Higomura; Makoto
Patent Applications and Registrations
Patent applications and USPTO patent grants for Higomura; Makoto.The latest application filed is for "alignment apparatus and sor x-ray exposure apparatus having same".
- Higomura; Makoto - Yokohama JP
- Higomura; Makoto - Yokohami JP
| Patent | Date |
|---|---|
| Alignment apparatus and SOR X-ray exposure apparatus having same Grant 5,822,389 - Uzawa , et al. October 13, 1 | 1998-10-13 |
| Stage positioning control method and apparatus Grant 5,114,234 - Otsuka , et al. May 19, 1 | 1992-05-19 |
| Movable stage mechanism Grant 4,993,696 - Furukawa , et al. February 19, 1 | 1991-02-19 |
| Control system for a servomotor Grant 4,810,941 - Ohishi , et al. March 7, 1 | 1989-03-07 |
| Moving mechanism Grant 4,744,675 - Sakino , et al. May 17, 1 | 1988-05-17 |
| Actuator of shape memory effect material Grant 4,716,731 - Sakai , et al. January 5, 1 | 1988-01-05 |
| Control system for positioning an object using switching from a speed control mode to a position control mode with adjustable brain Grant 4,710,865 - Higomura December 1, 1 | 1987-12-01 |
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