| Patent | Date |
|---|
Methods For Detection Using Optical Emission Spectroscopy
App 20220283029 - ZHU; Zuoming ; et al. | 2022-09-08 |
Rapid Chamber Vacuum Leak Check Hardware And Maintenance Routine
App 20220128425 - HILKENE; Martin A. ; et al. | 2022-04-28 |
Method And System For Foreline Deposition Diagnostics And Control
App 20220129698 - MORADIAN; Ala ; et al. | 2022-04-28 |
Atomic Oxygen Detection In Semiconductor Processing Chambers
App 20220093428 - Adams; Bruce E. ; et al. | 2022-03-24 |
Method And Hardware For Post Maintenance Vacuum Recovery System
App 20220065735 - Hilkene; Martin A. | 2022-03-03 |
Diode laser for wafer heating for EPI processes
Grant 11,171,023 - Chu , et al. November 9, 2 | 2021-11-09 |
Multi-thermal Cvd Chambers With Shared Gas Delivery And Exhaust System
App 20210324514 - YE; Zhiyuan ; et al. | 2021-10-21 |
Processing Chamber For Thermal Processes
App 20200373195 - Lau; Shu-Kwan ; et al. | 2020-11-26 |
Temperature controlled remote plasma clean for exhaust deposit removal
Grant 10,500,614 - Hilkene , et al. Dec | 2019-12-10 |
Material deposition for high aspect ratio structures
Grant 10,276,369 - Xue , et al. | 2019-04-30 |
Demagnetization of magnetic media by C doping for HDD patterned media application
Grant 10,233,538 - Hilkene , et al. | 2019-03-19 |
Material Deposition For High Aspect Ratio Structures
App 20180102248 - XUE; Jun ; et al. | 2018-04-12 |
Material deposition for high aspect ratio structures
Grant 9,852,902 - Xue , et al. December 26, 2 | 2017-12-26 |
Temperature Controlled Remote Plasma Clean For Exhaust Deposit Removal
App 20170304877 - HILKENE; Martin A. ; et al. | 2017-10-26 |
Resist Fortification For Magnetic Media Patterning
App 20170206922 - BENCHER; Christopher Dennis ; et al. | 2017-07-20 |
Resist fortification for magnetic media patterning
Grant 9,646,642 - Bencher , et al. May 9, 2 | 2017-05-09 |
Diode Laser For Wafer Heating For Epi Processes
App 20170103907 - CHU; Schubert S. ; et al. | 2017-04-13 |
Conversion process utilized for manufacturing advanced 3D features for semiconductor device applications
Grant 9,553,174 - Godet , et al. January 24, 2 | 2017-01-24 |
Demagnetization Of Magnetic Media By C Doping For Hdd Patterned Media Application
App 20160305013 - HILKENE; Martin A. ; et al. | 2016-10-20 |
Surface stabilization process to reduce dopant diffusion
Grant 9,390,930 - Rogers , et al. July 12, 2 | 2016-07-12 |
Demagnetization of magnetic media by C doping for HDD patterned media application
Grant 9,376,746 - Hilkene , et al. June 28, 2 | 2016-06-28 |
Material Deposition For High Aspect Ratio Structures
App 20160099154 - Xue; Jun ; et al. | 2016-04-07 |
Conversion Process Utilized For Manufacturing Advanced 3d Features For Semiconductor Device Applications
App 20150279974 - GODET; Ludovic ; et al. | 2015-10-01 |
Plasma Doping Of Silicon-Containing Films
App 20140273524 - Nguyen; Victor ; et al. | 2014-09-18 |
Carbon Film Hardmask Stress Reduction By Hydrogen Ion Implantation
App 20140273461 - LEE; Kwangduk Douglas ; et al. | 2014-09-18 |
Resist Fortification For Magnetic Media Patterning
App 20140147700 - BENCHER; Christopher Dennis ; et al. | 2014-05-29 |
Methods for substrate surface planarization during magnetic patterning by plasma immersion ion implantation
Grant 8,673,162 - Gouk , et al. March 18, 2 | 2014-03-18 |
Resist fortification for magnetic media patterning
Grant 8,658,242 - Bencher , et al. February 25, 2 | 2014-02-25 |
Temperature control of a substrate during a plasma ion implantation process for patterned disc media applications
Grant 8,586,952 - Hilkene , et al. November 19, 2 | 2013-11-19 |
Methods And Apparatus For Implanting A Dopant Material
App 20130288469 - SHARMA; SHASHANK ; et al. | 2013-10-31 |
Methods and apparatus for conformal doping
Grant 8,501,605 - Santhanam , et al. August 6, 2 | 2013-08-06 |
Methods for quantitative measurement of a plasma immersion process
Grant 8,492,177 - Yao , et al. July 23, 2 | 2013-07-23 |
Demagnetization Of Magnetic Media By C Doping For Hdd Patterned Media Application
App 20130164455 - Hilkene; Martin A. ; et al. | 2013-06-27 |
Methods For Quantitative Measurement Of A Plasma Immersion Process
App 20130137197 - YAO; DAPING ; et al. | 2013-05-30 |
Surface Stabilization Process To Reduce Dopant Diffusion
App 20130109162 - Rogers; Matthew S. ; et al. | 2013-05-02 |
Methods And Apparatus For Controlling Power Distribution In Substrate Processing Systems
App 20130014894 - LAI; CANFENG ; et al. | 2013-01-17 |
Methods And Apparatus For Controlling Power Distribution In Substrate Processing Systems
App 20130017315 - LAI; CANFENG ; et al. | 2013-01-17 |
Method for removing implanted photo resist from hard disk drive substrates
Grant 8,354,035 - Hilkene , et al. January 15, 2 | 2013-01-15 |
Pre Or Post-implant Plasma Treatment For Plasma Immersed Ion Implantation Process
App 20120302048 - Santhanam; Kartik ; et al. | 2012-11-29 |
Methods And Apparatus For Conformal Doping
App 20120238074 - SANTHANAM; KARTIK ; et al. | 2012-09-20 |
Resist Fortification For Magnetic Media Patterning
App 20120196155 - Bencher; Christopher D. ; et al. | 2012-08-02 |
Integrated Platform For In-situ Doping And Activation Of Substrates
App 20120088356 - SANTHANAM; KARTIK ; et al. | 2012-04-12 |
Removal Of Surface Dopants From A Substrate
App 20110256691 - Ramaswamy; Kartik ; et al. | 2011-10-20 |
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
Grant 8,003,500 - Vellaikal , et al. August 23, 2 | 2011-08-23 |
Removal of surface dopants from a substrate
Grant 7,989,329 - Ramaswamy , et al. August 2, 2 | 2011-08-02 |
Reducing photoresist layer degradation in plasma immersion ion implantation
Grant 7,968,401 - Hilkene , et al. June 28, 2 | 2011-06-28 |
Methods For Substrate Surface Planarization During Magnetic Patterning By Plasma Immersion Ion Implantation
App 20110143170 - Gouk; Roman ; et al. | 2011-06-16 |
Chamber For Processing Hard Disk Drive Substrates
App 20110127156 - Foad; Majeed A. ; et al. | 2011-06-02 |
Temperature Control Of A Substrate During A Plasma Ion Implantation Process For Patterned Disc Media Applications
App 20110101247 - Hilkene; Martin A. ; et al. | 2011-05-05 |
Plasma Ion Implantation Process For Patterned Disc Media Applications
App 20110104393 - Hilkene; Martin A. ; et al. | 2011-05-05 |
Method For Removing Implanted Photo Resist From Hard Disk Drive Substrates
App 20110006034 - Hilkene; Martin A. ; et al. | 2011-01-13 |
Reducing Photoresist Layer Degradation In Plasma Immersion Ion Implantation
App 20100190324 - HILKENE; MARTIN A. ; et al. | 2010-07-29 |
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
Grant 7,659,184 - Vellaikal , et al. February 9, 2 | 2010-02-09 |
Plasma Immersion Ion Implantation Process With Chamber Seasoning And Seasoning Layer Plasma Discharging For Wafer Dechucking
App 20090280628 - Vellaikal; Manoj ; et al. | 2009-11-12 |
Plasma Immersion Ion Implantation Process With Chamber Seasoning And Seasoning Layer Plasma Discharging For Wafer Dechucking
App 20090215251 - Vellaikal; Manoj ; et al. | 2009-08-27 |
Removal Of Surface Dopants From A Substrate
App 20090162996 - Ramaswamy; Kartik ; et al. | 2009-06-25 |
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