Higashi; Robert E.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Higashi; Robert E..The latest application filed is for "through silicon via fabrication".
Company Profile
2.53.32
- Higashi; Robert E. - Shorewood MN
- Higashi; Robert E. - Bloomington MN
- Higashi; Robert E. - Minneapolis MN
- Higashi; Robert E. - Hennepin MN
Patent Activity
| Patent | Date |
|---|---|
| Through silicon via fabrication Grant 10,867,855 - Higashi , et al. December 15, 2 | 2020-12-15 |
| Through Silicon Via Fabrication App 20200365459 - Higashi; Robert E. ; et al. | 2020-11-19 |
| Robust sensing film for fire gases Grant 10,497,486 - Higashi , et al. De | 2019-12-03 |
| Robust Sensing Film For Fire Gases App 20180164239 - Higashi; Robert E. ; et al. | 2018-06-14 |
| Sensor temperature sensing device Grant 9,574,947 - Cole , et al. February 21, 2 | 2017-02-21 |
| Sensor Temperature Sensing Device App 20140161153 - Cole; Barrett E. ; et al. | 2014-06-12 |
| Integration of MEMS and CMOS devices on a chip Grant 8,299,506 - Peczalski , et al. October 30, 2 | 2012-10-30 |
| Integral topside vacuum package Grant 8,188,561 - Higashi , et al. May 29, 2 | 2012-05-29 |
| Micro fuel cell Grant 8,153,285 - Higashi , et al. April 10, 2 | 2012-04-10 |
| MOS low power sensor with sacrificial membrane Grant 8,076,245 - Cole , et al. December 13, 2 | 2011-12-13 |
| Passive Infrared Imager App 20110279680 - Cole; Barrett E. ; et al. | 2011-11-17 |
| Integral Topside Vacuum Package App 20110070401 - Higashi; Robert E. ; et al. | 2011-03-24 |
| Integral topside vacuum package Grant 7,875,944 - Higashi , et al. January 25, 2 | 2011-01-25 |
| Integration Of Mems And Cmos Devices On A Chip App 20100140670 - Peczalski; Andy ; et al. | 2010-06-10 |
| Conformal film micro-channels for a fluidic micro analyzer Grant 7,703,313 - Higashi April 27, 2 | 2010-04-27 |
| Gas sensor Grant 7,628,907 - Gu , et al. December 8, 2 | 2009-12-08 |
| Mos Low Power Sensor With Sacrifical Membrane App 20090283759 - Cole; Barrett E. ; et al. | 2009-11-19 |
| Microelectromechanical Lamellar Grating App 20090279172 - Higashi; Robert E. | 2009-11-12 |
| Thermal vacuum gauge Grant 7,613,586 - Higashi November 3, 2 | 2009-11-03 |
| Shell flow sensor Grant 7,549,206 - Higashi , et al. June 23, 2 | 2009-06-23 |
| Micromechanical thermal sensor Grant 7,501,626 - Wood , et al. March 10, 2 | 2009-03-10 |
| Shell flow sensor App 20090044620 - Higashi; Robert E. ; et al. | 2009-02-19 |
| Multi-substrate package assembly Grant 7,470,894 - Cole , et al. December 30, 2 | 2008-12-30 |
| Ultra violet light sensor Grant 7,468,515 - Cole , et al. December 23, 2 | 2008-12-23 |
| Shelled Thermal Structures For Fluid Sensing App 20080190171 - Higashi; Robert E. | 2008-08-14 |
| Method of thermally coupling a flow tube or like component to a thermal sensor and sensor systems formed thereby Grant 7,408,133 - Higashi , et al. August 5, 2 | 2008-08-05 |
| Thermal Vacuum Gauge App 20080168842 - Higashi; Robert E. | 2008-07-17 |
| Planar ultra violet light detector Grant 7,391,147 - Cole , et al. June 24, 2 | 2008-06-24 |
| Spectrally tunable detector Grant 7,329,853 - Cole , et al. February 12, 2 | 2008-02-12 |
| Integral Topside Vacuum Package App 20080017944 - Higashi; Robert E. ; et al. | 2008-01-24 |
| Micromechanical thermal sensor App 20070278407 - Wood; Roland A. ; et al. | 2007-12-06 |
| Nanotube fabrication basis Grant 7,276,285 - Cole , et al. October 2, 2 | 2007-10-02 |
| Integral topside vacuum package Grant 7,276,798 - Higashi , et al. October 2, 2 | 2007-10-02 |
| Ultra Violet Light Sensor App 20070131869 - Cole; Barrett E. ; et al. | 2007-06-14 |
| Nanotube sensor Grant 7,230,432 - Cole , et al. June 12, 2 | 2007-06-12 |
| Method of thermally coupling a flow tube or like component to a thermal sensor and sensor systems formed thereby App 20070044554 - Higashi; Robert E. ; et al. | 2007-03-01 |
| Gas Sensor App 20070045129 - Gu; Yuandong ; et al. | 2007-03-01 |
| Electric Field Assisted Solder Bonding App 20070034676 - Zhang; Chunbo ; et al. | 2007-02-15 |
| Planar thermal array Grant 7,170,059 - Wood , et al. January 30, 2 | 2007-01-30 |
| Tunable sensor Grant 7,145,143 - Wood , et al. December 5, 2 | 2006-12-05 |
| Multi-substrate Package Assembly App 20060261252 - Cole; Barrett E. ; et al. | 2006-11-23 |
| Multi-substrate package assembly Grant 7,071,566 - Cole , et al. July 4, 2 | 2006-07-04 |
| Method for making a wafer-pair having sealed chambers Grant RE39,143 - Wood , et al. June 27, 2 | 2006-06-27 |
| Multiple scene projection system Grant 7,048,384 - Cole , et al. May 23, 2 | 2006-05-23 |
| Spectrally tunable detector Grant 7,015,457 - Cole , et al. March 21, 2 | 2006-03-21 |
| Spectrally tunable detector App 20060054795 - Cole; Barrett E. ; et al. | 2006-03-16 |
| Nanotube sensor App 20050255032 - Cole, Barrett E. ; et al. | 2005-11-17 |
| Nanotube sensor Grant 6,949,931 - Cole , et al. September 27, 2 | 2005-09-27 |
| Nanotube fabrication basis App 20050145601 - Cole, Barrett E. ; et al. | 2005-07-07 |
| Micro fuel cell App 20050142410 - Higashi, Robert E. ; et al. | 2005-06-30 |
| Planar ultra violet light detector App 20050127835 - Cole, Barrett E. ; et al. | 2005-06-16 |
| Planar thermal array App 20050072924 - Wood, Roland A. ; et al. | 2005-04-07 |
| Phased VII micro fluid analyzer having a modular structure App 20050063865 - Bonne, Ulrich ; et al. | 2005-03-24 |
| Infrared scene projector App 20040227906 - Cole, Barrett E. ; et al. | 2004-11-18 |
| Tunable sensor App 20040217264 - Wood, Roland A. ; et al. | 2004-11-04 |
| Integral topside vacuum package App 20040140570 - Higashi, Robert E. ; et al. | 2004-07-22 |
| Nanotube sensor App 20040100269 - Cole, Barrett E. ; et al. | 2004-05-27 |
| Gas sensor App 20040084308 - Cole, Barrett E. ; et al. | 2004-05-06 |
| Multi-substrate package assembly App 20030173499 - Cole, Barrett E. ; et al. | 2003-09-18 |
| Spectrally tunable detector App 20030173504 - Cole, Barrett E. ; et al. | 2003-09-18 |
| Wafer-pair having deposited layer sealed chambers Grant 6,359,333 - Wood , et al. March 19, 2 | 2002-03-19 |
| Microsensor housing Grant 6,322,247 - Bonne , et al. November 27, 2 | 2001-11-27 |
| Dual wafer attachment process Grant 6,287,940 - Cole , et al. September 11, 2 | 2001-09-11 |
| Differential thermal analysis sensor Grant 6,238,085 - Higashi , et al. May 29, 2 | 2001-05-29 |
| Method for making a wafer-pair having sealed chambers Grant 6,036,872 - Wood , et al. March 14, 2 | 2000-03-14 |
| Integrated silicon vacuum micropackage for infrared devices Grant 5,895,233 - Higashi , et al. April 20, 1 | 1999-04-20 |
| Micromachined integrated opto-flow gas/liquid sensor Grant 5,869,749 - Bonne , et al. February 9, 1 | 1999-02-09 |
| Infrared radiation imaging array with compound sensors forming each pixel Grant 5,449,910 - Wood , et al. September 12, 1 | 1995-09-12 |
| Thermal sensor Grant 5,300,915 - Higashi , et al. April 5, 1 | 1994-04-05 |
| Integrated micromechanical sensor element Grant 5,220,188 - Higashi , et al. * June 15, 1 | 1993-06-15 |
| Micromechanical thermoelectric sensor element Grant 5,220,189 - Higashi , et al. June 15, 1 | 1993-06-15 |
| Cantilever semiconductor device Grant 4,966,037 - Sumner , et al. * October 30, 1 | 1990-10-30 |
| Thin film orthogonal microsensor for air flow and method Grant 4,914,742 - Higashi , et al. April 3, 1 | 1990-04-03 |
| Method for making thin film orthogonal microsensor for air flow Grant 4,895,616 - Higashi , et al. January 23, 1 | 1990-01-23 |
| Flowmeter fluid composition correction Grant 4,885,938 - Higashi December 12, 1 | 1989-12-12 |
| Resistance with linear temperature coefficient Grant 4,739,657 - Higashi , et al. April 26, 1 | 1988-04-26 |
| Semiconductor device microstructure Grant 4,696,188 - Higashi September 29, 1 | 1987-09-29 |
| Microscopic size, thermal conductivity type, air or gas absolute pressure sensor Grant 4,682,503 - Higashi , et al. July 28, 1 | 1987-07-28 |
| Semiconductor device structure and processing Grant 4,683,159 - Bohrer , et al. July 28, 1 | 1987-07-28 |
| Semiconductor device Grant 4,651,564 - Johnson , et al. March 24, 1 | 1987-03-24 |
| Semiconductor device Grant 4,624,137 - Johnson , et al. November 25, 1 | 1986-11-25 |
| Condition responsive sensor for fluid flow measurement Grant 4,555,939 - Bohrer , et al. December 3, 1 | 1985-12-03 |
| Integral flow sensor and channel assembly Grant 4,548,078 - Bohrer , et al. October 22, 1 | 1985-10-22 |
| Flow sensor Grant 4,501,144 - Higashi , et al. February 26, 1 | 1985-02-26 |
| Method of making semiconductor device Grant 4,472,239 - Johnson , et al. September 18, 1 | 1984-09-18 |
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