| Patent | Date |
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Reflectometer, spectrophotometer, ellipsometer and polarimeter systems including a wavelength modifier
App 20220244169 - He; Ping ; et al. | 2022-08-04 |
Beam focusing and reflective optics
Grant 10,989,601 - Liphardt , et al. April 27, 2 | 2021-04-27 |
Methods and materials for metamaterials exhibiting form-induced birefringence
Grant 10,914,866 - Hofmann , et al. February 9, 2 | 2021-02-09 |
Ellipsometer or polarimeter system having at least one rotating element which is driven by a motor comprising air bearing
Grant 10,775,298 - Hassler , et al. Sept | 2020-09-15 |
Biased fast axis retarder system
Grant 10,606,093 - Herzinger | 2020-03-31 |
Method to analyze spectroscopic ellipsometry or intensity data of porous samples utilizing the anisotropic bruggeman-effective medium theory
Grant 10,175,160 - Schoeche , et al. J | 2019-01-08 |
Birefringence imaging chromatography based on highly ordered 3D nanostructures
Grant 10,101,265 - Schubert , et al. October 16, 2 | 2018-10-16 |
Integrated vacuum-ultraviolet, mid and near-ultraviolet, visible, near, mid and far infrared and terahertz optical hall effect (OHE) instrument, and method of use
Grant 10,073,120 - Hofmann , et al. September 11, 2 | 2018-09-11 |
Deviation angle self-compensating substantially achromatic retarder
Grant 10,061,068 - Herzinger , et al. August 28, 2 | 2018-08-28 |
Method of obtaining micrographs of transparent or semi-transparent specimens using anisotropic contrast
Grant 10,026,167 - Hofmann , et al. July 17, 2 | 2018-07-17 |
Method to analyze spectroscopic ellipsometry data of porous samples utilizing the anisotropic Bruggeman-effective medium theory
Grant 9,976,902 - Schoeche , et al. May 22, 2 | 2018-05-22 |
Method of characterizing a beam of electromagnetic radiation in ellipsometer and the like systems
Grant 9,952,141 - Hale , et al. April 24, 2 | 2018-04-24 |
Biased fast axis retarder system
Grant 9,921,352 - Herzinger March 20, 2 | 2018-03-20 |
Integrated mid-infrared, far infrared and terahertz optical Hall effect (OHE) instrument, and method of use
Grant 9,851,294 - Hofmann , et al. December 26, 2 | 2017-12-26 |
Terahertz ellipsometer system, and method of use
Grant 9,121,757 - Herzinger September 1, 2 | 2015-09-01 |
Terahertz-infrared Ellipsometer System, And Method Of Use
App 20150153230 - Herzinger; Craig M. ; et al. | 2015-06-04 |
Terahertz-infrared ellipsometer system, and method of use
Grant 9,041,927 - Herzinger , et al. May 26, 2 | 2015-05-26 |
Terahertz-infrared ellipsometer system, and method of use
Grant 8,934,096 - Herzinger , et al. January 13, 2 | 2015-01-13 |
Terahertz ellipsometer system, and method of use
App 20140284484 - Herzinger; Craig M. | 2014-09-25 |
Terahertz ellipsometer system, and method of use
Grant 8,736,838 - Herzinger May 27, 2 | 2014-05-27 |
Terahertz-infrared ellipsometer system, and method of use
Grant 8,705,032 - Herzinger , et al. April 22, 2 | 2014-04-22 |
Terahertz-infrared ellipsometer system, and method of use
App 20140027644 - Herzinger; Craig M. ; et al. | 2014-01-30 |
System and method for compensating detector non-idealities
Grant 8,564,777 - Herzinger October 22, 2 | 2013-10-22 |
Terahertz-infrared ellipsometer system, and method of use
Grant 8,488,119 - Herzinger , et al. July 16, 2 | 2013-07-16 |
Mounting for deviation angle self compensating substantially achromatic retarder
Grant 8,462,341 - He , et al. June 11, 2 | 2013-06-11 |
Terahertz-infrared ellipsometer system, and method of use
Grant 8,416,408 - Herzinger , et al. April 9, 2 | 2013-04-09 |
Terahertz ellipsometer system, and method of use
App 20130026368 - Herzinger; Craig M. | 2013-01-31 |
Terahertz-infrared ellipsometer system, and method of use
App 20120261580 - Herzinger; Craig M. ; et al. | 2012-10-18 |
Empirical correction for spectroscopic ellipsometric measurements of rough or textured surfaces
Grant 8,248,607 - Herzinger , et al. August 21, 2 | 2012-08-21 |
Terahertz-infrared ellipsometer system, and method of use
App 20120206724 - Herzinger; Craig M. ; et al. | 2012-08-16 |
Terahertz-infrared ellipsometer system, and method of use
Grant 8,169,611 - Herzinger , et al. May 1, 2 | 2012-05-01 |
Sample investigating system and method of use
Grant 8,159,672 - Liphardt , et al. April 17, 2 | 2012-04-17 |
Spatial filter in sample investigation system
Grant 8,013,996 - Liphardt , et al. September 6, 2 | 2011-09-06 |
Mounting for deviation angle self compensating substantially achromatic retarder
App 20110188040 - He; Ping ; et al. | 2011-08-04 |
Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation
Grant 7,907,280 - Johs , et al. March 15, 2 | 2011-03-15 |
Terahertz-infrared ellipsometer system, and method of use
App 20100220313 - Herzinger; Craig M. ; et al. | 2010-09-02 |
Spectroscopic ellipsometer and polarimeter systems
Grant 7,633,625 - Woollam , et al. December 15, 2 | 2009-12-15 |
Sample investigating system
Grant 7,623,237 - Liphardt , et al. November 24, 2 | 2009-11-24 |
Spectroscopic ellipsometer and polarimeter systems
Grant 7,616,319 - Woollam , et al. November 10, 2 | 2009-11-10 |
Spatial filter means comprising an aperture with a non-unity aspect ratio in a system for investigating samples with electromagnetic radiation
Grant 7,554,662 - Liphardt , et al. June 30, 2 | 2009-06-30 |
System for and method of investigating the exact same point on a sample substrate with multiple wavelengths
Grant 7,522,279 - Liphardt , et al. April 21, 2 | 2009-04-21 |
Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation
App 20090091758 - Johs; Blaine D. ; et al. | 2009-04-09 |
System for and method of investigating the exact same point on a sample substrate with multiple wavelengths
Grant 7,508,510 - Pfeiffer , et al. March 24, 2 | 2009-03-24 |
Rotating compensator ellipsometer system with spatial filter equivalent
Grant 7,468,794 - Liphardt , et al. December 23, 2 | 2008-12-23 |
Deviation angle self compensating substantially achromatic retarder
Grant 7,460,230 - Johs , et al. December 2, 2 | 2008-12-02 |
Deviation angle self compensating substantially achromatic retarder
Grant 7,450,231 - Johs , et al. November 11, 2 | 2008-11-11 |
Sample analysis methodology utilizing electromagnetic radiation
Grant 7,385,697 - Woollam , et al. June 10, 2 | 2008-06-10 |
Deviation angle self compensating substantially achromatic retarder
App 20080100842 - Johs; Blaine D. ; et al. | 2008-05-01 |
System for reducing stress induced effects during determination of fluid optical constants
Grant 7,349,092 - Tiwald , et al. March 25, 2 | 2008-03-25 |
Spectroscopic ellipsometer and polarimeter systems
Grant 7,336,361 - Liphardt , et al. February 26, 2 | 2008-02-26 |
Spectrophotometer, ellipsometer, polarimeter and the like systems
Grant 7,327,456 - Woollam , et al. February 5, 2 | 2008-02-05 |
Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence
Grant 7,304,737 - Liphardt , et al. December 4, 2 | 2007-12-04 |
Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
Grant 7,295,313 - Johs , et al. November 13, 2 | 2007-11-13 |
Deviation angle self compensating substantially achromatic retarder
App 20070253059 - Johs; Blaine D. ; et al. | 2007-11-01 |
Accurate determination of refractive indices of solid, fluid and liquid materials
Grant 7,280,194 - Herzinger , et al. October 9, 2 | 2007-10-09 |
Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems
Grant 7,274,450 - Green , et al. September 25, 2 | 2007-09-25 |
System for implementing variable retarder capability in ellipsometer, polarimeter or the like systems
Grant 7,265,835 - Herzinger , et al. September 4, 2 | 2007-09-04 |
Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter
Grant 7,245,376 - Liphardt , et al. July 17, 2 | 2007-07-17 |
Method of analysis of multiple layer samples
Grant 7,239,391 - Synowicki , et al. July 3, 2 | 2007-07-03 |
Broadband ellipsometer or polarimeter system including at least one multiple element lens
Grant 7,215,424 - Liphardt , et al. May 8, 2 | 2007-05-08 |
System for and method of investigating the exact same point on a sample substrate with multiple wavelengths
App 20070097373 - Pfeiffer; Galen L. ; et al. | 2007-05-03 |
Time efficient method for investigating sample systems with spectroscopic electromagnetic radiation
Grant 7,193,708 - Herzinger March 20, 2 | 2007-03-20 |
Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses
Grant 7,193,710 - Johs , et al. March 20, 2 | 2007-03-20 |
Spectroscopic ellipsometer and polarimeter systems
Grant 7,158,231 - Woollam , et al. January 2, 2 | 2007-01-02 |
Methodology for providing good data at all wavelengths over a spectroscopic range
Grant 7,151,605 - Herzinger , et al. December 19, 2 | 2006-12-19 |
Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter
App 20060268272 - Liphardt; Martin M. ; et al. | 2006-11-30 |
Alignment of ellipsometer beam to sample surface
Grant 7,136,162 - Liphardt , et al. November 14, 2 | 2006-11-14 |
Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration
Grant 7,075,649 - Johs , et al. July 11, 2 | 2006-07-11 |
System for and method of investigating the exact same point on a sample substrate with at least two wavelengths
Grant 7,057,717 - Liphardt , et al. June 6, 2 | 2006-06-06 |
Spectrophotometer, ellipsometer, polarimeter and the like systems
Grant 6,982,792 - Woollam , et al. January 3, 2 | 2006-01-03 |
Functional equivalent to spatial filter in ellipsometer and the like systems
Grant 6,950,182 - Liphardt , et al. September 27, 2 | 2005-09-27 |
Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
Grant 6,940,595 - Johs , et al. September 6, 2 | 2005-09-06 |
System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation
Grant 6,937,341 - Woollam , et al. August 30, 2 | 2005-08-30 |
Method of analysis of multiple layer samples
App 20050179897 - Synowicki, Ronald A. ; et al. | 2005-08-18 |
Spatial filter source beam conditioning in ellipsometer and the like systems
Grant 6,930,813 - Liphardt , et al. August 16, 2 | 2005-08-16 |
Sample analysis methodology utilizing electromagnetic radiation
App 20040257567 - Woollam, John A. ; et al. | 2004-12-23 |
Methodology for improving precision of data acquired by spectrophotometer systems
Grant 6,831,740 - Herzinger , et al. December 14, 2 | 2004-12-14 |
Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system
Grant 6,822,738 - Johs , et al. November 23, 2 | 2004-11-23 |
Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry
Grant 6,804,004 - Johs , et al. October 12, 2 | 2004-10-12 |
Odd bounce image rotation system in ellipsometer systems
Grant 6,795,184 - Herzinger , et al. September 21, 2 | 2004-09-21 |
Determination of thickness and impurity profiles in thin membranes utilizing spectorscopic data obtained from ellipsometric investigation of both front and back surfaces
Grant 6,455,853 - Herzinger , et al. September 24, 2 | 2002-09-24 |
Rotating compensator ellipsometer system with spatial filter
Grant 6,456,376 - Liphardt , et al. September 24, 2 | 2002-09-24 |
Method for evaluating sample system anisotropic refractive indices and orientations thereof in multiple dimensions
Grant 6,441,902 - Hilfiker , et al. August 27, 2 | 2002-08-27 |
Methodology for improving precision of data acquired by spectrophotometer systems
App 20020085200 - Herzinger, Craig M. ; et al. | 2002-07-04 |
Spatial filter source beam conditioning in ellipsometer and the like systems
App 20010046089 - Liphardt, Martin M. ; et al. | 2001-11-29 |
Determination of thickness and impurity profiles in thin membranes utilizing spectorscopic data obtained from ellipsometric investigation of both front and back surfaces
App 20010042832 - Herzinger, Craig M. ; et al. | 2001-11-22 |
Compact, high extinction coefficient combination brewster angle and other than brewster angle polarizing system, and method of use
Grant 6,137,618 - Herzinger October 24, 2 | 2000-10-24 |
Multiple tipped berek plate optical retarder elements for use in spectroscopic ellipsometer and polarimeter systems
Grant 6,118,537 - Johs , et al. September 12, 2 | 2000-09-12 |
Adjustable beam alignment compensator/retarder with application in spectroscopic ellipsometer and polarimeter systems
Grant 6,084,675 - Herzinger , et al. July 4, 2 | 2000-07-04 |
Methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for window retardence, in ellipsometer and polarimeter systems
Grant 6,034,777 - Johs , et al. March 7, 2 | 2000-03-07 |
Dual vertically oriented triangular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems
Grant 5,963,325 - Johs , et al. October 5, 1 | 1999-10-05 |
Total internal reflection electromagnetic radiation beam entry to, and exit from, ellipsometer, polarimeter, reflectometer and the like systems
Grant 5,963,327 - He , et al. October 5, 1 | 1999-10-05 |
System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems
Grant 5,956,145 - Green , et al. September 21, 1 | 1999-09-21 |
Optical elements for use in spectroscopic ellipsometer and polarimeter systems
Grant 5,946,098 - Johs , et al. August 31, 1 | 1999-08-31 |
Analysis of partially polarized electromagnetic radiation in ellipsometer and polarimeter systems
Grant 5,936,734 - Johs , et al. August 10, 1 | 1999-08-10 |
System and method for improving data acquisition capability in spectroscopic ellipsometers
Grant 5,757,494 - Green , et al. May 26, 1 | 1998-05-26 |
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