HILL; Henry Allen

Patent Applications and Registrations

Patent applications and USPTO patent grants for HILL; Henry Allen.The latest application filed is for "apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometry".

Company Profile

0.35.33

HILL; Henry Allen - Tucson AZ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus And Method For Joint Measurements Of Conjugated Quadratures Of Fields Of Reflected/scattered And Transmitted Beams By An Object In Interferometry App 20080180682 - HILL; Henry Allen	2008-07-31
Catoptric and catadioptric imaging systems with adaptive catoptric surfaces Grant 7,355,722 - Hill April 8, 2	2008-04-08
Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks Grant 7,345,771 - Hill March 18, 2	2008-03-18
Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers Grant 7,324,216 - Hill January 29, 2	2008-01-29
Apparatus and method for ellipsometric measurements with high spatial resolution Grant 7,324,209 - Hill January 29, 2	2008-01-29
Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy Grant 7,312,877 - Hill December 25, 2	2007-12-25
Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry Grant 7,298,496 - Hill November 20, 2	2007-11-20
Optical beam shearing apparatus Grant 7,274,468 - Hill , et al. September 25, 2	2007-09-25
Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities Grant 7,263,259 - Hill August 28, 2	2007-08-28
Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy Grant 7,164,480 - Hill January 16, 2	2007-01-16
Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry Grant 7,161,680 - Hill January 9, 2	2007-01-09
Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces Grant 7,145,663 - Hill December 5, 2	2006-12-05
Longitudinal differential interferometric confocal microscopy Grant 7,133,139 - Hill November 7, 2	2006-11-07
Apparatus and method for joint measurement of fields of scattered/reflected or transmitted orthogonally polarized beams by an object in interferometry Grant 7,099,014 - Hill August 29, 2	2006-08-29
Interferometric confocal microscopy incorporating a pinhole array beam-splitter Grant 7,084,983 - Hill August 1, 2	2006-08-01
Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology Grant 7,084,984 - Hill August 1, 2	2006-08-01
Apparatus and method for measurement of fields of backscattered and forward scattered/reflected beams by an object in interferometry Grant 7,064,838 - Hill June 20, 2	2006-06-20
Method for constructing a catadioptric lens system Grant 7,054,077 - Hill May 30, 2	2006-05-30
Transverse differential interferometric confocal microscopy Grant 7,046,372 - Hill May 16, 2	2006-05-16
Method and apparatus for dark field interferometric confocal microscopy Grant 7,023,560 - Hill April 4, 2	2006-04-04
Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces App 20060066873 - Hill; Henry Allen	2006-03-30
Method and apparatus for stage mirror mapping Grant 7,019,843 - Hill March 28, 2	2006-03-28
Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers App 20060050283 - Hill; Henry Allen	2006-03-09
Leaky guided wave modes used in interferometric confocal microscopy to measure properties of trenches Grant 7,009,712 - Hill March 7, 2	2006-03-07
Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry App 20060033924 - Hill; Henry Allen	2006-02-16
Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry App 20050275848 - Hill, Henry Allen	2005-12-15
Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks App 20050254063 - Hill, Henry Allen	2005-11-17
Optical beam shearing apparatus App 20050213105 - Hill, Henry Allen ; et al.	2005-09-29
Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy App 20050206909 - Hill, Henry Allen	2005-09-22
Interferometric apparatus and method with phase shift compensation Grant 6,947,148 - Hill September 20, 2	2005-09-20
Catoptric and catadioptric imaging systems with adaptive catoptric surfaces App 20050195500 - Hill, Henry Allen	2005-09-08
Interferometers for measuring changes in optical beam direction Grant 6,917,432 - Hill , et al. July 12, 2	2005-07-12
Leaky guided wave modes used in interferometric confocal microscopy to measure properties of trenches App 20050128487 - Hill, Henry Allen	2005-06-16
Apparatus and method for ellipsometric measurements with high spatial resolution App 20050111006 - Hill, Henry Allen	2005-05-26
Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology App 20050036149 - Hill, Henry Allen	2005-02-17
Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometry App 20040257577 - Hill, Henry Allen	2004-12-23
Interferometric confocal microscopy incorporating a pinhole array beam-splitter App 20040246486 - Hill, Henry Allen	2004-12-09
Apparatus and method for measurement of fields of backscattered and forward scattered/reflected beams by an object in interferometry App 20040227950 - Hill, Henry Allen	2004-11-18
Method for constructing a catadioptric lens system App 20040228008 - Hill, Henry Allen	2004-11-18
Apparatus and method for joint measurement of fields of scattered/reflected or transmitted orthogonally polarized beams by an object in interferometry App 20040227951 - Hill, Henry Allen	2004-11-18
Tilted interferometer Grant 6,806,962 - Hill October 19, 2	2004-10-19
Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities App 20040202426 - Hill, Henry Allen	2004-10-14
Longitudinal differential interferometric confocal microscopy App 20040201854 - Hill, Henry Allen	2004-10-14
Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy App 20040201852 - Hill, Henry Allen	2004-10-14
Transverse differential interferometric confocal microscopy App 20040201853 - Hill, Henry Allen	2004-10-14
Method and apparatus for dark field interferometric confocal microscopy App 20040201855 - Hill, Henry Allen	2004-10-14
Interferometer system and litographic step-and-scan apparatus provided with such a system Grant 6,795,197 - Hill September 21, 2	2004-09-21
Optical storage system based on scanning interferometric near-field confocal microscopy Grant 6,753,968 - Hill June 22, 2	2004-06-22
Apparatus and method for measuring mirrors in situ Grant 6,710,884 - Hill March 23, 2	2004-03-23
Interferometric apparatus for measuring the topography of mirrors in situ and providing error correction signals therefor Grant 6,700,665 - Hill March 2, 2	2004-03-02
Interferometric apparatus for precision measurement of altitude to a surface Grant 6,650,419 - Hill November 18, 2	2003-11-18
Method and apparatus for stage mirror mapping App 20030210404 - Hill, Henry Allen	2003-11-13
Optical storage system based on scanning interferometric near-field confocal microscopy Grant 6,606,159 - Hill August 12, 2	2003-08-12
Optical storage system based on scanning interferometric near-field confocal microscopy App 20030147083 - Hill, Henry Allen	2003-08-07
Interferometers for measuring changes in optical beam direction App 20030117631 - Hill, Henry Allen ; et al.	2003-06-26
Dynamic angle measuring interferometer Grant 6,563,593 - Hill May 13, 2	2003-05-13
Tilted interferometer App 20030038947 - Hill, Henry Allen	2003-02-27
In-situ mirror characterization App 20030035114 - Hill, Henry Allen	2003-02-20
Interferometric apparatus and method with phase shift compensation App 20030020921 - Hill, Henry Allen	2003-01-30
Interferometer system and lithographic step-and-scan apparatus provided with such a system App 20020196448 - Hill, Henry Allen	2002-12-26
Scanning interferometric near-field confocal microscopy Grant 6,445,453 - Hill September 3, 2	2002-09-03
Dynamic angle measuring interferometer App 20020033951 - Hill, Henry Allen	2002-03-21
Apparatus and method for interferometric measurements of angular orientation and distance to a plane mirror object App 20020001087 - Hill, Henry Allen	2002-01-03
Gas insensitive interferometric apparatus and methods Grant 6,330,065 - Hill December 11, 2	2001-12-11
Interferometric apparatus and method(s) for precision measurement of altitude above a surface App 20010046053 - Hill, Henry Allen	2001-11-29
In-situ mirror characterization App 20010035959 - Hill, Henry Allen	2001-11-01
Interferometers utilizing polarization preserving optical systems Grant 6,201,609 - Hill , et al. March 13, 2	2001-03-13
Apparatus to transform with high efficiency a single frequency, linearly polarized laser beam into beams with two orthogonally polarized frequency components orthogonally polarized Grant 5,862,164 - Hill January 19, 1	1999-01-19

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