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Patent applications and USPTO patent grants for Higuchi; Rintaro.The latest application filed is for "substrate processing method and substrate processing apparatus".
Patent | Date |
---|---|
Substrate processing apparatus and substrate processing method Grant 11,450,530 - Higuchi September 20, 2 | 2022-09-20 |
Substrate Processing Method And Substrate Processing Apparatus App 20210313171 - HIGUCHI; Rintaro ;   et al. | 2021-10-07 |
Substrate Processing Apparatus And Substrate Processing Method App 20210305053 - Higuchi; Rintaro | 2021-09-30 |
Substrate processing method and substrate processing apparatus Grant 11,049,723 - Hiroshiro , et al. June 29, 2 | 2021-06-29 |
Substrate Processing Method And Substrate Processing Apparatus App 20200219730 - Hiroshiro; Koukichi ;   et al. | 2020-07-09 |
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