HIMORI; Shinji
Patent Applications and Registrations
Patent applications and USPTO patent grants for HIMORI; Shinji.The latest application filed is for "plasma processing method and plasma processing apparatus".
Company Profile
12.60.79
- HIMORI; Shinji - Kurokawa-gun JP
- Himori; Shinji - Miyagi JP
- Himori; Shinji - Yamanashi-ken JP
- Himori; Shinji - Nirasaki JP
- Himori; Shinji - Yamanashi JP
- HIMORI; Shinji - Nirasaki-shi JP
- HIMORI; Shinji - Nirasaki City JP
- Himori; Shinji - Kurokawa JP
Patent Activity
| Patent | Date |
|---|---|
| Plasma Processing Method And Plasma Processing Apparatus App 20220301825 - KUBOTA; Shinji ; et al. | 2022-09-22 |
| Plasma processing apparatus Grant 11,450,515 - Nagaseki , et al. September 20, 2 | 2022-09-20 |
| Plasma processing method and plasma processing apparatus Grant 11,387,077 - Kubota , et al. July 12, 2 | 2022-07-12 |
| Plasma Processing Method And Plasma Processing Apparatus App 20220028665 - Nagami; Koichi ; et al. | 2022-01-27 |
| Plasma etching method and plasma etching apparatus Grant 11,170,979 - Nagami , et al. November 9, 2 | 2021-11-09 |
| Plasma processing apparatus Grant 11,133,157 - Yokota , et al. September 28, 2 | 2021-09-28 |
| Plasma Processing Method And Plasma Processing Apparatus App 20210159049 - KUBOTA; Shinji ; et al. | 2021-05-27 |
| Power feed member and substrate processing apparatus Grant 10,943,766 - Ito , et al. March 9, 2 | 2021-03-09 |
| Plasma Processing Apparatus App 20210013015 - NAGASEKI; Kazuya ; et al. | 2021-01-14 |
| Plasma Processing Method And Plasma Processing Apparatus App 20200381215 - KOSHIMIZU; Chishio ; et al. | 2020-12-03 |
| Plasma processing apparatus Grant 10,825,663 - Nagaseki , et al. November 3, 2 | 2020-11-03 |
| Substrate Processing Apparatus And Substrate Processing Method App 20200312623 - MOYAMA; Kazuki ; et al. | 2020-10-01 |
| Semiconductor manufacturing device and processing method Grant 10,699,935 - Himori , et al. | 2020-06-30 |
| Substrate processing method Grant 10,651,012 - Yokota , et al. | 2020-05-12 |
| Plasma Processing Apparatus And Plasma Processing Method App 20200144028 - NAGAMI; Koichi ; et al. | 2020-05-07 |
| Plasma Etching Method And Plasma Etching Apparatus App 20200126770 - Nagami; Koichi ; et al. | 2020-04-23 |
| Plasma processing method and plasma processing apparatus Grant 10,553,407 - Nagami , et al. Fe | 2020-02-04 |
| Plasma Processing Method And Plasma Processing Apparatus App 20190333741 - NAGAMI; Koichi ; et al. | 2019-10-31 |
| Plasma Spraying Apparatus And Spraying Control Method App 20190256962 - Kobayashi; Yoshiyuki ; et al. | 2019-08-22 |
| Substrate processing apparatus and substrate processing method Grant 10,388,544 - Ui , et al. A | 2019-08-20 |
| Plasma Processing Apparatus App 20190244794 - YOKOTA; Akihiro ; et al. | 2019-08-08 |
| Plasma Processing Apparatus App 20190164726 - TAMAMUSHI; Gen ; et al. | 2019-05-30 |
| Plasma processing apparatus Grant 10,297,428 - Yokota , et al. | 2019-05-21 |
| Electrode for plasma processing apparatus, plasma processing apparatus, plasma processing method and storage medium Grant 10,290,468 - Honda , et al. | 2019-05-14 |
| Plasma Processing Method And Plasma Processing Apparatus App 20190057845 - Nagami; Koichi ; et al. | 2019-02-21 |
| Gas Exhaust Plate And Plasma Processing Apparatus App 20180374720 - Himori; Shinji ; et al. | 2018-12-27 |
| Power Feed Member And Substrate Processing Apparatus App 20180374679 - Ito; Shunichi ; et al. | 2018-12-27 |
| Transfer apparatus and plasma processing system Grant 10,147,633 - Himori , et al. De | 2018-12-04 |
| Connection control method Grant 10,032,611 - Himori , et al. July 24, 2 | 2018-07-24 |
| Plasma Processing Apparatus App 20180174806 - NAGASEKI; Kazuya ; et al. | 2018-06-21 |
| Plasma etching method Grant 9,978,566 - Yokota , et al. May 22, 2 | 2018-05-22 |
| Semiconductor Manufacturing Device And Processing Method App 20180114717 - HIMORI; Shinji ; et al. | 2018-04-26 |
| Semiconductor manufacturing device and processing method Grant 9,859,146 - Himori , et al. January 2, 2 | 2018-01-02 |
| Substrate Processing Method App 20170162367 - YOKOTA; Akihiro ; et al. | 2017-06-08 |
| Connection Control Method App 20170110296 - Himori; Shinji ; et al. | 2017-04-20 |
| Plasma Etching Method App 20170103877 - YOKOTA; Akihiro ; et al. | 2017-04-13 |
| Substrate processing apparatus and substrate processing method using same Grant 9,564,287 - Ohse , et al. February 7, 2 | 2017-02-07 |
| Capacitive coupling plasma processing apparatus Grant 9,412,562 - Himori , et al. August 9, 2 | 2016-08-09 |
| Substrate processing apparatus Grant 9,390,943 - Nagaseki , et al. July 12, 2 | 2016-07-12 |
| Plasma processing apparatus and plasma processing method Grant 9,275,836 - Himori March 1, 2 | 2016-03-01 |
| Plasma processing apparatus Grant 9,245,776 - Himori , et al. January 26, 2 | 2016-01-26 |
| Plasma processing apparatus and electrode for same Grant 9,202,675 - Himori , et al. December 1, 2 | 2015-12-01 |
| Plasma Processing Apparatus App 20150332898 - YOKOTA; Akihiro ; et al. | 2015-11-19 |
| Capacitive Coupling Plasma Processing Apparatus App 20150221478 - HIMORI; Shinji ; et al. | 2015-08-06 |
| Substrate Processing Apparatus And Substrate Processing Method App 20150162223 - UI; Akio ; et al. | 2015-06-11 |
| Capacitive coupling plasma processing apparatus Grant 9,038,566 - Himori , et al. May 26, 2 | 2015-05-26 |
| Etching Method Of Multilayer Film App 20150072534 - Himori; Shinji ; et al. | 2015-03-12 |
| Substrate Processing Apparatus App 20140346040 - Yokota; Akihiro ; et al. | 2014-11-27 |
| Etching method of multilayer film Grant 8,895,454 - Himori , et al. November 25, 2 | 2014-11-25 |
| Plasma processing apparatus and electrode for same Grant 8,888,951 - Himori November 18, 2 | 2014-11-18 |
| Substrate plasma processing apparatus and plasma processing method Grant 8,821,684 - Ui , et al. September 2, 2 | 2014-09-02 |
| Semiconductor Manufacturing Device And Processing Method App 20140213055 - Himori; Shinji ; et al. | 2014-07-31 |
| Etching Method Of Multilayer Film App 20140206199 - Himori; Shinji ; et al. | 2014-07-24 |
| Table for use in plasma processing system and plasma processing system Grant 8,741,098 - Koshiishi , et al. June 3, 2 | 2014-06-03 |
| Plasma processing apparatus, plasma processing method and storage medium Grant 8,703,002 - Matsudo , et al. April 22, 2 | 2014-04-22 |
| Plasma processing apparatus Grant 8,651,049 - Matsudo , et al. February 18, 2 | 2014-02-18 |
| Electrode For Plasma Processing Apparatus, Plasma Processing Apparatus, Plasma Processing Method And Storage Medium App 20140027059 - HONDA; Masanobu ; et al. | 2014-01-30 |
| Substrate Processing Apparatus And Substrate Processing Method Using Same App 20140020832 - OHSE; Takeshi ; et al. | 2014-01-23 |
| Substrate processing apparatus and substrate processing method using same Grant 8,568,606 - Ohse , et al. October 29, 2 | 2013-10-29 |
| Substrate Processing Apparatus App 20130220547 - NAGASEKI; Kazuya ; et al. | 2013-08-29 |
| Mounting table and plasma processing apparatus Grant 8,512,511 - Himori , et al. August 20, 2 | 2013-08-20 |
| Plasma Processing Apparatus, Plasma Processing Method And Storage Medium App 20130122714 - MATSUDO; Tatsuo ; et al. | 2013-05-16 |
| Plasma Processing Apparatus App 20130075037 - MATSUDO; Tatsuo ; et al. | 2013-03-28 |
| Transfer Apparatus And Plasma Processing System App 20130062016 - HIMORI; Shinji ; et al. | 2013-03-14 |
| Plasma processing apparatus Grant 8,293,068 - Koshimizu , et al. October 23, 2 | 2012-10-23 |
| Electrostatic chuck device Grant 8,284,538 - Himori , et al. October 9, 2 | 2012-10-09 |
| Substrate Processing Method App 20120247677 - Himori; Shinji ; et al. | 2012-10-04 |
| Substrate processing method and substrate processing apparatus Grant 8,178,444 - Koshimizu , et al. May 15, 2 | 2012-05-15 |
| Capacitive Coupling Plasma Processing Apparatus App 20120037315 - HIMORI; Shinji ; et al. | 2012-02-16 |
| Plasma processing apparatus and focus ring Grant 8,114,247 - Endoh , et al. February 14, 2 | 2012-02-14 |
| Capacitive coupling plasma processing apparatus Grant 8,070,911 - Himori , et al. December 6, 2 | 2011-12-06 |
| Magnetic Field Generator For Magnetron Plasma App 20110232846 - MIYATA; Koji ; et al. | 2011-09-29 |
| Table For Plasma Processing Apparatus And Plasma Processing Apparatus App 20110192540 - Higuma; Masakazu ; et al. | 2011-08-11 |
| Plasma Processing Apparatus, Electrode Plate For Plasma Processing Apparatus, And Electrode Plate Manufacturing Method App 20110162802 - OKUMURA; Katsuya ; et al. | 2011-07-07 |
| Plasma Processing Apparatus App 20110155322 - HIMORI; Shinji ; et al. | 2011-06-30 |
| Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method Grant 7,922,862 - Okumura , et al. April 12, 2 | 2011-04-12 |
| Plasma Processing Apparatus And Focus Ring App 20110048643 - Endoh; Shosuke ; et al. | 2011-03-03 |
| Plasma Processing Apparatus And Plasma Processing Method App 20110031217 - Himori; Shinji | 2011-02-10 |
| Plasma processing apparatus and focus ring Grant 7,850,174 - Endoh , et al. December 14, 2 | 2010-12-14 |
| Substrate Processing Apparatus And Substrate Processing Method Using Same App 20100243607 - Ohse; Takeshi ; et al. | 2010-09-30 |
| Plasma Processing Apparatus And Electrode For Same App 20100224325 - HIMORI; Shinji ; et al. | 2010-09-09 |
| Plasma Processing Apparatus And Electrode For Same App 20100224323 - HIMORI; Shinji | 2010-09-09 |
| Capacitive coupling plasma processing apparatus Grant 7,767,055 - Himori , et al. August 3, 2 | 2010-08-03 |
| Mounting Table For Plasma Processing Apparatus App 20100078129 - HIMORI; Shinji ; et al. | 2010-04-01 |
| Substrate Processing Apparatus And Substrate Processing Method App 20100072172 - Ui; Akio ; et al. | 2010-03-25 |
| Mounting Table And Plasma Processing Apparatus App 20100071850 - HIMORI; Shinji ; et al. | 2010-03-25 |
| Processing apparatus and gas discharge suppressing member Grant 7,622,017 - Himori , et al. November 24, 2 | 2009-11-24 |
| Plasma Processing Apparatus, Electrode Plate For Plasma Processing Apparatus, And Electrode Plate Manufacturing Method App 20090285998 - Okumura; Katsuya ; et al. | 2009-11-19 |
| Electrostatic chuck Grant 7,619,870 - Himori , et al. November 17, 2 | 2009-11-17 |
| Plasma Processing Apparatus App 20090242135 - KOSHIMIZU; Chishio ; et al. | 2009-10-01 |
| Plasma Processing Apparatus App 20090236043 - MATSUDO; Tatsuo ; et al. | 2009-09-24 |
| Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method Grant 7,585,386 - Okumura , et al. September 8, 2 | 2009-09-08 |
| Electrode for plasma processing apparatus, plasma processing apparatus, plasma processing method and storage medium App 20090221151 - Honda; Masanobu ; et al. | 2009-09-03 |
| Mounting Stage And Plasma Processing Apparatus App 20090199967 - Himori; Shinji ; et al. | 2009-08-13 |
| Substrate Plasma Processing Apparatus And Plasma Processing Method App 20090194508 - UI; Akio ; et al. | 2009-08-06 |
| Substrate Processing Method And Substrate Processing Apparatus App 20090197423 - KOSHIMIZU; Chishio ; et al. | 2009-08-06 |
| Plasma Processing Apparatus, Plasma Processing Method And Storage Medium App 20090047795 - MATSUDO; Tatsuo ; et al. | 2009-02-19 |
| Stage for plasma processing apparatus, and plasma processing apparatus App 20080073032 - Koshiishi; Akira ; et al. | 2008-03-27 |
| Electrostatic Chuck Device App 20080062610 - HIMORI; Shinji ; et al. | 2008-03-13 |
| Electrostatic Chuck Device App 20080062609 - HIMORI; Shinji ; et al. | 2008-03-13 |
| Electrostatic Chuck Device App 20080062611 - HIMORI; Shinji ; et al. | 2008-03-13 |
| Stage for plasma processing apparatus, and plasma processing apparatus App 20080041312 - Matsuyama; Shoichiro ; et al. | 2008-02-21 |
| Electrostatic Chuck App 20080037195 - HIMORI; Shinji ; et al. | 2008-02-14 |
| Table for use in plasma processing system and plasma processing system App 20080038162 - Koshiishi; Akira ; et al. | 2008-02-14 |
| Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod App 20070284085 - Hayashi; Daisuke ; et al. | 2007-12-13 |
| Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod Grant 7,230,202 - Hayashi , et al. June 12, 2 | 2007-06-12 |
| Plasma treatment apparatus Grant 7,186,315 - Himori , et al. March 6, 2 | 2007-03-06 |
| Capacitive coupling plasma processing apparatus App 20060221540 - Himori; Shinji ; et al. | 2006-10-05 |
| Matching unit and plasma processing system Grant 7,112,926 - Himori , et al. September 26, 2 | 2006-09-26 |
| Plasma processing apparatus Grant 7,104,217 - Himori , et al. September 12, 2 | 2006-09-12 |
| Capacitive coupling plasma processing apparatus App 20060118044 - Himori; Shinji ; et al. | 2006-06-08 |
| Capacitive coupling plasma processing apparatus App 20060081337 - Himori; Shinji ; et al. | 2006-04-20 |
| Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method App 20050276928 - Okumura, Katsuya ; et al. | 2005-12-15 |
| Magnetron plasma-use magnetic field generation device App 20050211383 - Miyata, Koji ; et al. | 2005-09-29 |
| Processing apparatus and gas discharge suppressing member App 20050011456 - Himori, Shinji ; et al. | 2005-01-20 |
| Plasma processing apparatus App 20040244688 - Himori, Shinji ; et al. | 2004-12-09 |
| Plasma processing apparatus and focus ring App 20040134618 - Endoh, Shosuke ; et al. | 2004-07-15 |
| Apparatus for holding an object to be processed Grant 6,733,624 - Koshiishi , et al. May 11, 2 | 2004-05-11 |
| Plasma processing method and plasma processor App 20040040931 - Koshiishi, Akira ; et al. | 2004-03-04 |
| Plasma treatment apparatus App 20040020431 - Himori, Shinji ; et al. | 2004-02-05 |
| Apparatus for holding an object to be processed App 20030106647 - Koshiishi, Akira ; et al. | 2003-06-12 |
| Plasma processing apparatus App 20030086840 - Himori, Shinji ; et al. | 2003-05-08 |
| Matching unit and plasma processing system App 20020134508 - Himori, Shinji ; et al. | 2002-09-26 |
| Plasma processing method Grant 5,888,907 - Tomoyasu , et al. March 30, 1 | 1999-03-30 |
| Method of forming a thin film Grant 5,514,425 - Ito , et al. May 7, 1 | 1996-05-07 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 