loadpatents
Patent applications and USPTO patent grants for Higashijima; Jiro.The latest application filed is for "substrate processing apparatus and substrate processing method".
Patent | Date |
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Substrate processing apparatus and substrate processing method Grant 11,430,673 - Hashimoto , et al. August 30, 2 | 2022-08-30 |
Substrate processing apparatus and substrate processing method Grant 11,158,525 - Takaki , et al. October 26, 2 | 2021-10-26 |
Substrate Processing Apparatus And Substrate Processing Method App 20210327728 - HASHIMOTO; Yusuke ;   et al. | 2021-10-21 |
Substrate processing apparatus Grant 11,056,335 - Higashijima , et al. July 6, 2 | 2021-07-06 |
Substrate processing apparatus, substrate processing method and recording medium Grant 11,024,518 - Ito , et al. June 1, 2 | 2021-06-01 |
Substrate Processing Apparatus And Manufacturing Method Therefor App 20210043467 - Hashimoto; Yusuke ;   et al. | 2021-02-11 |
Substrate Processing Apparatus And Substrate Processing Method App 20200357667 - IINO; Tadashi ;   et al. | 2020-11-12 |
Substrate Processing Apparatus App 20200152443 - Higashijima; Jiro ;   et al. | 2020-05-14 |
Substrate processing apparatus, method of cleaning substrate processing apparatus, and storage medium Grant 10,486,208 - Ogata , et al. Nov | 2019-11-26 |
Substrate processing apparatus and method of cleaning substrate processing apparatus Grant 10,475,671 - Higashijima , et al. Nov | 2019-11-12 |
Liquid processing apparatus Grant 10,297,473 - Wakiyama , et al. | 2019-05-21 |
Substrate processing system Grant 10,276,425 - Wakiyama , et al. | 2019-04-30 |
Substrate Processing Apparatus And Substrate Processing Method App 20190067048 - Takaki; Yasuhiro ;   et al. | 2019-02-28 |
Substrate Processing Apparatus, Substrate Processing Method And Recording Medium App 20180221925 - Ito; Norihiro ;   et al. | 2018-08-09 |
Substrate liquid processing apparatus Grant 9,953,848 - Wakiyama , et al. April 24, 2 | 2018-04-24 |
Liquid processing aparatus Grant 9,953,852 - Higashijima , et al. April 24, 2 | 2018-04-24 |
Substrate processing apparatus Grant 9,933,702 - Higashijima , et al. April 3, 2 | 2018-04-03 |
Substrate Processing Apparatus And Processing Liquid Supply Method App 20180090306 - Higashijima; Jiro ;   et al. | 2018-03-29 |
Substrate Processing Apparatus, Method Of Cleaning Substrate Processing Apparatus, And Storage Medium App 20170361364 - Ogata; Nobuhiro ;   et al. | 2017-12-21 |
Liquid Processing Apparatus App 20170345689 - Wakiyama; Terufumi ;   et al. | 2017-11-30 |
Substrate processing apparatus and substrate processing method Grant 9,818,626 - Higashijima , et al. November 14, 2 | 2017-11-14 |
Substrate processing apparatus and substrate processing method Grant 9,793,142 - Higashijima , et al. October 17, 2 | 2017-10-17 |
Liquid processing apparatus Grant 9,773,687 - Wakiyama , et al. September 26, 2 | 2017-09-26 |
Substrate Processing Apparatus And Method Of Cleaning Substrate Processing Apparatus App 20170200624 - Higashijima; Jiro ;   et al. | 2017-07-13 |
Substrate Processing Apparatus App 20170059996 - Higashijima; Jiro ;   et al. | 2017-03-02 |
Substrate liquid processing apparatus Grant 9,508,569 - Inoue , et al. November 29, 2 | 2016-11-29 |
Liquid treatment apparatus and method Grant 9,396,975 - Higashijima , et al. July 19, 2 | 2016-07-19 |
Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup Grant 9,355,871 - Higashijima , et al. May 31, 2 | 2016-05-31 |
Substrate Processing System App 20160148827 - Wakiyama; Terufumi ;   et al. | 2016-05-26 |
Substrate Liquid Processing Apparatus App 20160118275 - Inoue; Shigehisa ;   et al. | 2016-04-28 |
Liquid arm cleaning unit for substrate processing apparatus Grant 9,190,311 - Higashijima , et al. November 17, 2 | 2015-11-17 |
Liquid processing apparatus and liquid processing method Grant 9,159,594 - Higashijima October 13, 2 | 2015-10-13 |
Substrate Liquid Processing Apparatus App 20150187613 - Wakiyama; Terufumi ;   et al. | 2015-07-02 |
Substrate liquid treatment apparatus with lift pin plate Grant 9,048,269 - Higashijima , et al. June 2, 2 | 2015-06-02 |
Substrate liquid cleaning apparatus with controlled liquid port ejection angle Grant 9,022,045 - Higashijima , et al. May 5, 2 | 2015-05-05 |
Liquid Processing Apparatus App 20150114561 - HIGASHIJIMA; Jiro ;   et al. | 2015-04-30 |
Liquid Processing Apparatus App 20150090305 - Wakiyama; Terufumi ;   et al. | 2015-04-02 |
Liquid processing apparatus and liquid processing method Grant 8,944,081 - Higashijima February 3, 2 | 2015-02-03 |
Liquid processing apparatus and liquid processing method Grant 8,905,051 - Higashijima December 9, 2 | 2014-12-09 |
Liquid processing apparatus, liquid processing method and storage medium Grant 8,887,741 - Higashijima , et al. November 18, 2 | 2014-11-18 |
Substrate Processing Apparatus And Substrate Processing Method App 20140251539 - Mizuno; Tsuyoshi ;   et al. | 2014-09-11 |
Liquid processing apparatus Grant 8,741,099 - Higashijima June 3, 2 | 2014-06-03 |
Substrate Processing Apparatus And Substrate Processing Method App 20140116480 - Higashijima; Jiro ;   et al. | 2014-05-01 |
Substrate Processing Apparatus And Substrate Processing Method App 20140116478 - Higashijima; Jiro ;   et al. | 2014-05-01 |
Liquid processing apparatus and liquid processing method Grant 8,696,863 - Higashijima , et al. April 15, 2 | 2014-04-15 |
Liquid treatment apparatus and method Grant 8,607,807 - Higashijima , et al. December 17, 2 | 2013-12-17 |
Liquid processing apparatus Grant 8,590,547 - Higashijima , et al. November 26, 2 | 2013-11-26 |
Liquid processing apparatus Grant 8,567,339 - Higashijima , et al. October 29, 2 | 2013-10-29 |
Porous member Grant 8,409,482 - Higashijima , et al. April 2, 2 | 2013-04-02 |
Chemical-liquid processing apparatus and chemical-liquid processing method Grant 8,398,817 - Namba , et al. March 19, 2 | 2013-03-19 |
Liquid Processing Apparatus And Liquid Processing Method App 20120318301 - HIGASHIJIMA; Jiro | 2012-12-20 |
Functional member having surface cleanliness Grant 8,313,536 - Higashijima , et al. November 20, 2 | 2012-11-20 |
Method of processing workpieces using a vessel with a low pressure space surrounding a processing space for the purpose of preventing the leakage of atmosphere into the processing space Grant 8,298,344 - Higashijima October 30, 2 | 2012-10-30 |
Liquid processing apparatus, liquid processing method, and storage medium Grant 8,268,087 - Kamikawa , et al. September 18, 2 | 2012-09-18 |
Substrate processing apparatus, substrate processing method, and program storage medium Grant 8,246,759 - Itoh , et al. August 21, 2 | 2012-08-21 |
Liquid Processing Apparatus and Liquid Processing Method App 20120192899 - HIGASHIJIMA; Jiro | 2012-08-02 |
Liquid Treatment Apparatus And Method App 20120186744 - HIGASHIJIMA; Jiro ;   et al. | 2012-07-26 |
Liquid Treatment Apparatus And Method App 20120186607 - HIGASHIJIMA; Jiro ;   et al. | 2012-07-26 |
Liquid Processing Apparatus and Liquid Processing Method App 20120180822 - HIGASHIJIMA; Jiro | 2012-07-19 |
Liquid Processing Apparatus App 20120180829 - HIGASHIJIMA; Jiro | 2012-07-19 |
Liquid Processing Apparatus and Liquid Processing Method App 20120180828 - HIGASHIJIMA; Jiro ;   et al. | 2012-07-19 |
Liquid Treatment Apparatus And Method App 20120160278 - HIGASHIJIMA; Jiro ;   et al. | 2012-06-28 |
Liquid Treatment Apparatus And Method App 20120160275 - HIGASHIJIMA; Jiro ;   et al. | 2012-06-28 |
Liquid Processing Apparatus and Liquid Processing Method App 20120160277 - HIGASHIJIMA; Jiro | 2012-06-28 |
Liquid Processing Apparatus App 20120085493 - Higashijima; Jiro | 2012-04-12 |
Liquid Processing Apparatus, Liquid Processing Method and Storage Medium App 20120064256 - Higashijima; Jiro ;   et al. | 2012-03-15 |
Processing apparatus and processing method Grant 8,002,894 - Higashijima , et al. August 23, 2 | 2011-08-23 |
Porous Member App 20110011793 - Higashijima; Jiro ;   et al. | 2011-01-20 |
Liquid Processing Apparatus App 20100319615 - HIGASHIJIMA; Jiro ;   et al. | 2010-12-23 |
Liquid Processing Apparatus And Liquid Processing Method App 20100200547 - HIGASHIJIMA; Jiro ;   et al. | 2010-08-12 |
Functional Member Having Surface Cleanliness App 20100204393 - Higashijima; Jiro ;   et al. | 2010-08-12 |
Chemical-liquid Processing Apparatus And Chemical-liquid Processing Method App 20100181290 - NAMBA; Hiromitsu ;   et al. | 2010-07-22 |
Liquid Processing Apparatus, Liquid Processing Method, And Storage Medium App 20100083986 - Kamikawa; Yuji ;   et al. | 2010-04-08 |
Liquid Processing Apparatus App 20100018557 - Higashijima; Jiro ;   et al. | 2010-01-28 |
Substrate Processing Apparatus, Substrate Processing Method, And Program Storage Medium App 20090297705 - ITOH; Norihiro ;   et al. | 2009-12-03 |
Processing System, Processing Method And Recording Medium App 20090260656 - Higashijima; Jiro | 2009-10-22 |
Processing apparatus and processing method App 20070292611 - Higashijima; Jiro ;   et al. | 2007-12-20 |
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