loadpatents
Patent applications and USPTO patent grants for Heo; Dongho.The latest application filed is for "mask trimming".
Patent | Date |
---|---|
Mask trimming Grant 8,864,931 - Goyal , et al. October 21, 2 | 2014-10-21 |
Plasma process with photoresist mask pretreatment Grant 8,277,670 - Heo , et al. October 2, 2 | 2012-10-02 |
De-fluoridation process Grant 8,172,948 - Heo , et al. May 8, 2 | 2012-05-08 |
Infinitely selective photoresist mask etch Grant 7,910,489 - Kim , et al. March 22, 2 | 2011-03-22 |
Mask Trimming App 20110030895 - GOYAL; Supriya ;   et al. | 2011-02-10 |
Mask trimming Grant 7,838,426 - Goyal , et al. November 23, 2 | 2010-11-23 |
Mask trimming with ARL etch Grant 7,785,484 - Heo , et al. August 31, 2 | 2010-08-31 |
Plasma Process With Photoresist Mask Pretreatment App 20090286400 - Heo; Dongho ;   et al. | 2009-11-19 |
Mask Trimming With Arl Etch App 20090050603 - Heo; Dongho ;   et al. | 2009-02-26 |
Mask Trimming App 20090050271 - Goyal; Supriya ;   et al. | 2009-02-26 |
De-fluoridation Process App 20080083502 - Heo; Dongho ;   et al. | 2008-04-10 |
De-fluoridation process Grant 7,309,646 - Heo , et al. December 18, 2 | 2007-12-18 |
Infinitely selective photoresist mask etch App 20070193973 - Kim; Ji Soo ;   et al. | 2007-08-23 |
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