Higuchi; Kimihiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Higuchi; Kimihiro.The latest application filed is for "plasma processor and plasma processing method".
- Higuchi; Kimihiro - Yamanashi JP
- Higuchi; Kimihiro - Nirasaki JP
- Higuchi; Kimihiro - Nirasaki-shi JP
- Higuchi; Kimihiro - Tokyo JP
- Higuchi, Kimihiro - Nirasaki-shi Yamanashi JP
- Higuchi; Kimihiro - Nakakoma-gun JP
- Higuchi; Kimihiro - Yamanashi-ken JP
| Patent | Date |
|---|---|
| Plasma processor and plasma processing method Grant 9,728,381 - Kikuchi , et al. August 8, 2 | 2017-08-08 |
| Plasma processor and plasma processing method Grant 9,437,402 - Kikuchi , et al. September 6, 2 | 2016-09-06 |
| Plasma Processor And Plasma Processing Method App 20150083332 - KIKUCHI; Akihiro ; et al. | 2015-03-26 |
| Plasma Processor And Plasma Processing Method App 20150083333 - KIKUCHI; Akihiro ; et al. | 2015-03-26 |
| Plasma processor and plasma processing method Grant 8,904,957 - Kikuchi , et al. December 9, 2 | 2014-12-09 |
| Plasma Processor And Plasma Processing Method App 20130174983 - KIKUCHI; Akihiro ; et al. | 2013-07-11 |
| Plasma processor and plasma processing method Grant 8,387,562 - Kikuchi , et al. March 5, 2 | 2013-03-05 |
| Surface processing method for mounting stage Grant 8,343,372 - Aoto , et al. January 1, 2 | 2013-01-01 |
| Plasma processing method and plasma processing apparatus Grant 8,287,750 - Shindo , et al. October 16, 2 | 2012-10-16 |
| Plasma Processor And Plasma Processing Method App 20120006492 - KIKUCHI; Akihiro ; et al. | 2012-01-12 |
| Plasma procesor and plasma processing method Grant 8,056,503 - Kikuchi , et al. November 15, 2 | 2011-11-15 |
| Plasma Processing Apparatus And Semiconductor Device Manufacturing Method App 20110240221 - Yamamoto; Takashi ; et al. | 2011-10-06 |
| Plasma processing method and plasma processing apparatus Grant 7,799,238 - Shindo , et al. September 21, 2 | 2010-09-21 |
| Plasma processing method Grant 7,713,431 - Ukei , et al. May 11, 2 | 2010-05-11 |
| Plasma Processing Method And Plasma Processing Apparatus App 20100112819 - SHINDO; Toshihiko ; et al. | 2010-05-06 |
| Plasma Processing Method And Plasma Processing Apparatus App 20090212017 - SHINDO; Toshihiko ; et al. | 2009-08-27 |
| Plasma processing method and plasma processing apparatus Grant 7,541,283 - Shindo , et al. June 2, 2 | 2009-06-02 |
| Method and apparatus for bilayer photoresist dry development Grant 7,465,673 - Igarashi , et al. December 16, 2 | 2008-12-16 |
| Surface Processing Method For Mounting Stage App 20080237030 - Aoto; Tadashi ; et al. | 2008-10-02 |
| Plasma processing apparatus and plasma processing method Grant 7,335,278 - Koshimizu , et al. February 26, 2 | 2008-02-26 |
| Capacitive coupling plasma processing apparatus App 20060081337 - Himori; Shinji ; et al. | 2006-04-20 |
| Plasma processing apparatus and method App 20050274321 - Ukei, Tomoaki ; et al. | 2005-12-15 |
| Plasma processing apparatus and plasma processing method App 20050172904 - Koshimizu, Chishio ; et al. | 2005-08-11 |
| Plasma processing method and plasma processing apparatus App 20050142873 - Shindo, Toshihiko ; et al. | 2005-06-30 |
| Method and apparatus for bilayer photoresist dry development App 20040185380 - Igarashi, Yoshiki ; et al. | 2004-09-23 |
| Plasma procesor and plasma processing method App 20040177927 - Kikuchi, Akihiro ; et al. | 2004-09-16 |
| Method and apparatus for plasma processing Grant 6,676,804 - Koshimizu , et al. January 13, 2 | 2004-01-13 |
| Method and devices for detecting the end point of plasma process Grant 5,980,767 - Koshimizu , et al. November 9, 1 | 1999-11-09 |
| Plasma processing method, plasma processing apparatus, and plasma generating apparatus Grant 5,783,492 - Higuchi , et al. July 21, 1 | 1998-07-21 |
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