loadpatents
Patent applications and USPTO patent grants for HIDAKA; Atsushi.The latest application filed is for "diaphragm valve".
Patent | Date |
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Diaphragm Valve App 20220268365 - HIRATA; Kaoru ;   et al. | 2022-08-25 |
Liquid level meter, vaporizer equipped with the same, and liquid level detection method Grant 11,402,250 - Hidaka , et al. August 2, 2 | 2022-08-02 |
Fluid control device Grant 11,390,951 - Hidaka , et al. July 19, 2 | 2022-07-19 |
Pressure Sensor App 20210356346 - HIDAKA; Atsushi ;   et al. | 2021-11-18 |
Fluid Control Device App 20200199753 - HIDAKA; Atsushi ;   et al. | 2020-06-25 |
Fluid Control Device App 20200149162 - HIDAKA; Atsushi ;   et al. | 2020-05-14 |
Vaporization supply apparatus Grant 10,646,844 - Hidaka , et al. | 2020-05-12 |
Liquid level indicator and liquid raw material vaporization feeder Grant 10,604,840 - Hidaka , et al. | 2020-03-31 |
Liquid Level Meter, Vaporizer Equipped With The Same, And Liquid Level Detection Method App 20200088561 - HIDAKA; Atsushi ;   et al. | 2020-03-19 |
Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container Grant 10,274,356 - Hirata , et al. | 2019-04-30 |
Flow meter and flow control device provided therewith Grant 10,073,469 - Nagase , et al. September 11, 2 | 2018-09-11 |
Raw material vaporization and supply apparatus Grant 9,994,955 - Hidaka , et al. June 12, 2 | 2018-06-12 |
Vaporization Supply Apparatus App 20180071702 - HIDAKA; Atsushi ;   et al. | 2018-03-15 |
Flow Control System With Build-down System Flow Monitoring App 20170364099 - Nagase; Masaaki ;   et al. | 2017-12-21 |
Liquid Level Indicator And Liquid Raw Material Vaporization Feeder App 20170327949 - Hidaka; Atsushi ;   et al. | 2017-11-16 |
Flow control device equipped with flow monitor Grant 9,791,867 - Nagase , et al. October 17, 2 | 2017-10-17 |
Liquid Level Detection Circuit, Liquid Level Meter, Container Provided With Liquid Level Meter, And Vaporizer Using Container App 20170268919 - HIRATA; Kaoru ;   et al. | 2017-09-21 |
Multi-hole orifice plate for flow control, and flow controller using the same Grant 9,746,856 - Hirata , et al. August 29, 2 | 2017-08-29 |
Flow control system with build-down system flow monitoring Grant 9,733,649 - Nagase , et al. August 15, 2 | 2017-08-15 |
Pressure type flow rate control device Grant 9,574,917 - Hidaka , et al. February 21, 2 | 2017-02-21 |
Raw material gas supply apparatus for semiconductor manufacturing equipment Grant 9,556,518 - Nagase , et al. January 31, 2 | 2017-01-31 |
Flow Control Device Equipped With Flow Monitor App 20160282880 - NAGASE; Masaaki ;   et al. | 2016-09-29 |
Flow Meter And Flow Control Device Provided Therewith App 20160239026 - NAGASE; Masaaki ;   et al. | 2016-08-18 |
Multi-hole Orifice Plate For Flow Control, And Flow Controller Using The Same App 20160070271 - HIRATA; Kaoru ;   et al. | 2016-03-10 |
Raw Material Vaporization And Supply Apparatus App 20150322567 - Hidaka; Atsushi ;   et al. | 2015-11-12 |
Piezoelectrically driven valve and piezoelectrically driven flow rate control device Grant 9,163,743 - Hidaka , et al. October 20, 2 | 2015-10-20 |
Flow Control System With Build-down System Flow Monitoring App 20150136248 - Nagase; Masaaki ;   et al. | 2015-05-21 |
Gas supply apparatus equipped with vaporizer Grant 8,931,506 - Nagata , et al. January 13, 2 | 2015-01-13 |
Raw Material Vaporizing And Supplying Apparatus App 20140216339 - Nagase; Masaaki ;   et al. | 2014-08-07 |
Raw Material Gas Supply Apparatus For Semiconductor Manufacturing Equipment App 20140190581 - Nagase; Masaaki ;   et al. | 2014-07-10 |
Vaporizer Grant 8,724,974 - Ohmi , et al. May 13, 2 | 2014-05-13 |
Raw Material Vaporizing And Supplying Apparatus App 20140124064 - Hidaka; Atsushi ;   et al. | 2014-05-08 |
Vaporizer App 20130084059 - Ohmi; Tadahiro ;   et al. | 2013-04-04 |
Pressure Type Flow Rate Control Device App 20120298220 - HIDAKA; Atsushi ;   et al. | 2012-11-29 |
Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Rate Control Device App 20120273061 - Hidaka; Atsushi ;   et al. | 2012-11-01 |
Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith Grant 8,047,510 - Hirata , et al. November 1, 2 | 2011-11-01 |
Gas Supply Apparatus Equipped With Vaporizer App 20110100483 - Nagata; Atsushi ;   et al. | 2011-05-05 |
Evaporation Supply Apparatus For Raw Material And Automatic Pressure Regulating Device Used Therewith App 20100012026 - Hirata; Kaoru ;   et al. | 2010-01-21 |
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