy S. ;   et al. | 2006-10-12 |
Selective isotropic etch for titanium-based materials Grant 7,078,337 - Campbell , et al. July 18, 2 | 2006-07-18 |
Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching App 20060043062 - Campbell; Timothy Scott ;   et al. | 2006-03-02 |
Selective isotropic etch for titanium-based materials App 20050068608 - Campbell, Timothy S. ;   et al. | 2005-03-31 |
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