Patent | Date |
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Packaged MEMS device comprising adjustable ventilation opening Grant 9,673,785 - Herzum , et al. June 6, 2 | 2017-06-06 |
MEMS device and method of making a MEMS device Grant 9,580,299 - Dehe , et al. February 28, 2 | 2017-02-28 |
MEMS device and method of making a MEMS device Grant 9,409,763 - Dehe , et al. August 9, 2 | 2016-08-09 |
MEMS Device and Method of Making a MEMS Device App 20160096726 - Dehe; Alfons ;   et al. | 2016-04-07 |
Packaged MEMS Device and Method of Calibrating a Packaged MEMS Device App 20160087606 - Herzum; Christian ;   et al. | 2016-03-24 |
Packaged MEMS device and method of calibrating a packaged MEMS device Grant 9,210,516 - Herzum , et al. December 8, 2 | 2015-12-08 |
Tunable MEMS device and method of making a tunable MEMS device Grant 8,723,277 - Dehe , et al. May 13, 2 | 2014-05-13 |
Packaged MEMS Device and Method of Calibrating a Packaged MEMS Device App 20130277776 - Herzum; Christian ;   et al. | 2013-10-24 |
MEMS Device and Method of Making a MEMS Device App 20130264663 - Dehe; Alfons ;   et al. | 2013-10-10 |
Tunable MEMS Device and Method of Making a Tunable MEMS Device App 20130221453 - Dehe; Alfons ;   et al. | 2013-08-29 |
Overvoltage protection apparatus and an associated protection circuit Grant 7,696,591 - Schrenk , et al. April 13, 2 | 2010-04-13 |
Overvoltage Protection Apparatus and an Associated Protection Circuit App 20090015975 - Schrenk; Michael ;   et al. | 2009-01-15 |
Electronic device with guard ring Grant 7,307,329 - Ahrens , et al. December 11, 2 | 2007-12-11 |
Method for generating a structure on a substrate Grant 7,262,118 - Herzum August 28, 2 | 2007-08-28 |
Method for creating a stepped structure on a substrate Grant 6,946,339 - Herzum September 20, 2 | 2005-09-20 |
Method for generating a structure on a substrate App 20050196968 - Herzum, Christian | 2005-09-08 |
Method for producing a gate structure for an MOS transistor Grant 6,887,764 - Herzum , et al. May 3, 2 | 2005-05-03 |
Semiconductor structure and method for improving its ability to withstand electrostatic discharge (ESD) and overloads Grant 6,888,226 - Diefenbeck , et al. May 3, 2 | 2005-05-03 |
Semiconductor circuit arrangement and a method for producing same Grant 6,852,585 - Herzum , et al. February 8, 2 | 2005-02-08 |
Capacitor and method for producing a capacitor App 20050013090 - Ahrens, Carsten ;   et al. | 2005-01-20 |
Method for producing a gate structure for an MOS transistor App 20040266152 - Herzum, Christian ;   et al. | 2004-12-30 |
Semiconductor device App 20040238871 - Herzum, Christian ;   et al. | 2004-12-02 |
Semiconductor structure and method for improving its ability to withstand electrostatic discharge (esd) and overloads App 20040201044 - Diefenbeck, Klaus ;   et al. | 2004-10-14 |
Method for creating a stepped structure on a substrate App 20040185646 - Herzum, Christian | 2004-09-23 |
Semiconductor circuit arrangement and a method for producing same App 20030164523 - Herzum, Christian ;   et al. | 2003-09-04 |
Semiconductor circuit arrangement and a method for producing same App 20030122212 - Herzum, Christian ;   et al. | 2003-07-03 |