Hermes Microvision, Inc.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hermes Microvision, Inc..The latest application filed is for "load lock system for charged particle beam imaging".

Company Profile

24.200.145

Hermes Microvision, Inc. - Hsinchu N/A TW
Hermes Microvision, Inc. - Hisnchu N/A TW
Hermes Microvision, Inc. - Hsinchu City TW
Hermes Microvision Inc. - Hsin-Chu N/A TW
Hermes Microvision, Inc. - Hisnchu City TW
Hermes-Microvision, Inc - Hsinchu City TW
Hermes-Microvision, Inc. - TW TW
Hermes-Microvision, Inc. - Taiwan CN
Hermes-Microvision, Inc. -
HERMES-MICROVISION, INC - HISNCHU 300 TW
HERMES-MICROVISION, INC. - Hisnchu, 300 TW
HERMES MICROVISION, INC - Milpitas CA
HERMES MICROVISION, INC. - Milpitas CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Trademarks

Patent Activity

Patent	Date
Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus Grant 11,328,894 - Ren , et al. May 10, 2	2022-05-10
EBeam inspection method Grant 11,315,237 - Fang April 26, 2	2022-04-26
Apparatus of plural charged-particle beams Grant 10,643,820 - Ren , et al.	2020-05-05
Charged particle source Grant 10,468,227 - Li No	2019-11-05
Systems and methods for charged particle beam modulation Grant 10,403,471 - Shaked , et al. Sep	2019-09-03
Method and system for fast inspecting defects Grant 10,380,731 - Fang , et al. A	2019-08-13
Load Lock System For Charged Particle Beam Imaging App 20190214225 - HUANG; Hsuan-Bin ; et al.	2019-07-11
Method And System For Inspecting An Euv Mask App 20190170671 - WENG; Guochong ; et al.	2019-06-06
Apparatus Of Plural Charged-particle Beams App 20190172677 - REN; Weiming ; et al.	2019-06-06
Systems And Methods For Charged Particle Beam Modulation App 20190164721 - SHAKED; Ehud ; et al.	2019-05-30
Inspection Method And System App 20190147579 - FANG; Wei ; et al.	2019-05-16
Test device for defect inspection Grant 10,274,537 - Yeh	2019-04-30
Apparatus of plural charged-particle beams Grant 10,276,347 - Ren , et al.	2019-04-30
Objective Lens System For Fast Scanning Large Fov App 20190096628 - LI; Shuai ; et al.	2019-03-28
Apparatus of plural charged-particle beams Grant 10,236,156 - Ren , et al.	2019-03-19
Apparatus Of Plural Charged-particle Beams App 20190074157 - LIU; Xuedong ; et al.	2019-03-07
Apparatus Of Plural Charged-particle Beams App 20190057837 - REN; Weiming ; et al.	2019-02-21
Charged Particle Source App 20190057833 - LI; Shuai	2019-02-21
Systems And Methods For Charged Particle Flooding To Enhance Voltage Contrast Defect Signal App 20190043691 - ZHANG; Frank Nan ; et al.	2019-02-07
Systems And Methods For Compensating Dispersion Of A Beam Separator In A Single-beam Or Multi-beam Apparatus App 20190035595 - REN; Weiming ; et al.	2019-01-31
Load lock system for charged particle beam imaging Grant 10,176,967 - Huang , et al. J	2019-01-08
Apparatus Of Plural Charged-particle Beams App 20180350555 - LI; Shuai ; et al.	2018-12-06
Apparatus of plural charged-particle beams Grant 10,141,160 - Ren , et al. Nov	2018-11-27
Apparatus of plural charged-particle beams Grant 10,115,559 - Liu , et al. October 30, 2	2018-10-30
Apparatus of plural charged-particle beams Grant 10,109,456 - Ren , et al. October 23, 2	2018-10-23
Inspection method and system Grant 10,102,619 - Fang , et al. October 16, 2	2018-10-16
Method and system for inspecting an EUV mask Grant 10,088,438 - Weng , et al. October 2, 2	2018-10-02
Local Alignment Point Calibration Method in Die Inspection App 20180247789 - FANG; Wei ; et al.	2018-08-30
Apparatus of plural charged-particle beams Grant 10,062,541 - Ren , et al. August 28, 2	2018-08-28
Load Lock System For Charged Particle Beam Imaging App 20180240645 - HUANG; HSUAN-BIN ; et al.	2018-08-23
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask Grant 10,054,556 - Wang , et al. August 21, 2	2018-08-21
Charged particle source Grant 10,032,600 - Li July 24, 2	2018-07-24
Charged particle beam apparatus Grant 10,020,164 - Chen , et al. July 10, 2	2018-07-10
Objective lens system for fast scanning large FOV Grant 10,008,360 - Li , et al. June 26, 2	2018-06-26
Wafer grounding and biasing method, apparatus, and application Grant 9,991,147 - Wang , et al. June 5, 2	2018-06-05
Inspection method and system Grant 9,965,844 - Fang , et al. May 8, 2	2018-05-08
Local alignment point calibration method in die inspection Grant 9,953,803 - Fang , et al. April 24, 2	2018-04-24
Apparatus of plural charged-particle beams Grant 9,922,799 - Li , et al. March 20, 2	2018-03-20
Method And Machine For Examining Wafers App 20180076099 - CHOU; CHIEN-HUNG ; et al.	2018-03-15
Method and system for inspecting and grounding an EUV mask Grant 9,859,089 - Weng , et al. January 2, 2	2018-01-02
Charged particle source Grant 9,812,283 - Li November 7, 2	2017-11-07
Apparatus Of Plural Charged-particle Beams App 20170309449 - REN; Weiming ; et al.	2017-10-26
Charged particle source Grant 9,799,484 - Li October 24, 2	2017-10-24
Method and machine for examining wafers Grant 9,768,082 - Chou , et al. September 19, 2	2017-09-19
Charged particle source Grant 9,754,760 - Li September 5, 2	2017-09-05
Apparatus of Plural Charged-Particle Beams App 20170213688 - Ren; Weiming ; et al.	2017-07-27
Apparatus of plural charged-particle beams Grant 9,691,588 - Ren , et al. June 27, 2	2017-06-27
Apparatus of plural charged-particle beams Grant 9,691,586 - Ren , et al. June 27, 2	2017-06-27
Test Device for Defect Inspection App 20170176358 - YEH; Roland	2017-06-22
Apparatus of Plural Charged-Particle Beams App 20170154756 - Ren; Weiming ; et al.	2017-06-01
Charged Particle Source App 20170125203 - Li; Shuai	2017-05-04
Apparatus of Plural Charged-Particle Beams App 20170125206 - Ren; Weiming ; et al.	2017-05-04
Charged Particle Source App 20170125202 - Li; Shuai	2017-05-04
Charged Particle Source App 20170125204 - Li; Shuai	2017-05-04
Apparatus of Plural Charged-Particle Beams App 20170125205 - Liu; Xuedong ; et al.	2017-05-04
Metal seal for ultra high vacuum system Grant 9,605,759 - Xi , et al. March 28, 2	2017-03-28
Apparatus of plural charged-particle beams Grant 9,607,805 - Liu , et al. March 28, 2	2017-03-28
Laser SDE effect compensation by adaptive tuning Grant 9,601,311 - Luo , et al. March 21, 2	2017-03-21
Metal seal for ultra high vacuum system Grant 9,581,245 - Xi , et al. February 28, 2	2017-02-28
Swing objective lens Grant 9,583,306 - Li February 28, 2	2017-02-28
Structure Electron Beam Inspection System For Inspecting Extreme Ultraviolet Mask And Structure For Discharging Extreme Ultraviolet Mask App 20170053774 - WANG; You-Jin ; et al.	2017-02-23
Method And System For Inspecting An Euv Mask App 20170052129 - Weng; Guochong ; et al.	2017-02-23
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask Grant 9,572,237 - Wang , et al. February 14, 2	2017-02-14
Apparatus of Plural Charged-Particle Beams App 20170025241 - Li; Shuai ; et al.	2017-01-26
Apparatus of Plural Charged-Particle Beams App 20170025243 - Ren; Weiming ; et al.	2017-01-26
Method and system for fast inspecting defects Grant 9,541,824 - Fang , et al. January 10, 2	2017-01-10
System and method for calibrating charge-regulating module Grant 9,536,697 - Wang , et al. January 3, 2	2017-01-03
System and Method for Calibrating Charge-Regulating Module App 20160343534 - Wang; Yi-Xiang ; et al.	2016-11-24
Apparatus of Plural Charged-Particle Beams App 20160336142 - Liu; Xuedong ; et al.	2016-11-17
Method and system for fast inspecting defects Grant 9,494,856 - Fang , et al. November 15, 2	2016-11-15
EBeam Inspection Method App 20160314572 - Fang; Wei	2016-10-27
Discharging method for charged particle beam imaging Grant 9,460,887 - Wang , et al. October 4, 2	2016-10-04
Apparatus of Plural Charged-Particle Beams App 20160284505 - Ren; Weiming ; et al.	2016-09-29
Apparatus of Plural Charged-Particle Beams App 20160268096 - Ren; Weiming ; et al.	2016-09-15
Laser SDE Effect Compensation by Adaptive Tuning App 20160260579 - Luo; Ying ; et al.	2016-09-08
Method and system for enhancing image quality Grant 9,436,985 - Kuan , et al. September 6, 2	2016-09-06
Method and compound system for inspecting and reviewing defects Grant 9,437,395 - Li September 6, 2	2016-09-06
Method and system of classifying defects on a wafer Grant 9,436,988 - Fang , et al. September 6, 2	2016-09-06
Apparatus of plural charged particle beams with multi-axis magnetic lenses Grant 9,431,209 - Ren , et al. August 30, 2	2016-08-30
Local Alignment Point Calibration Method in Die Inspection App 20160247660 - Fang; Wei ; et al.	2016-08-25
Objective Lens System for Fast Scanning Large FOV App 20160217968 - Li; Shuai ; et al.	2016-07-28
Dynamic focus adjustment with optical height detection apparatus in electron beam system Grant 9,400,176 - Wang , et al. July 26, 2	2016-07-26
Energy filter for charged particle beam apparatus Grant 9,384,936 - Ren , et al. July 5, 2	2016-07-05
Swing Objective Lens App 20160172150 - Li; Shuai	2016-06-16
Method and Compound System for Inspecting and Reviewing Defects App 20160163502 - Li; Shuai	2016-06-09
Charged Particle Source App 20160163500 - Li; Shuai	2016-06-09
Charged particle beam apparatus Grant 9,362,087 - Chen , et al. June 7, 2	2016-06-07
Hot spot identification, inspection, and review Grant 9,330,987 - Lin , et al. May 3, 2	2016-05-03
Method and system for measuring critical dimension and monitoring fabrication uniformity Grant 9,282,293 - Fang , et al. March 8, 2	2016-03-08
Apparatus of Plural Charged Particle Beams with Multi-axis Magnetic Lenses App 20160064180 - Ren; Weiming ; et al.	2016-03-03
Energy Filter for Charged Particle Beam Apparatus App 20160035533 - Ren; Weiming ; et al.	2016-02-04
Methods for promoting semiconductor manufacturing yield and classifying defects during fabricating a semiconductor device, and computer readable mediums encoded with a computer program implementing the same Grant 9,251,581 - Chen , et al. February 2, 2	2016-02-02
Charged Particle Beam Apparatus App 20150371820 - Chen; Zhongwei ; et al.	2015-12-24
Multi-axis magnetic lens for focusing a plurality of charged particle beams Grant 9,202,658 - Chen , et al. December 1, 2	2015-12-01
Charged particle beam apparatus Grant 9,190,241 - Chen , et al. November 17, 2	2015-11-17
Method and System for Inspecting an EUV Mask App 20150325402 - Weng; Guochong ; et al.	2015-11-12
Selectable coulomb aperture in E-beam system Grant 9,184,024 - Chen November 10, 2	2015-11-10
Charged particle beam apparatus Grant 9,177,758 - Chen , et al. November 3, 2	2015-11-03
Structure Electron Beam Inspection System For Inspecting Extreme Ultraviolet Mask And Structure For Discharging Extreme Ultraviolet Mask App 20150305131 - WANG; You-Jin ; et al.	2015-10-22
Reticle operation system Grant 9,164,399 - Wang , et al. October 20, 2	2015-10-20
Energy-discrimination detection device App 20150248990 - Ren; Weiming ; et al.	2015-09-03
Energy-discrimination detection device Grant 9,117,626 - Ren , et al. August 25, 2	2015-08-25
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask Grant 9,113,538 - Wang , et al. August 18, 2	2015-08-18
Apparatus of plural charged particle beams with multi-axis magnetic lens Grant 9,105,440 - Chen , et al. August 11, 2	2015-08-11
Method and system for measuring critical dimension and monitoring fabrication uniformity Grant 9,100,553 - Fang , et al. August 4, 2	2015-08-04
Particle detection system Grant 9,076,629 - Wang , et al. July 7, 2	2015-07-07
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams App 20150179384 - Chen; Zhongwei ; et al.	2015-06-25
Charged Particle Beam Apparatus App 20150155133 - Chen; Zhongwei ; et al.	2015-06-04
Electron beam apparatus Grant 9,048,063 - Ren , et al. June 2, 2	2015-06-02
Method for improving performance of an energy filter Grant 9,048,062 - Ren , et al. June 2, 2	2015-06-02
Charged Particle Beam Apparatus App 20150144788 - Chen; Zhongwei ; et al.	2015-05-28
Method and system for measuring critical dimension and monitoring fabrication uniformity Grant 9,041,795 - Fang , et al. May 26, 2	2015-05-26
Structure and method for determining a defect in integrated circuit manufacturing process Grant 9,035,674 - Xiao , et al. May 19, 2	2015-05-19
Method And System For Inspecting An Euv Mask App 20150102220 - Weng; Guoching ; et al.	2015-04-16
Energy filter for charged particle beam apparatus Grant 9,000,395 - Ren , et al. April 7, 2	2015-04-07
System and method for controlling charge-up in an electron beam apparatus Grant 9,000,369 - Ren , et al. April 7, 2	2015-04-07
Method and system for enhancing image quality Grant 9,002,097 - Kuan , et al. April 7, 2	2015-04-07
System and method for controlling charge-up in an electron beam apparatus Grant 9,000,370 - Ren , et al. April 7, 2	2015-04-07
Multi-axis magnetic lens for focusing a plurality of charged particle beams Grant 9,000,394 - Ren , et al. April 7, 2	2015-04-07
Metal Seal For Ultra High Vacuum System App 20150091258 - Xi; Qingpo ; et al.	2015-04-02
Charged Particle Beam Apparatus App 20150083912 - Chen; Zhongwei ; et al.	2015-03-26
Hot Spot Identification, Inspection, and Review App 20150069232 - Lin; Steve ; et al.	2015-03-12
System and Method for Controlling Charge-up in an Electron Beam Apparatus App 20150060665 - Ren; Weiming ; et al.	2015-03-05
Apparatus Of Plural Charged Particle Beams With Multi-axis Magnetic Lens App 20150060662 - Chen; Zhongwei ; et al.	2015-03-05
System and Method for Controlling Charge-up in an Electron Beam Apparatus App 20150060670 - Ren; Weiming ; et al.	2015-03-05
Wafer Grounding And Biasing Method, Apparatus, Andapplication App 20150049411 - WANG; YI-XIANG ; et al.	2015-02-19
Method for forming memory cell transistor Grant 8,952,435 - Xiao February 10, 2	2015-02-10
Method for examining a sample by using a charged particle beam Grant 8,937,281 - Zhao , et al. January 20, 2	2015-01-20
Method for inspecting overlay shift defect during semiconductor manufacturing and apparatus thereof Grant 08923601 -	2014-12-30
Method for inspecting overlay shift defect during semiconductor manufacturing and apparatus thereof Grant 8,923,601 - Fang , et al. December 30, 2	2014-12-30
Wafer grounding and biasing method, apparatus, and application Grant 8,908,348 - Wang , et al. December 9, 2	2014-12-09
System and method for controlling charge-up in an electron beam apparatus Grant 8,907,281 - Ren , et al. December 9, 2	2014-12-09
High efficiency secondary and back scattered electron detector Grant 8,895,935 - Wang , et al. November 25, 2	2014-11-25
Filament for electron source Grant 8,896,195 - Dou November 25, 2	2014-11-25
Charged particle beam imaging assembly and imaging method thereof Grant 8,884,224 - Fang , et al. November 11, 2	2014-11-11
Method And System Of Classifying Defects On A Wafer App 20140321730 - FANG; WEI ; et al.	2014-10-30
Charged Particle Beam Apparatus App 20140291510 - Chen; Zhongwei ; et al.	2014-10-02
Dynamic Focus Adjustment with Optical Height Detection Apparatus in Electron Beam System App 20140291517 - WANG; JOE ; et al.	2014-10-02
Energy Filter for Charged Particle Beam Apparatus App 20140284476 - Ren; Weiming ; et al.	2014-09-25
Multi-axis magnetic lens for focusing a plurality of charged particle beams Grant 8,835,867 - Chen , et al. September 16, 2	2014-09-16
High efficiency scintillator detector for charged particle detection Grant 8,829,451 - Wang , et al. September 9, 2	2014-09-09
Method and system for heating substrate in vacuum environment and method and system for identifying defects on substrate Grant 8,809,779 - Xiao , et al. August 19, 2	2014-08-19
Method and system of classifying defects on a wafer Grant 8,805,054 - Fang , et al. August 12, 2	2014-08-12
Dynamic focus adjustment with optical height detection apparatus in electron beam system Grant 8,791,414 - Wang , et al. July 29, 2	2014-07-29
Multi-axis magnetic lens for focusing a plurality of charged particle beams Grant 8,791,425 - Ren , et al. July 29, 2	2014-07-29
Method for forming memory cell transistor Grant 8,778,763 - Xiao July 15, 2	2014-07-15
Method and apparatus for identifying plug-to-plug short from a charged particle microscopic image Grant 8,759,762 - Xiao , et al. June 24, 2	2014-06-24
Structure and method for determining a defect in integrated circuit manufacturing process Grant 8,754,372 - Xiao June 17, 2	2014-06-17
Method and system for detecting or reviewing open contacts on a semiconductor device Grant 8,748,815 - Zhao , et al. June 10, 2	2014-06-10
Structure for inspecting defects in word line array fabricated by SADP process and method thereof Grant 8,748,814 - Xiao , et al. June 10, 2	2014-06-10
System and Method for Controlling Charge-up in an Electron Beam Apparatus App 20140151554 - Ren; Weiming ; et al.	2014-06-05
Method and system for filtering noises in an image scanned by charged particles Grant 8,712,184 - Liao , et al. April 29, 2	2014-04-29
Phase detector Grant 8,698,070 - Wang , et al. April 15, 2	2014-04-15
Charged particle beam inspection method Grant 8,692,214 - Zhao , et al. April 8, 2	2014-04-08
Method for inspecting EUV reticle and apparatus thereof Grant 8,692,193 - Kuan , et al. April 8, 2	2014-04-08
Method for characterizing identified defects during charged particle beam inspection and application thereof Grant 8,664,596 - Zhao March 4, 2	2014-03-04
Structure For Discharging Extreme Ultraviolet Mask App 20140027634 - WANG; You-Jin ; et al.	2014-01-30
Movable detector for charged particle beam inspection or review Grant 8,624,186 - Wang , et al. January 7, 2	2014-01-07
Charged particle beam apparatus Grant 8,618,480 - Ren , et al. December 31, 2	2013-12-31
Charged particle beam apparatus Grant 08618480 -	2013-12-31
High Efficiency Scintillator Detector For Charged Particle Detection App 20130334430 - Wang; Zhibin ; et al.	2013-12-19
Particle Detection System App 20130327953 - WANG; YI-XIANG ; et al.	2013-12-12
Method for inspecting localized image and system thereof Grant 8,606,017 - Fang , et al. December 10, 2	2013-12-10
Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system Grant 8,604,428 - Wang , et al. December 10, 2	2013-12-10
Monochromator for charged particle beam apparatus Grant 8,592,761 - Ren , et al. November 26, 2	2013-11-26
Structure for discharging extreme ultraviolet mask Grant 8,575,573 - Wang , et al. November 5, 2	2013-11-05
Charged Particle Beam Apparatus App 20130277554 - Ren; Weiming ; et al.	2013-10-24
Particle detection system Grant 8,552,377 - Wang , et al. October 8, 2	2013-10-08
Metal Seal For Ultra High Vacuum System App 20130257044 - XI; Qingpo ; et al.	2013-10-03
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams App 20130248730 - Ren; Weiming ; et al.	2013-09-26
High Efficiency Secondary And Back Scattered Electron Detector App 20130234032 - Wang; Zhibin ; et al.	2013-09-12
Charged particle system for reticle/wafer defects inspection and review Grant 8,519,333 - Kuan , et al. August 27, 2	2013-08-27
Method And System For Measuring Critical Dimension And Monitoring Fabrication Uniformity App 20130202186 - FANG; WEI ; et al.	2013-08-08
Method and apparatus for charged particle beam inspection Grant 8,497,475 - Yeh , et al. July 30, 2	2013-07-30
Method And System For Measuring Critical Dimension And Monitoring Fabrication Uniformity App 20130188037 - FANG; WEI ; et al.	2013-07-25
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams App 20130181138 - Chen; Zhongwei ; et al.	2013-07-18
Method And System For Measuring Critical Dimension And Monitoring Fabrication Uniformity App 20130182939 - FANG; WEI ; et al.	2013-07-18
Reticle Operation System App 20130176549 - Wang; Youjin ; et al.	2013-07-11
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams App 20130153782 - Ren; Weiming ; et al.	2013-06-20
Apparatus of plural charged particle beams with multi-axis magnetic lens Grant 8,445,862 - Chen , et al. May 21, 2	2013-05-21
Wien Filter App 20130112889 - Chen; Zhongwei ; et al.	2013-05-09
Wien filter Grant 8,436,317 - Chen , et al. May 7, 2	2013-05-07
Method and system for measuring critical dimension and monitoring fabrication uniformity Grant 8,432,441 - Fang , et al. April 30, 2	2013-04-30
Test structure for charged particle beam inspection and method for defect determination using the same Grant 8,421,009 - Xiao April 16, 2	2013-04-16
Wien filter with reduced field leakage Grant 8,421,029 - Ren , et al. April 16, 2	2013-04-16
Charged particle beam detection unit with multi type detection subunits Grant 8,350,213 - Wang , et al. January 8, 2	2013-01-08
Monochromator for Charged Particle Beam Apparatus App 20120318978 - REN; WEIMING ; et al.	2012-12-20
Method And Machine For Examining Wafers App 20120314054 - CHOU; CHIEN-HUNG ; et al.	2012-12-13
Charged particle apparatus Grant 8,319,192 - Ren November 27, 2	2012-11-27
Electron gun with magnetic immersion double condenser lenses Grant 8,314,401 - Zhang , et al. November 20, 2	2012-11-20
Charged Particle System For Reticle / Wafer Defects Inspection And Review App 20120280125 - KUAN; CHIYAN ; et al.	2012-11-08
Method for venting gas into closed space and gas supply assembly thereof Grant 8,302,420 - Wang November 6, 2	2012-11-06
Method for examining a sample by using a charged particle beam Grant 8,299,431 - Zhao , et al. October 30, 2	2012-10-30
Test structure for charged particle beam inspection and method for defect determination using the same Grant 8,299,463 - Xiao October 30, 2	2012-10-30
Method and apparatus for reducing substrate edge effect during inspection Grant 8,294,094 - Zhao , et al. October 23, 2	2012-10-23
Apparatus of plural charged particle beams with multi-axis magnetic lens Grant 8,294,095 - Chen , et al. October 23, 2	2012-10-23
Substrate and die defect inspection method Grant 8,295,580 - Kuan October 23, 2	2012-10-23
Monochromator for charged particle beam apparatus Grant 8,274,046 - Ren , et al. September 25, 2	2012-09-25
Method For Inspecting Euv Reticle And Apparatus Thereof App 20120228494 - KUAN; CHIYAN ; et al.	2012-09-13
Method And System For Measuring Critical Dimension And Monitoring Fabrication Uniformity App 20120212601 - FANG; WEI ; et al.	2012-08-23
Particle detection system Grant 8,237,125 - Wang , et al. August 7, 2	2012-08-07
Method for inspecting EUV reticle and apparatus thereof Grant 8,217,349 - Kuan , et al. July 10, 2	2012-07-10
Apparatus for increasing electric conductivity to a semiconductor wafer substrate when exposure to electron beam Grant 8,218,284 - Chen , et al. July 10, 2	2012-07-10
Particle Detection System App 20120145898 - WANG; YI-XIANG ; et al.	2012-06-14
Apparatus Of Plural Charged Particle Beams With Multi-axis Magnetic Lens App 20120145900 - CHEN; ZHONGWEI ; et al.	2012-06-14
Apparatus Of Plural Charged Particle Beams With Multi-axis Magnetic Lens App 20120145917 - CHEN; ZHONGWEI ; et al.	2012-06-14
Structure and method for determining a defect in integrated circuit manufacturing process Grant 8,193,491 - Xiao June 5, 2	2012-06-05
Method For Forming Memory Cell Transistor App 20120100705 - XIAO; HONG	2012-04-26
Filament for Electron Source App 20120098409 - DOU; Juying	2012-04-26
System and method for a charged particle beam Grant 8,164,060 - Liu , et al. April 24, 2	2012-04-24
System And Method For Removing Organic Residue From A Charged Particle Beam System App 20120080056 - XIAO; Hong	2012-04-05
Structure And Method For Determining A Defect In Integrated Circuit Manufacturing Process App 20120083055 - XIAO; Hong ; et al.	2012-04-05
Structure And Method For Determining A Defect In Integrated Circuit Manufacturing Process App 20120074314 - XIAO; HONG	2012-03-29
Method for Inspecting Overlay Shift Defect during Semiconductor Manufacturing and Apparatus Thereof App 20120070067 - FANG; WEI ; et al.	2012-03-22
Charged Particle Apparatus App 20120049064 - REN; WEIMING	2012-03-01
Method And Apparatus For Charged Particle Beam Inspection App 20120043462 - YEH; Chang Chun ; et al.	2012-02-23
Method For Inspecting Euv Reticle And Apparatus Thereof App 20120032076 - KUAN; CHIYAN ; et al.	2012-02-09
Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system Grant 8,110,818 - Wang , et al. February 7, 2	2012-02-07
E-beam defect review system Grant 8,094,924 - Jau , et al. January 10, 2	2012-01-10
System and method for removing organic residue from a charged particle beam system Grant 8,092,641 - Xiao January 10, 2	2012-01-10
Wafer grounding methodology Grant 8,094,428 - Wang , et al. January 10, 2	2012-01-10
Structure and method for determining a defect in integrated circuit manufacturing process Grant 8,089,297 - Xiao , et al. January 3, 2	2012-01-03
Apparatus for detecting a sample Grant 8,089,637 - Wang , et al. January 3, 2	2012-01-03
Movable Detector for Charged Particle Beam Inspection or Review App 20110291007 - WANG; YI-XIANG ; et al.	2011-12-01
Method and system for determining a defect during charged particle beam inspection of a sample Grant 8,068,662 - Zhang , et al. November 29, 2	2011-11-29
Method and apparatus for charged particle beam inspection Grant 8,063,363 - Yeh , et al. November 22, 2	2011-11-22
Method and system for determining a defect during sample inspection involving charged particle beam imaging Grant 8,055,059 - Fang , et al. November 8, 2	2011-11-08
Method for inspecting overlay shift defect during semiconductor manufacturing and apparatus thereof Grant 8,050,490 - Xiao , et al. November 1, 2	2011-11-01
Particle Detection System App 20110260069 - WANG; YI-XIANG ; et al.	2011-10-27
Dynamic Focus Adjustment with Optical Height Detection Apparatus in Electron Beam system App 20110260055 - WANG; JOE ; et al.	2011-10-27
Z-stage configuration and application thereof Grant 8,031,344 - Wang , et al. October 4, 2	2011-10-04
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Charged Particle Beam Detection Unit with Multi Type Detection Subunits App 20110215241 - Wang; Joe ; et al.	2011-09-08
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Selectable Coulomb Aperture In E-beam System App 20110192975 - CHEN; ZHONGWEI	2011-08-11
Multi-axis Magnetic Lens App 20110139996 - CHEN; ZHONGWEI ; et al.	2011-06-16
Z-stage Configuration And Application Thereof App 20110101222 - WANG; YOU-JIN ; et al.	2011-05-05
Thermal Field Emission Cathode App 20110084591 - CHEN; Zhong-Wei ; et al.	2011-04-14
Substrate Inspection Method App 20110052040 - KUAN; CHIYAN	2011-03-03
Method For Forming Memory Cell Transistor App 20110049595 - XIAO; HONG	2011-03-03
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Method For Characterizing Identified Defects During Charged Particle Beam Inspection And Application Thereof App 20100320381 - ZHAO; Yan	2010-12-23
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Cluster E-beam Lithography System App 20100302520 - Hwang; Archie	2010-12-02
Method For Venting Gas Into Closed Space And Gas Supply Assembly Thereof App 20100270467 - WANG; YOU-JIN	2010-10-28
System And Method For A Charged Particle Beam App 20100270468 - Liu; Xuedong ; et al.	2010-10-28
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Apparatus For Detecting A Sample App 20100165346 - WANG; YOU-JIN ; et al.	2010-07-01
Method And System For Heating Substrate In Vacuum Environment And Method And System For Identifying Defects On Substrate App 20100155596 - XIAO; HONG ; et al.	2010-06-24
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Electron Beam Apparatus App 20100102227 - CHEN; ZHONGWEI ; et al.	2010-04-29
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Patterning Device Holding Apparatus And Application Thereof App 20100102226 - HUANG; Hsuan-Bin ; et al.	2010-04-29
Structure and Method for Determining a Defect in Integrated Circuit Manufacturing Process App 20100078554 - Xiao; Hong	2010-04-01
Apparatus For Increasing Electric Conductivity To A Semiconductor Wafer Substrate When Exposure To Electron Beam App 20100019462 - CHEN; Zhong-Wei ; et al.	2010-01-28
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Electron Beam Apparatus App 20090294664 - Chen; Zhong-Wei ; et al.	2009-12-03
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Method And System For The Visual Classification Of Defects App 20090080763 - JAU; JACK Y. ; et al.	2009-03-26
Optical Auto Focusing System And Method For Electron Beam Inspection Tool App 20080302974 - Wang; Yi Xiang ; et al.	2008-12-11
Structure And Method For Determining A Defect In Integrated Circuit Manufacturing Process App 20080265251 - XIAO; Hong ; et al.	2008-10-30
Method For Determining Abnormal Characteristics In Integrated Circuit Manufacturing Process App 20080267489 - Xiao; Hong ; et al.	2008-10-30
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