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name:-0.012856006622314
name:-0.0060758590698242
name:-0.0013439655303955
Higashi; Makio Patent Filings

Higashi; Makio

Patent Applications and Registrations

Patent applications and USPTO patent grants for Higashi; Makio.The latest application filed is for "substrate processing apparatus, substrate processing method, and computer program".

Company Profile
0.6.8
  • Higashi; Makio - Koshi JP
  • Higashi; Makio - Kikuchi-gun JP
  • Higashi; Makio - Kumamoto JP
  • Higashi; Makio - Tokyo JP
  • Higashi; Makio - Koshi-shi JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Substrate collection method and substrate treatment apparatus
Grant 7,840,299 - Higashi , et al. November 23, 2
2010-11-23
Substrate processing apparatus, substrate processing method, and computer program
App 20090149982 - Higashi; Makio ;   et al.
2009-06-11
Substrate processing apparatus and substrate processing method
Grant 7,383,093 - Higashi , et al. June 3, 2
2008-06-03
Substrate processing system, coating/developing apparatus, and substrate processing apparatus
Grant 7,379,785 - Higashi , et al. May 27, 2
2008-05-27
Substrate Collection Method and Substrate Treatment Apparatus
App 20080020315 - Higashi; Makio ;   et al.
2008-01-24
Coating and developing apparatus
Grant 7,210,864 - Higashi , et al. May 1, 2
2007-05-01
Substrate processing apparatus and substrate processing method
Grant 7,191,033 - Higashi , et al. March 13, 2
2007-03-13
Substrate processing apparatus and substrate processing method
App 20070016320 - Higashi; Makio ;   et al.
2007-01-18
Substrate processing apparatus, substrate processing method, and computer program
App 20060011296 - Higashi; Makio ;   et al.
2006-01-19
Substrate processing apparatus and substrate transferring method
Grant 6,981,808 - Miyata , et al. January 3, 2
2006-01-03
Wafer processing system, coating/developing apparatus, and wafer, processing apparatus
App 20050287821 - Higashi, Makio ;   et al.
2005-12-29
Coating and developing apparatus
App 20050217581 - Higashi, Makio ;   et al.
2005-10-06
Substrate processing apparatus and substrate processing method
App 20050197729 - Higashi, Makio ;   et al.
2005-09-08
Substrate processing apparatus and substrate transferring method
App 20030147643 - Miyata, Akira ;   et al.
2003-08-07

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