Hennig; Mario

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hennig; Mario.The latest application filed is for "method of patterning a substrate, photosensitive layer stack and system for lithography".

Company Profile

0.7.15

Hennig; Mario - Dresden DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for producing a mask for the lithographic projection of a pattern onto a substrate Grant 7,644,389 - Hennig , et al. January 5, 2	2010-01-05
Method of Patterning a Substrate, Photosensitive Layer Stack and System for Lithography App 20090170024 - Hennig; Mario ; et al.	2009-07-02
Method for reducing an overlay error and measurement mark for carrying out the same Grant 7,425,396 - Gruss , et al. September 16, 2	2008-09-16
Mask Structure for Manufacturing an Integrated Circuit by Photolithographic Patterning App 20080204686 - Henke; Wolfgang ; et al.	2008-08-28
Set of at least two masks for the projection of structure patterns Grant 7,393,613 - Dettmann , et al. July 1, 2	2008-07-01
Set of masks including a first mask and a second trimming mask with a semitransparent region having a transparency between 20% and 80% to control diffraction effects and obtain maximum depth of focus for the projection of structure patterns onto a semiconductor wafer Grant 7,393,614 - Kohle , et al. July 1, 2	2008-07-01
Apparatus for projecting a pattern into an image plane Grant 7,339,652 - Moukara , et al. March 4, 2	2008-03-04
Transistor arrangement, sense-amplifier arrangement and methods of manufacturing the same via a phase shift mask App 20080042171 - Mosler; Sebastian ; et al.	2008-02-21
Mask arrangement, optical projection system and method for obtaining grating parameters and absorption properties of a diffractive optical element App 20070287075 - Pforr; Rainer ; et al.	2007-12-13
Method For Producing A Mask For The Lithographic Projection Of A Pattern Onto A Substrate App 20070196744 - Hennig; Mario ; et al.	2007-08-23
Method and system for photolithography App 20070009816 - Pforr; Rainer ; et al.	2007-01-11
Apparatus for projecting a pattern into an image plane App 20060181691 - Moukara; Molela ; et al.	2006-08-17
Imaging system and method for producing semiconductor structures on a wafer by imaging a mask on the wafer with a dipole diaphragm App 20060183258 - Hennig; Mario ; et al.	2006-08-17
Method for producing semiconductor patterns on a wafer App 20060177773 - Hennig; Mario ; et al.	2006-08-10
Mask with programmed defects and method for the fabrication thereof Grant 7,045,254 - Dettmann , et al. May 16, 2	2006-05-16
Method for transferring a layout of an integrated circuit level to a semiconductor substrate App 20050196689 - Nolscher, Christoph ; et al.	2005-09-08
Method for reducing an overlay error and measurement mark for carrying out the same App 20050069790 - Gruss, Stefan ; et al.	2005-03-31
Photolithographic mask and methods for producing a structure and of exposing a wafer in a projection apparatus Grant 6,838,216 - Griesinger , et al. January 4, 2	2005-01-04
Set of at least two masks for the projection of structure patterns and method for producing the masks App 20040202943 - Dettmann, Wolfgang ; et al.	2004-10-14
Set of masks for the projection of structure patterns onto a semiconductor wafer App 20040197677 - Kohle, Roderick ; et al.	2004-10-07
Photolithographic mask and methods for producing a structure and of exposing a wafer in a projection apparatus App 20040038135 - Griesinger, Uwe ; et al.	2004-02-26
Mask with programmed defects and method for the fabrication thereof App 20030134206 - Dettmann, Wolfgang ; et al.	2003-07-17

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