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Patent applications and USPTO patent grants for Higuchi; Takao.The latest application filed is for "spin-coating method, determination method for spin-coating condition and mask blank".
Patent | Date |
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Spin-coating method, determination method for spin-coating condition and mask blank Grant 8,293,326 - Kobayashi , et al. October 23, 2 | 2012-10-23 |
Mask blanks and method of producing the same Grant 7,674,561 - Kobayashi , et al. March 9, 2 | 2010-03-09 |
Spin-coating Method, Determination Method For Spin-coating Condition And Mask Blank App 20070148344 - KOBAYASHI; Hideo ;   et al. | 2007-06-28 |
Spin-coating method, determination method for spin-coating condition and mask blank Grant 7,195,845 - Kobayashi , et al. March 27, 2 | 2007-03-27 |
Mask blanks and method of producing the same App 20050069787 - Kobayashi, Hideo ;   et al. | 2005-03-31 |
Spin-coating method, determination method for spin-coating condition and mask blank App 20040009295 - Kobayashi, Hideo ;   et al. | 2004-01-15 |
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