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Apparatus for transferring wafer, method for transferring wafer using the same with three sensors Grant 11,315,817 - Kim , et al. April 26, 2 | 2022-04-26 |
Chemical Solution Evaporation Device And Substrate Processing Device Including The Same App 20220016580 - SEO; WONGUK ;   et al. | 2022-01-20 |
Load cup and chemical mechanical polishing apparatus and method of manufacturing including the same Grant 11,027,394 - Yang , et al. June 8, 2 | 2021-06-08 |
Apparatus For Transferring Wafer, Method For Transferring Wafer Using The Same And Method Of Manufacturing Semiconductor Device Using The Same App 20210098274 - Kim; Euijin ;   et al. | 2021-04-01 |
Wafer Processing Apparatus And Wafer Processing Method Using The Same Apparatus App 20210028034 - HWANG; Youngho ;   et al. | 2021-01-28 |
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Heating Module And Semiconductor Fabricating System Including The Same App 20200260534 - A1 | 2020-08-13 |
System and method for controlling semiconductor manufacturing facility, method of manufacturing integrated circuit using the system and method, and method of manufacturing processor using the system and method Grant 10,553,464 - Jeong , et al. Fe | 2020-02-04 |
Load Cup And Chemical Mechanical Polishing Apparatus And Method Of Manufacturing Including The Same App 20190176291 - YANG; Jieun ;   et al. | 2019-06-13 |
System And Method For Controlling Semiconductor Manufacturing Facility, Method Of Manufacturing Integrated Circuit Using The System And Method, And Method Of Manufacturing Processor Using The System And Method App 20190088515 - JEONG; Jae Won ;   et al. | 2019-03-21 |
Substrate transfer unit, substrate treating apparatus including the same, and substrate treating method Grant 10,040,192 - Heo , et al. August 7, 2 | 2018-08-07 |
Link structure Grant 9,889,556 - Kim , et al. February 13, 2 | 2018-02-13 |
Substrate Processing System And Substrate Processing Method App 20170178945 - SEO; Won-Guk ;   et al. | 2017-06-22 |
Voltage measuring apparatus and battery management system including the same Grant 9,645,201 - Song , et al. May 9, 2 | 2017-05-09 |
Voltage measuring apparatus and battery management system including the same Grant 9,553,462 - Song , et al. January 24, 2 | 2017-01-24 |
Substrate Transfer Unit, Substrate Treating Apparatus Including The Same, And Substrate Treating Method App 20160172224 - Heo; Seok ;   et al. | 2016-06-16 |
Link Structure App 20150360373 - KIM; Sun-Ho ;   et al. | 2015-12-17 |
Voltage Measuring Apparatus And Battery Management System Including The Same App 20140239966 - SONG; Moonsik ;   et al. | 2014-08-28 |
Voltage Measuring Apparatus And Battery Management System Including The Same App 20140239897 - SONG; Moonsik ;   et al. | 2014-08-28 |
Electrodeless lighting system and control method thereof Grant 8,410,700 - Heo , et al. April 2, 2 | 2013-04-02 |
Plasma lighting system Grant 8,378,582 - Kim , et al. February 19, 2 | 2013-02-19 |
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Electrodeless Lighting System And Control Method Thereof App 20110006683 - HEO; Seok ;   et al. | 2011-01-13 |
Apparatus and method for manufacturing spiral duct Grant 7,730,754 - Cha , et al. June 8, 2 | 2010-06-08 |
Method of designing rotary thermal actuator and rotary thermal actuator Grant 7,719,161 - Heo , et al. May 18, 2 | 2010-05-18 |
Method of designing rotary thermal actuator and rotary thermal actuator App 20080073997 - Heo; Seok ;   et al. | 2008-03-27 |
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