Hill; Henry A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hill; Henry A..The latest application filed is for "alignment metrology and resolution measurement system for imaging arrays".

Company Profile

0.94.85

Hill; Henry A. - Tucson AZ
Hill; Henry A. - Tuscon AZ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Alignment metrology and resolution measurement system for imaging arrays Grant 8,675,077 - Hill , et al. March 18, 2	2014-03-18
Multiple-degree of freedom interferometer with compensation for gas effects Grant 7,894,075 - Hill February 22, 2	2011-02-22
Compensation of effects of atmospheric perturbations in optical metrology Grant 7,826,063 - Hill November 2, 2	2010-11-02
Distance measuring interferometer and encoder metrology systems for use in lithography tools Grant 7,812,964 - Hill October 12, 2	2010-10-12
Multiple-degree of freedom interferometer with compensation for gas effects Grant 7,812,965 - Hill October 12, 2	2010-10-12
Apparatus for reducing wavefront errors in output beams of acousto-optic devices Grant 7,697,195 - Hill April 13, 2	2010-04-13
Alignment Metrology And Resolution Measurement System For Imaging Arrays App 20100020180 - Hill; Henry A. ; et al.	2010-01-28
Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase shifting point-diffraction interferometry Grant 7,646,490 - Hill January 12, 2	2010-01-12
Cyclic error compensation in interferometry systems Grant 7,616,322 - Hill , et al. November 10, 2	2009-11-10
Multi-axis interferometers and methods and systems using multi-axis interferometers Grant 7,548,322 - Hill June 16, 2	2009-06-16
Angle interferometers Grant 7,532,330 - Hill May 12, 2	2009-05-12
Apparatus and methods for reducing non-cyclic non-linear errors in interferometry Grant 7,528,962 - Hill May 5, 2	2009-05-05
Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers Grant 7,528,961 - Hill May 5, 2	2009-05-05
Apparatus and method of in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry Grant 7,508,527 - Hill March 24, 2	2009-03-24
Beam shear reduction in interferometry systems Grant 7,495,770 - Hill February 24, 2	2009-02-24
Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometry Grant 7,495,769 - Hill February 24, 2	2009-02-24
Error correction in interferometry systems Grant 7,489,407 - Hill , et al. February 10, 2	2009-02-10
Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometry Grant 7,460,245 - Hill December 2, 2	2008-12-02
Multiple-degree of freedom interferometer with compensation for gas effects App 20080285051 - Hill; Henry A.	2008-11-20
Apparatus and Method For Nanoradian Metrology of Changes In Angular Orientation of A Vibrating Mirror Using Multi-Pass Optical Systems App 20080285106 - Hill; Henry A.	2008-11-20
Multi-axis interferometer with procedure and data processing for mirror mapping Grant 7,433,049 - Hill , et al. October 7, 2	2008-10-07
Cyclic error compensation in interferometry systems Grant 7,428,685 - Demarest , et al. September 23, 2	2008-09-23
Apparatus and method for in situ and ex situ measurements of optical system flare Grant 7,428,058 - Hill September 23, 2	2008-09-23
Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry Grant 7,405,832 - Hill July 29, 2	2008-07-29
Distance Measuring Interferometer and Encoder Metrology Systems for Use in Lithography Tools App 20080165345 - Hill; Henry A.	2008-07-10
Multiple-degree of freedom interferometer with compensation for gas effects App 20080151229 - Hill; Henry A.	2008-06-26
Coating for reflective optical components Grant 7,382,466 - Hill June 3, 2	2008-06-03
Stage alignment in lithography tools Grant 7,379,190 - Hill May 27, 2	2008-05-27
Multi-Axis Interferometers and Methods and Systems Using Multi-Axis Interferometers App 20080117428 - Hill; Henry A.	2008-05-22
Interferometry systems and methods of using interferometry systems Grant 7,375,823 - Womack , et al. May 20, 2	2008-05-20
Compensation Of Effects Of Atmospheric Perturbations In Optical Metrology App 20080062405 - Hill; Henry A.	2008-03-13
Compensation for geometric effects of beam misalignments in plane mirror interferometers Grant 7,330,274 - Hill February 12, 2	2008-02-12
Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shiftin point-diffraction interferometry App 20080030742 - Hill; Henry A.	2008-02-07
Compensation for effects of beam misalignments in interferometer metrology systems Grant 7,327,465 - Hill February 5, 2	2008-02-05
Measurement and compensation of errors in interferometers Grant 7,321,432 - Hill January 22, 2	2008-01-22
Apparatus For Reducing Wavefront Errors In Output Beams Of Acousto-optic Devices App 20070279637 - Hill; Henry A.	2007-12-06
Characterization and compensation of errors in multi-axis interferometry systems Grant 7,289,226 - Hill October 30, 2	2007-10-30
Compensation for geometric effects of beam misalignments in plane mirror interferometer metrology systems Grant 7,286,240 - Hill October 23, 2	2007-10-23
Multi-axis interferometers and methods and systems using multi-axis interferometers Grant 7,283,248 - Hill October 16, 2	2007-10-16
Interferometry systems and methods of using interferometry systems Grant 7,280,223 - Hill , et al. October 9, 2	2007-10-09
Interferometry systems and methods of using interferometry systems Grant 7,280,224 - Hill , et al. October 9, 2	2007-10-09
In SITU measurement and compensation of errors due to imperfections in interferometer optics in displacement measuring interferometry systems Grant 7,274,462 - Hill September 25, 2	2007-09-25
Compensation of refractivity perturbations in an interferometer path Grant 7,268,888 - Hill September 11, 2	2007-09-11
Compensation for errors in off-axis interferometric measurements Grant 7,262,860 - Hill August 28, 2	2007-08-28
Spatial filtering in interferometry Grant 7,251,041 - Hill July 31, 2	2007-07-31
Apparatus and method for reducing effects of coherent artifacts and compensation of effects of vibrations and environmental changes in interferometry App 20070121115 - Hill; Henry A.	2007-05-31
Angle interferometers App 20070064240 - Hill; Henry A.	2007-03-22
Optical interferometry Grant 7,193,726 - Hill March 20, 2	2007-03-20
Apparatus and Methods for Reduction and Compensation of Effects of Vibrations and of Environmental Effects in Wavefront Interferometry App 20070058174 - Hill; Henry A.	2007-03-15
Apparatus and Method for Measurement and Compensation of Atmospheric Turbulence Effects in Wavefront Interferometry App 20070046951 - Hill; Henry A.	2007-03-01
Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces Grant 7,180,604 - Hill February 20, 2	2007-02-20
Reduction of thermal non-cyclic error effects in interferometers Grant 7,180,603 - Hill , et al. February 20, 2	2007-02-20
Beam shear reduction in interferometry systems App 20070035742 - Hill; Henry A.	2007-02-15
Continuously Tunable External Cavity Diode Laser Sources With High Tuning And Switching Rates And Extended Tuning Ranges App 20070014319 - Hill; Henry A. ; et al.	2007-01-18
Cyclic Error Compensation in Interferometry Systems App 20070008547 - Hill; Henry A. ; et al.	2007-01-11
Apparatus and methods for reducing non-cyclic non-linear errors in interferometry App 20070002330 - Hill; Henry A.	2007-01-04
Apparatus and method for in situ and ex situ measurements of optical system flare App 20060285124 - Hill; Henry A.	2006-12-21
Interferometry systems involving a dynamic beam-steering assembly Grant 7,139,080 - Hill , et al. November 21, 2	2006-11-21
Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers App 20060256346 - Hill; Henry A.	2006-11-16
Apparatus and method of in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry App 20060250620 - Hill; Henry A.	2006-11-09
Multi-axis interferometer with procedure and data processing for mirror mapping App 20060215173 - Hill; Henry A. ; et al.	2006-09-28
Interferometry systems and methods of using interferometry systems App 20060187464 - Womack; Gary ; et al.	2006-08-24
Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces Grant 7,095,508 - Hill August 22, 2	2006-08-22
In-process correction of stage mirror deformations during a photolithography exposure cycle Grant 7,075,619 - Hill July 11, 2	2006-07-11
Cyclic error reduction in average interferometric position measurements Grant 7,057,736 - Hill June 6, 2	2006-06-06
Separated beam multiple degree of freedom interferometer Grant 7,057,739 - Hill June 6, 2	2006-06-06
Interferometric servo control system for stage metrology Grant 7,046,367 - Hill May 16, 2	2006-05-16
Compensating for effects of non-isotropic gas mixtures in interferometers Grant 7,042,574 - Hill May 9, 2	2006-05-09
Catoptric And Catadioptric Imaging Systems With Pellicle And Aperture-array Beam-splitters And Non-adaptive And Adaptive Catoptric Surfaces App 20060092429 - Hill; Henry A.	2006-05-04
Method and apparatus to measure fiber optic pickup errors in interferometry systems Grant 7,030,994 - Hill April 18, 2	2006-04-18
Error correction in interferometry systems App 20060072119 - Hill; Henry A. ; et al.	2006-04-06
Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces App 20060072204 - Hill; Henry A.	2006-04-06
Compensation for effects of beam misalignments in interferometer metrology systems App 20060061771 - Hill; Henry A.	2006-03-23
Retroreflector coating for an interferometer Grant 7,009,711 - Hill March 7, 2	2006-03-07
Dynamic interferometer controlling direction of input beam Grant 6,987,569 - Hill January 17, 2	2006-01-17
Coating for reflective optical components App 20060001888 - Hill; Henry A.	2006-01-05
Interferometry systems and methods of using interferometry systems App 20050248772 - Hill, Henry A. ; et al.	2005-11-10
Interferometry systems and methods of using interferometry systems App 20050237536 - Hill, Henry A. ; et al.	2005-10-27
Characterization and compensation of non-cyclic errors in interferometry systems Grant 6,956,655 - Hill October 18, 2	2005-10-18
Interferometric servo control system for stage metrology Grant 6,956,656 - Hill October 18, 2	2005-10-18
Interferometric servo control system for stage metrology App 20050225772 - Hill, Henry A.	2005-10-13
Cyclic error compensation in interferometry systems Grant 6,950,192 - Hill September 27, 2	2005-09-27
Spatial filtering in interferometry App 20050168755 - Hill, Henry A.	2005-08-04
Cyclic error reduction in average interferometric position measurements App 20050168754 - Hill, Henry A.	2005-08-04
Interferometry system error compensation in twin stage lithography tools Grant 6,924,896 - Hill August 2, 2	2005-08-02
Cyclic error compensation in interferometry systems App 20050166118 - Demarest, Frank C. ; et al.	2005-07-28
Compensation for errors in off-axis interferometric measurements App 20050162664 - Hill, Henry A.	2005-07-28
Measurement and compensation of errors in interferometers App 20050157309 - Hill, Henry A.	2005-07-21
Stage alignment in lithography tools App 20050151951 - Hill, Henry A.	2005-07-14
Multi-axis interferometers and methods and systems using multi-axis interferometers App 20050146727 - Hill, Henry A.	2005-07-07
Interferometric stage system Grant 6,912,054 - Hill June 28, 2	2005-06-28
Characterization and compensation of errors in multi-axis interferometry systems App 20050134862 - Hill, Henry A.	2005-06-23
Spatial filtering in interferometry Grant 6,906,784 - Hill June 14, 2	2005-06-14
Catoptric and catadioptric imaging system with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces App 20050111007 - Hill, Henry A. ; et al.	2005-05-26
Cyclic error reduction in average interferometric position measurements Grant 6,891,624 - Hill May 10, 2	2005-05-10
Reduction of thermal non-cyclic error effects in interferometers App 20050094155 - Hill, Henry A. ; et al.	2005-05-05
Interferometry system having a dynamic beam steering assembly for measuring angle and distance Grant 6,888,638 - Hill May 3, 2	2005-05-03
Spatial filtering in interferometry Grant 6,882,430 - Hill April 19, 2	2005-04-19
Interferometric stage metrology system Grant 6,867,867 - Hill March 15, 2	2005-03-15
Interferometer with dynamic beam steering element Grant 6,856,402 - Hill February 15, 2	2005-02-15
Spatial filtering in interferometry App 20050030549 - Hill, Henry A.	2005-02-10
Compensation for geometric effects of beam misalignments in plane mirror interferometer metrology systems App 20050018206 - Hill, Henry A.	2005-01-27
Passive zero shear interferometers Grant 6,847,452 - Hill January 25, 2	2005-01-25
Multiple-source arrays with optical transmission enhanced by resonant cavities Grant 6,847,029 - Hill January 25, 2	2005-01-25
Compensating for effects of variations in gas refractivity in interferometers Grant 6,842,256 - Hill January 11, 2	2005-01-11
Method and apparatus for compensation of time-varying optical properties of gas in interferometry Grant 6,839,141 - Hill January 4, 2	2005-01-04
Multi-axis interferometer Grant 6,836,335 - Hill , et al. December 28, 2	2004-12-28
Multi-axis interferometer Grant 6,819,434 - Hill November 16, 2	2004-11-16
Interferometric cyclic error compensation Grant 6,806,961 - Hill October 19, 2	2004-10-19
Interferometric servo control system for stage metrology App 20040189998 - Hill, Henry A.	2004-09-30
Multiple-pass interferometry Grant 6,791,693 - Hill September 14, 2	2004-09-14
Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components Grant 6,778,280 - De Groot , et al. August 17, 2	2004-08-17
Differential interferometric scanning near-field confocal microscopy Grant 6,775,009 - Hill August 10, 2	2004-08-10
Compensation of refractivity perturbations in an interferometer path App 20040141185 - Hill, Henry A.	2004-07-22
In-process correction of stage mirror deformations during a photolithography exposure cycle App 20040135980 - Hill, Henry A.	2004-07-15
Multiple-pass interferometry Grant 6,762,845 - Hill July 13, 2	2004-07-13
Multiple degree of freedom interferometer Grant 6,757,066 - Hill June 29, 2	2004-06-29
Interferometry systems involving a dynamic beam-steering assembly App 20040114152 - Hill, Henry A. ; et al.	2004-06-17
Interferometric servo control system for stage metrology Grant 6,747,744 - Hill June 8, 2	2004-06-08
Cyclic error compensation in interferometry systems App 20040085545 - Hill, Henry A.	2004-05-06
Measurement and compensation of errors in interferometers App 20040085546 - Hill, Henry A.	2004-05-06
Method and apparatus to reduce effects of sheared wavefronts on interferometric phase measurements Grant 6,727,992 - Hill April 27, 2	2004-04-27
Catoptric and catadioptric imaging systems Grant 6,717,736 - Hill April 6, 2	2004-04-06
Compensation for errors in off-axis interferometric measurements App 20040061869 - Hill, Henry A.	2004-04-01
Interferometric stage metrology system App 20040046965 - Hill, Henry A.	2004-03-11
Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation Grant 6,667,809 - Hill December 23, 2	2003-12-23
Compensation for geometric effects of beam misalignments in plane mirror interferometers App 20030223077 - Hill, Henry A.	2003-12-04
Interferometry system error compensation in twin stage lithography tools App 20030223079 - Hill, Henry A.	2003-12-04
Retroreflector coating for an interferometer App 20030223080 - Hill, Henry A.	2003-12-04
Multi-axis interferometer App 20030218757 - Hill, Henry A.	2003-11-27
Spatial filtering in interferometry App 20030211402 - Hill, Henry A.	2003-11-13
Single-pass and multi-pass interferometry systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion Grant 6,631,004 - Hill , et al. October 7, 2	2003-10-07
Separated beam multiple degree of freedom interferometer App 20030186136 - Hill, Henry A.	2003-10-02
Method and apparatus for compensation of time-varying optical properties of gas in interferometry App 20030186134 - Hill, Henry A.	2003-10-02
Interferometer with dynamic beam steering element App 20030184759 - Hill, Henry A.	2003-10-02
Method and apparatus to measure fiber optic pickup errors in interferometry systems App 20030174340 - Hill, Henry A.	2003-09-18
Characterization and compensation of non-cyclic errors in interferometry systems App 20030174341 - Hill, Henry A.	2003-09-18
Multiple-pass interferometry App 20030169429 - Hill, Henry A.	2003-09-11
Multiple degree of freedom interferometer App 20030164948 - Hill, Henry A.	2003-09-04
Compensating for effects of variations in gas refractivity in interferometers App 20030151750 - Hill, Henry A.	2003-08-14
Compensating for effects of non-isotropic gas mixtures in interferometers App 20030128369 - Hill, Henry A.	2003-07-10
Interferometric cyclic error compensation App 20030095265 - Hill, Henry A.	2003-05-22
Catoptric and catadioptric imaging systems Grant 6,552,852 - Hill April 22, 2	2003-04-22
Control of position and orientation of sub-wavelength aperture array in near-field microscopy Grant 6,552,805 - Hill April 22, 2	2003-04-22
Interferometry system having a dynamic beam-steering assembly for measuring angle and distance and employing optical fibers for remote photoelectric detection Grant 6,541,759 - Hill April 1, 2	2003-04-01
Passive zero shear interferometers App 20030053073 - Hill, Henry A.	2003-03-20
Optical interferometry App 20030053079 - Hill, Henry A.	2003-03-20
Interferometric stage system App 20030053074 - Hill, Henry A.	2003-03-20
Multiple-pass interferometry App 20030048456 - Hill, Henry A.	2003-03-13
Dynamic interferometer controlling direction of input beam App 20030043384 - Hill, Henry A.	2003-03-06
Interferometer and method for measuring the refractive index and optical path length effects of air Grant 6,525,825 - de Groot , et al. February 25, 2	2003-02-25
Multi-axis interferometer App 20030030818 - Hill, Henry A. ; et al.	2003-02-13
Method and system for correcting an interferometric angle measurement for the effects of dispersion Grant 6,512,588 - Hill January 28, 2	2003-01-28
Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components App 20030007156 - De Groot, Peter J. ; et al.	2003-01-09
Method and apparatus to reduce effects of sheared wavefronts on interferometric phase measurements App 20030007158 - Hill, Henry A.	2003-01-09
Cyclic error reduction in average interferometric position measurements App 20020171844 - Hill, Henry A.	2002-11-21
Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation Grant 6,480,285 - Hill November 12, 2	2002-11-12
Multiple-source arrays with optical transmission enhanced by resonant cavities App 20020148955 - Hill, Henry A.	2002-10-17
Interferometer and method for measuring the refractive index and optical path length effects of air App 20020140945 - de Groot, Peter ; et al.	2002-10-03
Interferometer and method for measuring the refractive index and optical path length effects of air App 20020140946 - Groot, Peter de ; et al.	2002-10-03
Interferometer and method for measuring the refractive index and optical path length effects of air App 20020131053 - Groot, Peter De ; et al.	2002-09-19
Catoptric and catadioptric imaging systems App 20020131179 - Hill, Henry A.	2002-09-19
Interferometric servo control system for stage metrology App 20020089671 - Hill, Henry A.	2002-07-11
Multiple-source arrays for confocal and near-field microscopy App 20020074493 - Hill, Henry A. ; et al.	2002-06-20
Control of position and orientation of sub-wavelength aperture array in near-field microscopy App 20020033952 - Hill, Henry A.	2002-03-21
Differential interferometric scanning near-field confocal microscopy App 20020033953 - Hill, Henry A.	2002-03-21
Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation App 20020021451 - Hill, Henry A.	2002-02-21
Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion Grant 6,313,918 - Hill , et al. November 6, 2	2001-11-06
Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam App 20010028461 - Hill, Henry A. ; et al.	2001-10-11
Interferometry system having a dynamic beam steering assembly for measuring angle and distance Grant 6,271,923 - Hill August 7, 2	2001-08-07
Systems and methods for quantifying nonlinearities in interferometry systems Grant 6,252,668 - Hill June 26, 2	2001-06-26
Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam components Grant 6,236,507 - Hill , et al. May 22, 2	2001-05-22
Systems and methods for characterizing and correcting cyclic errors in distance measuring and dispersion interferometry Grant 6,137,574 - Hill October 24, 2	2000-10-24
Multiple layer, multiple track optical disk access by confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation Grant 6,091,496 - Hill July 18, 2	2000-07-18
Method and apparatus for discriminating in-focus images from out-of-focus light signals from background and foreground light sources Grant 5,915,048 - Hill , et al. June 22, 1	1999-06-22
Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation Grant 5,760,901 - Hill June 2, 1	1998-06-02
System for reducing the effects of background radiation Grant 4,397,558 - Hill , et al. August 9, 1	1983-08-09
Background compensating interferometer Grant 4,304,464 - Hill , et al. December 8, 1	1981-12-08

Company Registrations

SEC

0001376965

HILL HENRY A