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Patent applications and USPTO patent grants for Henrichs; Sven.The latest application filed is for "consistent mask targeting through standardized drop-in-cells".
Patent | Date |
---|---|
Consistent mask targeting through standardized drop-in-cells Grant 10,955,739 - Grunes , et al. March 23, 2 | 2021-03-23 |
Consistent Mask Targeting Through Standardized Drop-in-cells App 20200209734 - GRUNES; Harsha ;   et al. | 2020-07-02 |
Lithography mask having sub-resolution phased assist features Grant 9,046,761 - Ogadhoh , et al. June 2, 2 | 2015-06-02 |
Lithography Mask Having Sub-resolution Phased Assist Features App 20130216941 - Ogadhoh; Shem O. ;   et al. | 2013-08-22 |
High resolution phase shift mask Grant 8,399,158 - Choi , et al. March 19, 2 | 2013-03-19 |
High Resolution Phase Shift Mask App 20120164563 - Choi; Chang Ju ;   et al. | 2012-06-28 |
Lithography masks for improved line-end patterning Grant 7,816,061 - Schenker , et al. October 19, 2 | 2010-10-19 |
Process for fabrication of alternating phase shift masks App 20090098469 - Chakravorty; Kishore K. ;   et al. | 2009-04-16 |
Lithography masks for improved line-end patterning App 20080318137 - Schenker; Richard ;   et al. | 2008-12-25 |
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