Hill; Andrew V.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hill; Andrew V..The latest application filed is for "modulation of scanning velocity during overlay metrology".

Company Profile

21.37.38

Hill; Andrew V. - Sunriver OR
Hill; Andrew V. - Berkeley CA
Hill; Andrew V. - Berkley CA
Hill; Andrew V. - Portland OR
Hill; Andrew V. - Sunnyvale CA
Hill; Andrew V. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Modulation Of Scanning Velocity During Overlay Metrology App 20220307825 - Brown; David L. ; et al.	2022-09-29
Multi-field Scanning Overlay Metrology App 20220283514 - Hill; Andrew V. ; et al.	2022-09-08
Scanning scatterometry overlay measurement Grant 11,428,642 - Hill , et al. August 30, 2	2022-08-30
Scanning Scatterometry Overlay Measurement App 20220214285 - Hill; Andrew V. ; et al.	2022-07-07
Darkfield imaging of grating target structures for overlay measurement Grant 11,359,916 - Hill , et al. June 14, 2	2022-06-14
Measurement modes for overlay Grant 11,346,657 - Manassen , et al. May 31, 2	2022-05-31
Pupil-plane beam scanning for metrology Grant 11,300,524 - Hill , et al. April 12, 2	2022-04-12
Grey-mode scanning scatterometry overlay metrology Grant 11,300,405 - Manassen , et al. April 12, 2	2022-04-12
Grey-mode Scanning Scatterometry Overlay Metrology App 20220034652 - Manassen; Amnon ; et al.	2022-02-03
Imaging System For Buried Metrology Targets App 20210372784 - Hill; Andrew V. ; et al.	2021-12-02
Spectral filter for high-power fiber illumination sources Grant 11,187,838 - Hill , et al. November 30, 2	2021-11-30
Measurement Modes for Overlay App 20210364279 - Manassen; Amnon ; et al.	2021-11-25
High-brightness illumination source for optical metrology Grant 11,156,846 - Manassen , et al. October 26, 2	2021-10-26
Metrology Target For Scanning Metrology App 20210311401 - Hill; Andrew V. ; et al.	2021-10-07
Efficient illumination shaping for scatterometry overlay Grant 11,118,903 - Hill , et al. September 14, 2	2021-09-14
Broadband Illumination Tuning App 20210247601 - Hill; Andrew V. ; et al.	2021-08-12
Metrology target for scanning metrology Grant 11,073,768 - Hill , et al. July 27, 2	2021-07-27
Nano-structured non-polarizing beamsplitter Grant 10,976,562 - Gorelik , et al. April 13, 2	2021-04-13
Sensitive Optical Metrology in Scanning and Static Modes App 20210096061 - Hill; Andrew V. ; et al.	2021-04-01
Darkfield Imaging Of Grating Target Structures For Overlay Measurement App 20210072021 - Hill; Andrew V. ; et al.	2021-03-11
Metrology Target for Scanning Metrology App 20200409271 - Hill; Andrew V. ; et al.	2020-12-31
High-Brightness Illumination Source for Optical Metrology App 20200333612 - Manassen; Amnon ; et al.	2020-10-22
Localized telecentricity and focus optimization for overlay metrology Grant 10,677,588 - Hill , et al.	2020-06-09
Efficient Illumination Shaping for Scatterometry Overlay App 20200124408 - Hill; Andrew V. ; et al.	2020-04-23
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology Grant 10,533,940 - Manassen , et al. Ja	2020-01-14
Off-axis reflective afocal optical relay Grant 10,527,830 - Hill , et al. J	2020-01-07
Systems and methods for metrology with layer-specific illumination spectra Grant 10,444,161 - Manassen , et al. Oc	2019-10-15
Localized Telecentricity and Focus Optimization for Overlay Metrology App 20190310080 - Hill; Andrew V. ; et al.	2019-10-10
System and method for spectral tuning of broadband light sources Grant 10,422,508 - Hill , et al. Sept	2019-09-24
Simultaneous capturing of overlay signals from multiple targets Grant 10,401,228 - Hill , et al. Sep	2019-09-03
Overlay metrology using multiple parameter configurations Grant 10,401,738 - Hill , et al. Sep	2019-09-03
System and method for generating multi-channel tunable illumination from a broadband source Grant 10,371,626 - Hill , et al.	2019-08-06
Nano-Structured Non-Polarizing Beamsplitter App 20190107727 - Gorelik; Dmitry ; et al.	2019-04-11
Scanning in Angle-Resolved Reflectometry and Algorithmically Eliminating Diffraction from Optical Metrology App 20190094142 - Manassen; Amnon ; et al.	2019-03-28
Systems for providing illumination in optical metrology Grant 10,203,247 - Brady , et al. Feb	2019-02-12
Overlay Metrology Using Multiple Parameter Configurations App 20190041329 - Hill; Andrew V. ; et al.	2019-02-07
Spectral Filter for High-Power Fiber Illumination Sources App 20190033501 - Hill; Andrew V. ; et al.	2019-01-31
Compound objectives for imaging and scatterometry overlay Grant 10,139,528 - Seligson , et al. Nov	2018-11-27
Simultaneous Capturing of Overlay Signals From Multiple Targets App 20180335346 - Hill; Andrew V. ; et al.	2018-11-22
Systems and Methods for Metrology with Layer-Specific Illumination Spectra App 20180292326 - Manassen; Amnon ; et al.	2018-10-11
Simultaneous capturing of overlay signals from multiple targets Grant 10,048,132 - Hill , et al. August 14, 2	2018-08-14
System and method for hyperspectral imaging metrology Grant 10,018,560 - Hill July 10, 2	2018-07-10
Spectral control system Grant 9,921,050 - Manassen , et al. March 20, 2	2018-03-20
System and Method for Generating Multi-Channel Tunable Illumination from a Broadband Source App 20180052099 - Hill; Andrew V. ; et al.	2018-02-22
Off-Axis Reflective Afocal Optical Relay App 20180045932 - Hill; Andrew V. ; et al.	2018-02-15
Simultaneous Capturing Of Overlay Signals From Multiple Targets App 20180031424 - Hill; Andrew V. ; et al.	2018-02-01
System and Method for Spectral Tuning of Broadband Light Sources App 20170350575 - Hill; Andrew V. ; et al.	2017-12-07
Apodization for pupil imaging scatterometry Grant 9,784,987 - Hill , et al. October 10, 2	2017-10-10
System and Method for Hyperspectral Imaging Metrology App 20170219487 - Hill; Andrew V.	2017-08-03
Systems for Providing Illumination in Optical Metrology App 20170146399 - Brady; Gregory R. ; et al.	2017-05-25
Systems for providing illumination in optical metrology Grant 9,512,985 - Brady , et al. December 6, 2	2016-12-06
Spectral Control System App 20160305766 - Manassen; Amnon ; et al.	2016-10-20
Spectral control system Grant 9,341,769 - Manassen , et al. May 17, 2	2016-05-17
Method for reducing aliasing in TDI based imaging Grant 9,297,769 - Hill , et al. March 29, 2	2016-03-29
Apodization for Pupil Imaging Scatterometry App 20150316783 - Hill; Andrew V. ; et al.	2015-11-05
Apodization for pupil imaging scatterometry Grant 9,091,650 - Hill , et al. July 28, 2	2015-07-28
Method for reducing aliasing in TDI based imaging Grant 8,947,521 - Hill , et al. February 3, 2	2015-02-03
Discrete polarization scatterometry Grant 8,896,832 - Hill , et al. November 25, 2	2014-11-25
Systems for Providing Illumination in Optical Metrology App 20140240951 - Brady; Gregory R. ; et al.	2014-08-28
Spectral Control System App 20140168650 - Manassen; Amnon ; et al.	2014-06-19
Apodization for Pupil Imaging Scatterometry App 20140146322 - Hill; Andrew V. ; et al.	2014-05-29
Discrete Polarization Scatterometry App 20110310388 - Hill; Andrew V. ; et al.	2011-12-22
System and Method for Determining Image Focus by Sampling the Image at Multiple Focal Planes Simultaneously App 20110228070 - Mehanian; Courosh ; et al.	2011-09-22
Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimen Grant 7,940,384 - Hill , et al. May 10, 2	2011-05-10
Systems and method for simultaneously inspecting a specimen with two distinct channels Grant 7,782,452 - Mehanian , et al. August 24, 2	2010-08-24
Systems and Method for Simultaneously Inspecting a Specimen with Two Distinct Channels App 20090059215 - Mehanian; Courosh ; et al.	2009-03-05
Serrated Fourier filters and inspection systems Grant 7,397,557 - Jeong , et al. July 8, 2	2008-07-08
Systems And Methods For Blocking Specular Reflection And Suppressing Modulation From Periodic Features On A Specimen App 20080144034 - Hill; Andrew V. ; et al.	2008-06-19
Fourier filters and wafer inspection systems Grant 7,345,754 - Zhao , et al. March 18, 2	2008-03-18
Systems and methods for providing illumination of a specimen for inspection Grant 7,304,731 - Hill December 4, 2	2007-12-04
Systems and methods for providing illumination of a specimen for inspection App 20070052953 - Hill; Andrew V.	2007-03-08
Serrated fourier filters and inspection systems App 20060274305 - Jeong; Hwan J. ; et al.	2006-12-07