| Patent | Date |
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Filter, Method Of Formation Thereof, And Image Sensor
App 20180299792 - BEARDA; Jelte Rients ; et al. | 2018-10-18 |
Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources
Grant 8,154,000 - Hergenhan , et al. April 10, 2 | 2012-04-10 |
Arrangement for generating extreme ultraviolet radiation by means of an electrically operated gas discharge
Grant 8,008,595 - Hergenhan , et al. August 30, 2 | 2011-08-30 |
Arrangement For The Continuous Generation Of Liquid Tin As Emitter Material In Euv Radiation Sources
App 20100282987 - Hergenhan; Guido ; et al. | 2010-11-11 |
Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge
Grant 7,812,542 - Hergenhan , et al. October 12, 2 | 2010-10-12 |
Arrangement for radiation generation by means of a gas discharge
Grant 7,800,086 - Ziener , et al. September 21, 2 | 2010-09-21 |
Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regenerated
Grant 7,649,187 - Hergenhan , et al. January 19, 2 | 2010-01-19 |
Arrangement and method for the generation of extreme ultraviolet radiation
Grant 7,531,820 - Hergenhan , et al. May 12, 2 | 2009-05-12 |
Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge
Grant 7,477,673 - Ziener , et al. January 13, 2 | 2009-01-13 |
Arrangement And Method For The Generation Of Extreme Ultraviolet Radiation By Means Of An Electrically Operated Gas Discharge
App 20080180029 - Hergenhan; Guido ; et al. | 2008-07-31 |
Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation
Grant 7,405,413 - Hergenhan , et al. July 29, 2 | 2008-07-29 |
Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation
Grant 7,372,057 - Gaebel , et al. May 13, 2 | 2008-05-13 |
Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation
Grant 7,368,742 - Hergenhan , et al. May 6, 2 | 2008-05-06 |
Arrangement For The Generation Of Extreme Ultraviolet Radiation By Means Of Electric Discharge At Electrodes Which Can Be Regenerated
App 20080006783 - Hergenhan; Guido ; et al. | 2008-01-10 |
Arrangement For Generating Extreme Ultraviolet Radiation Based On An Electrically Operated Gas Discharge
App 20070228299 - Ziener; Christian ; et al. | 2007-10-04 |
Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma
Grant 7,274,030 - Hergenhan , et al. September 25, 2 | 2007-09-25 |
Method and arrangement for the plasma-based generation of intensive short-wavelength radiation
Grant 7,250,621 - Gaebel , et al. July 31, 2 | 2007-07-31 |
Radiation source for the generation of short-wavelength radiation
Grant 7,233,013 - Hergenhan , et al. June 19, 2 | 2007-06-19 |
Arrangement for the generation of a pulsed laser beam of high average output
Grant 7,218,651 - Hergenhan , et al. May 15, 2 | 2007-05-15 |
Arrangement And Method For The Generation Of Extreme Ultraviolet Radiation
App 20070085044 - Hergenhan; Guido ; et al. | 2007-04-19 |
Arrangement For Radiation Generation By Means Of A Gas Discharge
App 20070040511 - ZIENER; Christian ; et al. | 2007-02-22 |
Method and arrangement for the plasma-based generation of soft x-radiation
Grant 7,161,163 - Gaebel , et al. January 9, 2 | 2007-01-09 |
Arrangement for the stabilization of the radiation emission of a plasma
Grant 7,122,814 - Hergenhan , et al. October 17, 2 | 2006-10-17 |
Plasma radiation source
App 20060226377 - Hergenhan; Guido ; et al. | 2006-10-12 |
Radiation source for the generation of short-wavelength radiation
App 20060219959 - Hergenhan; Guido ; et al. | 2006-10-05 |
Arrangement for the generation of a pulsed laser beam of high average output
App 20060140232 - Hergenhan; Guido ; et al. | 2006-06-29 |
Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation
App 20060043319 - Gaebel; Kai ; et al. | 2006-03-02 |
Arrangement for the generation of intensive short-wave radiation based on a plasma
Grant 6,995,382 - Ziener , et al. February 7, 2 | 2006-02-07 |
Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation
App 20060024216 - Hergenhan; Guido ; et al. | 2006-02-02 |
Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation
App 20060017026 - Hergenhan; Guido ; et al. | 2006-01-26 |
Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma
App 20050274912 - Hergenhan, Guido ; et al. | 2005-12-15 |
Method and arrangement for the plasma-based generation of intensive short-wavelength radiation
App 20050258768 - Gaebel, Kai ; et al. | 2005-11-24 |
Positioning device
Grant 6,947,227 - Hergenhan September 20, 2 | 2005-09-20 |
Method and arrangement for the plasma-based generation of soft x-radiation
App 20050169429 - Gaebel, Kai ; et al. | 2005-08-04 |
Arrangement for the stabilization of the radiation emission of a plasma
App 20040195529 - Hergenhan, Guido ; et al. | 2004-10-07 |
Arrangement for the generation of intensive short-wave radiation based on a plasma
App 20040159802 - Ziener, Christian ; et al. | 2004-08-19 |
Positioning device
App 20040145821 - Hergenhan, Guido | 2004-07-29 |
Laser radiation source and process for generating a coherent total laser radiation field
App 20020048292 - Bissinger, Norbert ; et al. | 2002-04-25 |
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