Patent | Date |
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Detection Of Defects On Metal Surfaces App 20210063317 - Poduri; Shripriya Darshini ;   et al. | 2021-03-04 |
Selective electrochemical accelerator removal Grant 8,795,482 - Mayer , et al. August 5, 2 | 2014-08-05 |
Topography reduction and control by selective accelerator removal Grant 8,470,191 - Mayer , et al. June 25, 2 | 2013-06-25 |
Selective electrochemical accelerator removal Grant 8,268,154 - Mayer , et al. September 18, 2 | 2012-09-18 |
Topography reduction and control by selective accelerator removal Grant 8,158,532 - Mayer , et al. April 17, 2 | 2012-04-17 |
Protective layer to enable damage free gap fill Grant 8,133,797 - van Schravendijk , et al. March 13, 2 | 2012-03-13 |
VLSI fabrication processes for introducing pores into dielectric materials Grant 7,972,976 - van den Hoek , et al. July 5, 2 | 2011-07-05 |
Selective electrochemical accelerator removal Grant 7,799,200 - Mayer , et al. September 21, 2 | 2010-09-21 |
Sonic irradiation during wafer immersion Grant 7,727,863 - Buckalew , et al. June 1, 2 | 2010-06-01 |
Methods and apparatus for controlled-angle wafer positioning Grant 7,686,927 - Reid , et al. March 30, 2 | 2010-03-30 |
VLSI fabrication processes for introducing pores into dielectric materials Grant 7,629,224 - van den Hoek , et al. December 8, 2 | 2009-12-08 |
Protective Layer To Enable Damage Free Gap Fill App 20090286381 - van Schravendijk; Bart ;   et al. | 2009-11-19 |
Topography reduction and control by selective accelerator removal App 20090277867 - Mayer; Steven T. ;   et al. | 2009-11-12 |
Topography reduction and control by selective accelerator removal App 20090280649 - Mayer; Steven T. ;   et al. | 2009-11-12 |
VLSI fabrication processes for introducing pores into dielectric materials Grant 7,166,531 - van den Hoek , et al. January 23, 2 | 2007-01-23 |
Methods and apparatus for controlled-angle wafer positioning Grant 7,097,410 - Reid , et al. August 29, 2 | 2006-08-29 |
Method of fabricating low dielectric constant dielectric films Grant 6,995,439 - Hill , et al. February 7, 2 | 2006-02-07 |
Method of fabricating low dielectric constant dielectric films Grant 6,753,250 - Hill , et al. June 22, 2 | 2004-06-22 |
Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target Grant 6,500,321 - Ashtiani , et al. December 31, 2 | 2002-12-31 |