HETZLER; Jochen

Patent Applications and Registrations

Patent applications and USPTO patent grants for HETZLER; Jochen.The latest application filed is for "method for calibrating a measuring apparatus".

Company Profile

7.26.32

HETZLER; Jochen - Aalen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method For Calibrating A Measuring Apparatus App 20220187061 - HETZLER; Jochen ; et al.	2022-06-16
Diffractive Optical Element For A Test Interferometer App 20220170735 - Winkler; Alexander ; et al.	2022-06-02
Measurement Method For Interferometrically Determining A Surface Shape App 20220011095 - STIEPAN; Hans Michael ; et al.	2022-01-13
Compensation optical system for an interferometric measuring system Grant 11,199,396 - Hetzler , et al. December 14, 2	2021-12-14
Device And Method For Characterizing The Surface Shape Of A Test Object App 20210372781 - HETZLER; Jochen ; et al.	2021-12-02
Compensation Optical System For An Interferometric Measuring System App 20200225028 - HETZLER; Jochen ; et al.	2020-07-16
Measuring device for interferometric determination of a shape of an optical surface Grant 10,527,403 - Hetzler J	2020-01-07
Measuring method and measuring arrangement for an imaging optical system Grant 10,502,545 - Wegmann , et al. Dec	2019-12-10
Test device and method for testing a mirror Grant 10,422,718 - Stiepan , et al. Sept	2019-09-24
Method for aligning a mirror of a microlithographic projection exposure apparatus Grant 10,359,703 - Freimann , et al. July 23, 2	2019-07-23
Interferometric measuring arrangement Grant 10,337,850 - Hetzler , et al.	2019-07-02
Projection exposure tool for microlithography and method for microlithographic imaging Grant 10,303,068 - Hetzler , et al.	2019-05-28
Measuring Device For Interferometric Determination Of A Shape Of An Optical Surface App 20190154427 - HETZLER; Jochen	2019-05-23
Method For Aligning A Mirror Of A Microlithographic Projection Exposure Apparatus App 20190049853 - FREIMANN; Rolf ; et al.	2019-02-14
Method for aligning a mirror of a microlithographic projection exposure apparatus Grant 10,101,667 - Freimann , et al. October 16, 2	2018-10-16
Mask inspection system for inspecting lithography masks Grant 10,054,426 - Hetzler , et al. August 21, 2	2018-08-21
Interferometric Measuring Arrangement App 20180106591 - HETZLER; Jochen ; et al.	2018-04-19
Measuring Method And Measuring Arrangement For An Imaging Optical System App 20180087891 - WEGMANN; Ulrich ; et al.	2018-03-29
Projection Exposure Tool For Microlithography And Method For Microlithographic Imaging App 20170371251 - Hetzler; Jochen ; et al.	2017-12-28
Test Device And Method For Testing A Mirror App 20170343449 - STIEPAN; Hans-Michael ; et al.	2017-11-30
Projection exposure tool for microlithography and method for microlithographic imaging Grant 9,709,902 - Hetzler , et al. July 18, 2	2017-07-18
Mirror of a projection exposure apparatus for microlithography with mirror surfaces on different mirror sides, and projection exposure apparatus Grant 9,606,339 - Hetzler , et al. March 28, 2	2017-03-28
Projection Exposure Tool For Microlithography And Method For Microlithographic Imaging App 20170082931 - Hetzler; Jochen ; et al.	2017-03-23
Method For Aligning A Mirror Of A Microlithographic Projection Exposure Apparatus App 20170023865 - FREIMANN; Rolf ; et al.	2017-01-26
Projection exposure tool for microlithography and method for microlithographic imaging Grant 9,442,393 - Hetzler , et al. September 13, 2	2016-09-13
Mask Inspection System For Inspecting Lithography Masks App 20160123724 - Hetzler; Jochen ; et al.	2016-05-05
Projection Exposure Tool For Microlithography And Method For Microlithographic Imaging App 20160116851 - Hetzler; Jochen ; et al.	2016-04-28
Diffractive Optical Element And Measuring Method App 20150198438 - HETZLER; Jochen	2015-07-16
Microlithographic projection exposure apparatus Grant 9,052,606 - Major , et al. June 9, 2	2015-06-09
Projection exposure tool for microlithography and method for microlithographic imaging Grant 9,046,792 - Hetzler , et al. June 2, 2	2015-06-02
Microlithographic projection exposure apparatus Grant 8,982,325 - Totzeck , et al. March 17, 2	2015-03-17
Projection Exposure Tool For Microlithography And Method For Microlithographic Imaging App 20150042975 - Hetzler; Jochen ; et al.	2015-02-12
Method and calibration mask for calibrating a position measuring apparatus Grant 8,617,774 - Kerwien , et al. December 31, 2	2013-12-31
Projection Exposure Tool for Microlithography and Method for Microlithographic Imaging App 20130252146 - Hetzler; Jochen ; et al.	2013-09-26
Projection Exposure Tool for Microlithography and Method for Microlithographic Exposure App 20130182264 - Hetzler; Jochen ; et al.	2013-07-18
Projection objective for microlithography Grant 8,436,982 - Beierl , et al. May 7, 2	2013-05-07
Microlithographic Projection Exposure Apparatus App 20130077074 - Major; Andras G. ; et al.	2013-03-28
Method For Producing A Mirror Having At Least Two Mirror Surfaces, Mirror Of A Projection Exposure Apparatus For Microlithography, And Projection Exposure Apparatus App 20120224186 - HETZLER; Jochen ; et al.	2012-09-06
Method And Calibration Mask For Calibrating A Position Measuring Apparatus App 20120160007 - Kerwien; Norbert ; et al.	2012-06-28
Microlithographic Projection Exposure Apparatus App 20120092637 - Totzeck; Michael ; et al.	2012-04-19
Microlithographic projection exposure apparatus Grant 8,107,054 - Totzeck , et al. January 31, 2	2012-01-31
Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure Grant 8,089,634 - Hetzler , et al. January 3, 2	2012-01-03
Hologram and method of manufacturing an optical element using a hologram Grant 7,848,031 - Hetzler , et al. December 7, 2	2010-12-07
Projection Objective For Microlithography App 20100201959 - Beierl; Helmut ; et al.	2010-08-12
Optical Element And Method Of Calibrating A Measuring Apparatus Comprising A Wave Shaping Structure App 20100177321 - HETZLER; Jochen ; et al.	2010-07-15
Projection Exposure System For Microlithography App 20100134768 - Hetzler; Jochen ; et al.	2010-06-03
Optical system, method of manufacturing an optical system and method of manufacturing an optical element Grant 7,605,926 - Hetzler , et al. October 20, 2	2009-10-20
Microlithographic Projection Exposure Apparatus App 20090073398 - Totzeck; Michael ; et al.	2009-03-19
Hologram and Method of Manufacturing an Optical Element Using a Hologram App 20080137090 - Hetzler; Jochen ; et al.	2008-06-12
Method of qualifying a diffraction grating and method of manufacturing an optical element App 20060274325 - Hetzler; Jochen ; et al.	2006-12-07
Method of manufacturing an optical element using a hologram Grant 7,061,626 - Schillke , et al. June 13, 2	2006-06-13
Mask for use in a microlithographic projection exposure apparatus App 20050123840 - Totzeck, Michael ; et al.	2005-06-09

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