| Patent | Date |
|---|
Fuel cell interconnect with reduced voltage degradation and manufacturing method
Grant 11,456,464 - Khurana , et al. September 27, 2 | 2022-09-27 |
Fuel cell interconnect with iron rich rib regions and method of making thereof
Grant 11,335,914 - Herchen , et al. May 17, 2 | 2022-05-17 |
Methods For Manufacturing Fuel Cell Interconnects Using 3d Printing
App 20210313658 - VERMA; Avinash ; et al. | 2021-10-07 |
Fuel Cell System With Electrical Control Of Fuel Utilization And Method Of Operating Thereof
App 20210257645 - ARMSTRONG; Tad ; et al. | 2021-08-19 |
Method of measurement and estimation of the coefficient of thermal expansion in components
Grant 10,962,492 - Lin , et al. March 30, 2 | 2021-03-30 |
Fuel Cell Interconnect With Reduced Voltage Degradation And Manufacturing Method
App 20210075027 - KHURANA; Sanchit ; et al. | 2021-03-11 |
Fuel Cell Interconnect With Iron Rich Rib Regions And Method Of Making Thereof
App 20200403250 - HERCHEN; Harald ; et al. | 2020-12-24 |
Fuel cell interconnect with reduced voltage degradation and manufacturing method
Grant 10,873,092 - Khurana , et al. December 22, 2 | 2020-12-22 |
Pre-formed powder delivery to powder press machine
Grant 10,593,962 - Herchen , et al. | 2020-03-17 |
Coatings for SOFC metallic interconnects
Grant 10,505,206 - Armstrong , et al. Dec | 2019-12-10 |
Methods and systems for detecting leaks in a fuel cell stack
Grant 10,333,162 - Mack , et al. | 2019-06-25 |
Method of fabricating an interconnect for a fuel cell stack
Grant 10,079,393 - Verma , et al. September 18, 2 | 2018-09-18 |
Fuel Cell Interconnect With Reduced Voltage Degradation And Manufacturing Method
App 20180248202 - KHURANA; Sanchit ; et al. | 2018-08-30 |
Method Of Measurement And Estimation Of The Coefficient Of Thermal Expansion In Components
App 20180217075 - Lin; Cheng-Yu ; et al. | 2018-08-02 |
Composition and processing of metallic interconnects for SOFC stacks
Grant 9,993,874 - Shivanath , et al. June 12, 2 | 2018-06-12 |
Method of measurement and estimation of the coefficient of thermal expansion in components
Grant 9,958,406 - Lin , et al. May 1, 2 | 2018-05-01 |
Thermal processing of interconnects
Grant 9,847,520 - Majagi , et al. December 19, 2 | 2017-12-19 |
Serialization of fuel cell components
Grant 9,678,501 - Couse , et al. June 13, 2 | 2017-06-13 |
Methods And Systems For Detecting Leaks In A Fuel Cell Stack
App 20170110746 - Mack; Jerome A. ; et al. | 2017-04-20 |
Coatings For Sofc Metallic Interconnects
App 20170054159 - Armstrong; Tad ; et al. | 2017-02-23 |
Pre-formed Powder Delivery To Powder Press Machine
App 20170054157 - Herchen; Harald ; et al. | 2017-02-23 |
Fuel cell interconnect
Grant 9,570,769 - Couse , et al. February 14, 2 | 2017-02-14 |
Pre-formed powder delivery to powder press machine
Grant 9,502,721 - Herchen , et al. November 22, 2 | 2016-11-22 |
Fuel cell interconnect with reduced voltage degradation over time
Grant 9,468,736 - Darga , et al. October 18, 2 | 2016-10-18 |
Coatings for SOFC metallic interconnects
Grant 9,452,475 - Armstrong , et al. September 27, 2 | 2016-09-27 |
Fuel Cell Interconnect
App 20160043415 - Couse; Stephen ; et al. | 2016-02-11 |
Fuel cell interconnect heat treatment method
Grant 9,196,909 - Darga , et al. November 24, 2 | 2015-11-24 |
Composition And Processing Of Metallic Interconnects For Sofc Stacks
App 20150244004 - SHIVANATH; Rohith ; et al. | 2015-08-27 |
Method Of Making Fuel Cell Interconnect Using Powder Metallurgy
App 20150221957 - Herchen; Harald ; et al. | 2015-08-06 |
Fuel Cell Interconnect With Reduced Voltage Degradation Over Time
App 20150147679 - DARGA; Daniel ; et al. | 2015-05-28 |
Pre-formed Powder Delivery To Powder Press Machine
App 20150110665 - HERCHEN; Harald ; et al. | 2015-04-23 |
Fuel cell interconnects and methods of fabrication
Grant 8,962,219 - Couse , et al. February 24, 2 | 2015-02-24 |
Non-destructive testing methods for fuel cell interconnect manufacturing
Grant 8,802,331 - Herchen , et al. August 12, 2 | 2014-08-12 |
Substrate processing apparatus with heater element held by vacuum
Grant 8,785,821 - Herchen July 22, 2 | 2014-07-22 |
Serialization of Fuel Cell Components
App 20140195031 - Couse; Stephen ; et al. | 2014-07-10 |
Cluster tool architecture for processing a substrate
Grant 8,550,031 - Ishikawa , et al. October 8, 2 | 2013-10-08 |
Coatings for SOFC Metallic Interconnects
App 20130230644 - Armstrong; Tad ; et al. | 2013-09-05 |
Fuel Cell Interconnect Heat Treatment Method
App 20130130154 - Darga; Daniel ; et al. | 2013-05-23 |
Method of Making Fuel Cell Interconnect Using Powder Metallurgy
App 20130129557 - Herchen; Harald ; et al. | 2013-05-23 |
Fuel Cell Interconnects and Methods of Fabrication
App 20130130152 - Couse; Stephen ; et al. | 2013-05-23 |
Cluster Tool Architecture For Processing A Substrate
App 20120180983 - ISHIKAWA; TETSUYA ; et al. | 2012-07-19 |
Cluster tool architecture for processing a substrate
Grant 8,215,262 - Ishikawa , et al. July 10, 2 | 2012-07-10 |
Non-Destructive Testing Methods for Fuel Cell Interconnect Manufacturing
App 20120135337 - Herchen; Harald ; et al. | 2012-05-31 |
Cluster tool architecture for processing a substrate
Grant 8,181,596 - Ishikawa , et al. May 22, 2 | 2012-05-22 |
Cluster tool architecture for processing a substrate
Grant 8,146,530 - Ishikawa , et al. April 3, 2 | 2012-04-03 |
Method And System For Thermal Treatment Of Substrates
App 20120055916 - Volfovski; Leon ; et al. | 2012-03-08 |
Cluster tool architecture for processing a substrate
Grant 7,925,377 - Ishikawa , et al. April 12, 2 | 2011-04-12 |
Substrate Processing Apparatus With Heater Element Held By Vacuum
App 20110000426 - Herchen; Harald | 2011-01-06 |
Method and system for controlling bake plate temperature in a semiconductor processing chamber
Grant 7,831,135 - Herchen November 9, 2 | 2010-11-09 |
Cluster tool architecture for processing a substrate
Grant 7,743,728 - Ishikawa , et al. June 29, 2 | 2010-06-29 |
Cluster tool architecture for processing a substrate
Grant 7,694,647 - Ishikawa , et al. April 13, 2 | 2010-04-13 |
Method and system for determining object height
Grant 7,567,885 - Herchen , et al. July 28, 2 | 2009-07-28 |
Apparatus For Supporting A Substrate During Semiconductor Processing Operations
App 20090179366 - Herchen; Harald ; et al. | 2009-07-16 |
Method And System For Performing Electrostatic Chuck Clamping In Track Lithography Tools
App 20090109595 - Herchen; Harald ; et al. | 2009-04-30 |
Wafer bevel particle detection
Grant 7,521,915 - Herchen , et al. April 21, 2 | 2009-04-21 |
Method and system to measure flow velocity and volume
Grant 7,517,469 - Herchen , et al. April 14, 2 | 2009-04-14 |
Cluster Tool Architecture For Processing A Substrate
App 20090067956 - Ishikawa; Tetsuya ; et al. | 2009-03-12 |
Cluster Tool Architecture For Processing A Substrate
App 20090064929 - Ishikawa; Tetsuya ; et al. | 2009-03-12 |
Cluster Tool Architecture For Processing A Substrate
App 20090064928 - Ishikawa; Tetsuya ; et al. | 2009-03-12 |
Method and apparatus for detecting substrate temperature in a track lithography tool
Grant 7,500,781 - Herchen March 10, 2 | 2009-03-10 |
Method And System For Controlling Bake Plate Temperature In A Semiconductor Processing Chamber
App 20090060480 - Herchen; Harald | 2009-03-05 |
Method and system for detection of wafer centering in a track lithography tool
Grant 7,497,026 - Herchen , et al. March 3, 2 | 2009-03-03 |
Method and System for Determining Object Height
App 20090055124 - Herchen; Harald ; et al. | 2009-02-26 |
Method and System for Detecting Substrate Temperature in a Track Lithography Tool
App 20080267257 - Herchen; Harald | 2008-10-30 |
Method To Cool Bake Plates In A Track Lithography Tool
App 20080236787 - Herchen; Harald ; et al. | 2008-10-02 |
Interlaced Rtd Sensor For Zone/average Temperature Sensing
App 20080224817 - Vellore; Kim R. ; et al. | 2008-09-18 |
Cluster Tool Architecture For Processing A Substrate
App 20080223293 - Ishikawa; Tetsuya ; et al. | 2008-09-18 |
Cluster Tool Architecture For Processing A Substrate
App 20080199282 - Ishikawa; Tetsuya ; et al. | 2008-08-21 |
Method And System For Detection Of Wafer Centering In A Track Lithography Tool
App 20080168673 - Herchen; Harald ; et al. | 2008-07-17 |
Method And System For Bake Plate Heat Transfer Control In Track Lithography Tools
App 20080160462 - Herchen; Harald ; et al. | 2008-07-03 |
Method And System To Measure And Compensate For Substrate Warpage During Thermal Processing
App 20080153182 - Herchen; Harald ; et al. | 2008-06-26 |
Developer endpoint detection in a track lithography system
Grant 7,371,022 - Herchen May 13, 2 | 2008-05-13 |
Cluster tool architecture for processing a substrate
Grant 7,357,842 - Ishikawa , et al. April 15, 2 | 2008-04-15 |
Methods And Systems For Performing Immersion Processing During Lithography
App 20080050679 - Salek; Mohsen S. ; et al. | 2008-02-28 |
Wafer backside particle removal for track tools
App 20080032491 - Herchen; Harald | 2008-02-07 |
Multi-temperature output heat exchanger with single chiller
App 20070261818 - Herchen; Harald | 2007-11-15 |
Composite heater and chill plate
App 20070251456 - Herchen; Harald ; et al. | 2007-11-01 |
Faceplate with rapid temperature change
App 20070254494 - Herchen; Harald ; et al. | 2007-11-01 |
Method and System to Measure Flow Velocity and Volume
App 20070251921 - HERCHEN; Harald ; et al. | 2007-11-01 |
Wafer bevel particle detection
App 20070247137 - Herchen; Harald ; et al. | 2007-10-25 |
Wafer backside particle detection for track tools
App 20070247165 - Herchen; Harald | 2007-10-25 |
Method of proximity pin manufacture
App 20070246839 - Herchen; Harald ; et al. | 2007-10-25 |
Electric field reducing thrust plate
Grant 7,285,195 - Herchen , et al. October 23, 2 | 2007-10-23 |
Cluster Tool Architecture For Processing A Substrate
App 20060286300 - Ishikawa; Tetsuya ; et al. | 2006-12-21 |
Cluster Tool Architecture For Processing A Substrate
App 20060278165 - Ishikawa; Tetsuya ; et al. | 2006-12-14 |
Liquid isolation of contact rings
Grant 7,138,039 - Burkhart , et al. November 21, 2 | 2006-11-21 |
Passive wafer support for particle free wafer acceleration
App 20060236941 - Herchen; Harald | 2006-10-26 |
Contact ring with embedded flexible contacts
App 20060237308 - Herchen; Harald | 2006-10-26 |
Contact ring with embedded flexible contacts
Grant 7,087,144 - Herchen August 8, 2 | 2006-08-08 |
Method and apparatus for sealing electrical contacts during an electrochemical deposition process
Grant 7,067,045 - Keigler , et al. June 27, 2 | 2006-06-27 |
Method and system for determining post exposure bake endpoint
App 20060134536 - Herchen; Harald | 2006-06-22 |
Cluster tool architecture for processing a substrate
App 20060130750 - Ishikawa; Tetsuya ; et al. | 2006-06-22 |
Purged vacuum chuck with proximity pins
App 20060130767 - Herchen; Harald | 2006-06-22 |
Cluster tool architecture for processing a substrate
App 20060134330 - Ishikawa; Tetsuya ; et al. | 2006-06-22 |
Developer endpoint detection in a track lithography system
App 20060132730 - Herchen; Harald | 2006-06-22 |
Current collimation for thin seed and direct plating
App 20060102467 - Herchen; Harald ; et al. | 2006-05-18 |
Plating uniformity control by contact ring shaping
Grant 7,025,862 - Herchen , et al. April 11, 2 | 2006-04-11 |
Noble metal contacts for plating applications
App 20060000708 - Herchen; Harald | 2006-01-05 |
Electric field reducing thrust plate
App 20050284754 - Herchen, Harald ; et al. | 2005-12-29 |
Electrochemical plating cell having a membrane stack
App 20050092602 - Herchen, Harald | 2005-05-05 |
Electrochemical plating cell having a diffusion member
App 20050092601 - Herchen, Harald | 2005-05-05 |
Anode isolation by diffusion differentials
Grant 6,875,331 - Herchen April 5, 2 | 2005-04-05 |
Method for removing electrolyte from electrical contacts and wafer touching areas
Grant 6,869,516 - Lubomirsky , et al. March 22, 2 | 2005-03-22 |
Anode impedance control through electrolyte flow control
Grant 6,855,235 - Herchen , et al. February 15, 2 | 2005-02-15 |
Anode slime reduction method while maintaining low current
Grant 6,843,897 - Herchen , et al. January 18, 2 | 2005-01-18 |
Contact ring with embedded flexible contacts
App 20040149573 - Herchen, Harald | 2004-08-05 |
Noble metal contacts for plating applications
App 20040140217 - Herchen, Harald | 2004-07-22 |
Liquid isolation of contact rings
App 20040140203 - Burkhart, Vincent E. ; et al. | 2004-07-22 |
Metal deposition process with pre-cleaning before electrochemical deposition
App 20040118697 - Wen+, Mei ; et al. | 2004-06-24 |
Plating uniformity control by contact ring shaping
App 20040074761 - Herchen, Harald ; et al. | 2004-04-22 |
Method for removing electrolyte from electrical contacts and wafer touching areas
App 20040074777 - Lubomirsky, Dmitry ; et al. | 2004-04-22 |
Method and apparatus for sealing electrical contacts during an electrochemical deposition process
App 20040074762 - Keigler, Arthur ; et al. | 2004-04-22 |
Oxide treatment and pressure control for electrodeposition
App 20040069651 - Herchen, Harald ; et al. | 2004-04-15 |
Method for modulating stress in films deposited using a physical vapor deposition (PVD) process
App 20040060812 - Chen, Jr-Jyan ; et al. | 2004-04-01 |
Substrate cleaning apparatus and method
Grant 6,692,903 - Chen , et al. February 17, 2 | 2004-02-17 |
Anode isolation by diffusion differentials
App 20040007459 - Herchen, Harald | 2004-01-15 |
Anode impedance control through electrolyte flow control
App 20030221957 - Herchen, Harald ; et al. | 2003-12-04 |
Anode slime reduction method while maintaining low current
App 20030221956 - Herchen, Harald ; et al. | 2003-12-04 |
Monocrystalline ceramic electrostatic chuck
Grant 6,529,362 - Herchen March 4, 2 | 2003-03-04 |
Novel thermal transfer apparatus
App 20020134513 - Palagashvili, David ; et al. | 2002-09-26 |
Apparatus And Method For Detecting A Presence Or Position Of A Substrate
App 20020078889 - WELCH, MICHAEL D. ; et al. | 2002-06-27 |
Substrate cleaning apparatus and method
App 20020072016 - Chen, Haojiang ; et al. | 2002-06-13 |
Exhaust System For Treating Process Gas Effluent
App 20020066535 - BROWN, WILLIAM ; et al. | 2002-06-06 |
Chamber Having Improved Gas Energizer And Method
App 20020037653 - HERCHEN, HARALD | 2002-03-28 |
Monocrystalline Ceramic Electrostatic Chuck
App 20010046112 - HERCHEN, HARALD | 2001-11-29 |
Substrate process chamber and processing method
Grant 6,264,852 - Herchen , et al. July 24, 2 | 2001-07-24 |
Apparatus for sidewall profile control during an etch process
Grant 6,248,206 - Herchen , et al. June 19, 2 | 2001-06-19 |
Semiconductor process chamber and processing method
Grant 6,159,297 - Herchen , et al. December 12, 2 | 2000-12-12 |
Bipolar electrostatic chuck and method of making same
Grant 6,088,213 - Herchen July 11, 2 | 2000-07-11 |
Electrostatic chuck having an electrical connector with housing
Grant 6,072,685 - Herchen June 6, 2 | 2000-06-06 |
Polymer removal from top surfaces and sidewalls of a semiconductor wafer
Grant 6,062,237 - Brown , et al. May 16, 2 | 2000-05-16 |
Microwave-activated etching of dielectric layers
Grant 6,015,761 - Merry , et al. January 18, 2 | 2000-01-18 |
Distributed microwave plasma reactor for semiconductor processing
Grant 5,948,168 - Shan , et al. September 7, 1 | 1999-09-07 |
Pressure actuated sealing diaphragm for chucks
Grant 5,870,271 - Herchen February 9, 1 | 1999-02-09 |
Etch enhancement using an improved gas distribution plate
Grant 5,819,434 - Herchen , et al. October 13, 1 | 1998-10-13 |
Polymer removal from top surfaces and sidewalls of a semiconductor wafer
Grant 5,780,359 - Brown , et al. July 14, 1 | 1998-07-14 |
Monocrystalline ceramic coating having integral bonding interconnects for electrostatic chucks
Grant 5,737,178 - Herchen April 7, 1 | 1998-04-07 |
Distributed microwave plasma reactor for semiconductor processing
Grant 5,702,530 - Shan , et al. December 30, 1 | 1997-12-30 |
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