Higuchi; Ayumi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Higuchi; Ayumi.The latest application filed is for "substrate processing method and substrate processing apparatus".

Company Profile

15.25.29

Higuchi; Ayumi - Kyoto JP
HIGUCHI; Ayumi - Kyoto-shi Kyoto

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate cleaning apparatus and substrate cleaning method Grant 11,413,662 - Yoshida , et al. August 16, 2	2022-08-16
Substrate processing method and substrate processing device Grant 11,410,853 - Higuchi , et al. August 9, 2	2022-08-09
Substrate Processing Method And Substrate Processing Apparatus App 20220189773 - HIGUCHI; Ayumi ; et al.	2022-06-16
Substrate processing apparatus and substrate processing method Grant 11,260,436 - Osada , et al. March 1, 2	2022-03-01
Substrate processing device Grant 11,217,461 - Higuchi January 4, 2	2022-01-04
Substrate processing method and substrate processing apparatus Grant 11,145,516 - Higuchi , et al. October 12, 2	2021-10-12
Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method Grant 11,094,564 - Iwahata , et al. August 17, 2	2021-08-17
Substrate treatment method Grant 11,018,017 - Higuchi , et al. May 25, 2	2021-05-25
Substrate cleaning method, method for creating substrate cleaning recipe, and device for creating substrate cleaning recipe Grant 10,840,083 - Higuchi , et al. November 17, 2	2020-11-17
Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate Grant 10,816,141 - Higuchi , et al. October 27, 2	2020-10-27
Substrate Processing Method And Substrate Processing Device App 20200303207 - HIGUCHI; Ayumi ; et al.	2020-09-24
Substrate Processing Apparatus And Substrate Processing Method App 20200290101 - OSADA; Naoyuki ; et al.	2020-09-17
Substrate processing apparatus and substrate processing method Grant 10,717,117 - Osada , et al.	2020-07-21
Waste liquid treatment method and waste liquid treatment apparatus Grant 10,710,913 - Higuchi	2020-07-14
Substrate Processing Method And Substrate Processing Apparatus App 20200168467 - HIGUCHI; Ayumi ; et al.	2020-05-28
Substrate processing apparatus and substrate processing method Grant 10,651,029 - Takahashi , et al.	2020-05-12
Substrate processing apparatus and substrate processing method Grant 10,622,204 - Higuchi , et al.	2020-04-14
Substrate Cleaning Apparatus And Substrate Cleaning Method App 20200086360 - YOSHIDA; Yukifumi ; et al.	2020-03-19
Substrate Processing Device App 20190198356 - HIGUCHI; Ayumi	2019-06-27
Substrate Treatment Method App 20190189461 - HIGUCHI; Ayumi ; et al.	2019-06-20
Substrate Cleaning Method, Method For Creating Substrate Cleaning Recipe, And Device For Creating Substrate Cleaning Recipe App 20190176196 - HIGUCHI; Ayumi ; et al.	2019-06-13
Substrate processing method, and substrate processing device Grant 10,312,114 - Yoshizumi , et al.	2019-06-04
Processing Liquid Supplying Apparatus, Substrate Processing Apparatus And Processing Liquid Supplying Method App 20190131144 - IWAHATA; Shota ; et al.	2019-05-02
Chemical Solution Feeder, Substrate Treatment Apparatus, Method For Feeding Chemical Solution, And Method For Treating Substrate App 20190056066 - HIGUCHI; Ayumi ; et al.	2019-02-21
Substrate Processing Apparatus And Substrate Processing Method App 20180236510 - OSADA; Naoyuki ; et al.	2018-08-23
Treatment cup cleaning method, substrate treatment method, and substrate treatment apparatus Grant 9,984,903 - Higuchi , et al. May 29, 2	2018-05-29
Waste Liquid Treatment Method And Waste Liquid Treatment Apparatus App 20180079668 - HIGUCHI; Ayumi	2018-03-22
Treatment Cup Cleaning Method, Substrate Treatment Method, And Substrate Treatment Apparatus App 20170278724 - HIGUCHI; Ayumi ; et al.	2017-09-28
Substrate processing method and substrate processing apparatus Grant 9,768,042 - Wakita , et al. September 19, 2	2017-09-19
Substrate Processing Apparatus And Substrate Processing Method App 20170236703 - HIGUCHI; Ayumi ; et al.	2017-08-17
Substrate Processing Apparatus And Substrate Processing Method App 20170186599 - TAKAHASHI; Hiroaki ; et al.	2017-06-29
Substrate Processing System And Pipe Cleaning Method App 20170014873 - HIGUCHI; Ayumi ; et al.	2017-01-19
Substrate treatment method and substrate treatment apparatus Grant 9,548,197 - Yoshizumi , et al. January 17, 2	2017-01-17
Substrate processing apparatus and substrate processing method for performing cleaning treatment on substrate Grant 9,508,568 - Yoshizumi , et al. November 29, 2	2016-11-29
Substrate Processing Apparatus And Substrate Processing Method App 20160293447 - IWASAKI; Akihisa ; et al.	2016-10-06
Substrate Processing Method, And Substrate Processing Device App 20160247698 - YOSHIZUMI; Asuka ; et al.	2016-08-25
Substrate treatment method Grant 9,230,836 - Higuchi , et al. January 5, 2	2016-01-05
Substrate Processing Method And Substrate Processing Apparatus App 20150340251 - WAKITA; Asuka ; et al.	2015-11-26
Treatment Cup Cleaning Method, Substrate Treatment Method, And Substrate Treatment Apparatus App 20150090301 - HIGUCHI; Ayumi ; et al.	2015-04-02
Substrate Treatment Method And Substrate Treatment Apparatus App 20150083167 - YOSHIZUMI; Asuka ; et al.	2015-03-26
Nozzle, And Substrate Processing Apparatus App 20150053244 - SATO; Masanobu ; et al.	2015-02-26
Substrate Processing Apparatus And Substrate Processing Method For Performing Cleaning Treatment On Substrate App 20150040951 - YOSHIZUMI; Asuka ; et al.	2015-02-12
Nozzle, substrate processing apparatus, and substrate processing method Grant 8,888,925 - Sato , et al. November 18, 2	2014-11-18
Substrate Treatment Apparatus And Substrate Treatment Method App 20120240958 - HIGUCHI; Ayumi ; et al.	2012-09-27
Nozzle, Substrate Processing Apparatus, And Substrate Processing Method App 20120222707 - SATO; Masanobu ; et al.	2012-09-06
Substrate processing apparatus and method of removing particles Grant 7,981,286 - Higuchi , et al. July 19, 2	2011-07-19
Substrate processing apparatus and substrate processing method Grant 7,841,788 - Higuchi , et al. November 30, 2	2010-11-30
Substrate processing apparatus and method Grant 7,392,814 - Hasegawa , et al. July 1, 2	2008-07-01
Substrate processing apparatus and method App 20070235064 - Hasegawa; Koji ; et al.	2007-10-11
Substrate Processing Apparatus And Substrate Processing Method App 20070223916 - HIGUCHI; Ayumi ; et al.	2007-09-27
Substrate processing apparatus and method App 20060137719 - Hasegawa; Koji ; et al.	2006-06-29
Substrate processing apparatus and method of removing particles App 20060054191 - Higuchi; Ayumi ; et al.	2006-03-16

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