Henley; Francois J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Henley; Francois J..The latest application filed is for "light emitting diode (led) mass-transfer apparatus and method of manufacture".

Company Profile

7.138.104

Henley; Francois J. - Santa Clara CA
Henley; Francois J. - Saratoga CA
HENLEY; Francois J. - Aptos CA
Henley; Francois J. - Los Gatos CA
Henley; Francois J - Aptos CA
Henley; Francois J. - Las Gatos CA
Henley, Francois J. - Los Gaton CA
Henley; Francois J. - San Jose CA
Henley; Francois J. - Mountain View CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Layer transfer of films utilizing controlled shear region Grant 11,444,221 - Henley September 13, 2	2022-09-13
Light emitting diode (LED) mass-transfer apparatus and method of manufacture Grant 11,380,816 - Henley July 5, 2	2022-07-05
Light emitting diode (LED) test apparatus and method of manufacture Grant 11,037,841 - Henley June 15, 2	2021-06-15
Light emitting diode (LED) test apparatus and method of manufacture Grant 10,989,755 - Henley April 27, 2	2021-04-27
Light emitting diode (LED) mass-transfer apparatus and method of manufacture Grant 10,978,429 - Henley April 13, 2	2021-04-13
Light emitting diode (LED) test apparatus and method of manufacture Grant 10,962,586 - Henley March 30, 2	2021-03-30
Light Emitting Diode (led) Mass-transfer Apparatus And Method Of Manufacture App 20200194616 - HENLEY; Francois J.	2020-06-18
Shaped silicon ingot using layer transfer Grant 10,683,588 - Henley	2020-06-16
Light Emitting Diode (led) Test Apparatus And Method Of Manufacture App 20200185283 - HENLEY; Francois J.	2020-06-11
Light emitting diode (LED) test apparatus and method of manufacture Grant 10,600,697 - Henley	2020-03-24
Layer Transfer Of Films Utilizing Controlled Shear Region App 20190326467 - HENLEY; Francois J.	2019-10-24
SEED WAFER FOR GaN THICKENING USING GAS- OR LIQUID-PHASE EPITAXY App 20190288158 - HENLEY; Francois J.	2019-09-19
Bond And Release Layer Transfer Process App 20190103507 - HENLEY; Francois J. ; et al.	2019-04-04
Techniques For Forming Optoelectronic Devices App 20190024259 - HENLEY; Francois J. ; et al.	2019-01-24
Seed wafer for GaN thickening using gas- or liquid-phase epitaxy Grant 10,186,630 - Henley Ja	2019-01-22
Shaped Silicon Ingot Using Layer Transfer App 20190017192 - HENLEY; Francois J.	2019-01-17
Light Emitting Diode (led) Test Apparatus And Method Of Manufacture App 20190004105 - HENLEY; Francois J.	2019-01-03
Light Emitting Diode (led) Mass-transfer Apparatus And Method Of Manufacture App 20180374829 - HENLEY; Francois J.	2018-12-27
Bond and release layer transfer process Grant 10,164,144 - Henley , et al. Dec	2018-12-25
Method and device for slicing a shaped silicon ingot using layer transfer Grant 10,087,551 - Henley October 2, 2	2018-10-02
Light Emitting Diode (led) Test Apparatus And Method Of Manufacture App 20180259570 - HENLEY; Francois J.	2018-09-13
Techniques for forming optoelectronic devices Grant 10,041,187 - Henley , et al. August 7, 2	2018-08-07
Light Emitting Diode (led) Test Apparatus And Method Of Manufacture App 20180174931 - HENLEY; Francois J.	2018-06-21
Micro-light Emitting Diode (led) Fabrication By Layer Transfer App 20180138357 - HENLEY; Francois J.	2018-05-17
Bond And Release Layer Transfer Process App 20180040765 - HENLEY; Francois J. ; et al.	2018-02-08
SEED WAFER FOR GaN THICKENING USING GAS- OR LIQUID-PHASE EPITAXY App 20180040764 - HENLEY; Francois J.	2018-02-08
Removal Of Non-cleaved/non-transferred Material From Donor Substrate App 20180033609 - HENLEY; Francois J.	2018-02-01
Backing Substrate Stabilizing Donor Substrate For Implant Or Reclamation App 20180019169 - HENLEY; Francois J.	2018-01-18
Bond and release layer transfer process Grant 9,859,458 - Henley , et al. January 2, 2	2018-01-02
Techniques For Forming Optoelectronic Devices App 20170358704 - HENLEY; Francois J. ; et al.	2017-12-14
Techniques For Forming Optoelectronic Devices App 20170084778 - HENLEY; Francois J. ; et al.	2017-03-23
Method And Device For Slicing A Shaped Silicon Ingot Using Layer Transfer App 20170002479 - Henley; Francois J.	2017-01-05
Bond And Release Layer Transfer Process App 20160372628 - HENLEY; Francois J. ; et al.	2016-12-22
Apparatus And Method Of Cleaving Thin Layer From Bulk Material App 20160319462 - HENLEY; Francois J.	2016-11-03
Method and device for slicing a shaped silicon ingot using layer transfer Grant 9,460,908 - Henley October 4, 2	2016-10-04
Layer Transfer Of Films Utilizing Controlled Shear Region App 20160247958 - HENLEY; Francois J.	2016-08-25
Apparatus And Method Of Cleaving Thin Layer From Bulk Material App 20160208416 - HENLEY; Francois J.	2016-07-21
Layer transfer of films utilizing controlled shear region Grant 9,362,439 - Henley June 7, 2	2016-06-07
Method of cleaving a thin sapphire layer from a bulk material by implanting a plurality of particles and performing a controlled cleaving process Grant 9,336,989 - Henley May 10, 2	2016-05-10
Techniques For Forming Optoelectronic Devices App 20160111500 - HENLEY; Francois J. ; et al.	2016-04-21
Techniques for forming optoelectronic devices Grant 9,257,339 - Henley , et al. February 9, 2	2016-02-09
Controlled process and resulting device Grant 9,159,605 - Henley , et al. October 13, 2	2015-10-13
Cleaving Thin Layer From Bulk Material And Apparatus Including Cleaved Thin Layer App 20150044447 - HENLEY; Francois J.	2015-02-12
Controlled Process And Resulting Device App 20140370687 - HENLEY; Francois J. ; et al.	2014-12-18
Controlled process and resulting device Grant 8,835,282 - Henley , et al. September 16, 2	2014-09-16
Techniques For Forming Optoelectronic Devices App 20140197419 - HENLEY; Francois J. ; et al.	2014-07-17
Method And Device For Slicing A Shaped Silicon Ingot Using Layer Transfer App 20140106540 - Henley; Francois J.	2014-04-17
Layer transfer of films utilizing thermal flux regime for energy controlled cleaving Grant 8,637,382 - Henley January 28, 2	2014-01-28
Method and device for slicing a shaped silicon ingot using layer transfer Grant 8,623,137 - Henley January 7, 2	2014-01-07
Techniques For Forming Optoelectronic Devices App 20130292691 - Henley; Francois J. ; et al.	2013-11-07
Method and structure for fabricating solar cells using a thick layer transfer process Grant 8,563,402 - Henley October 22, 2	2013-10-22
Apparatus and Method of Cleaving Thin Layer from Bulk Material App 20130209740 - Henley; Francois J.	2013-08-15
Controlled Process And Resulting Device App 20130143389 - HENLEY; FRANCOIS J. ; et al.	2013-06-06
Layer Transfer Of Films Utilizing Thermal Flux Regime For Energy Controlled Cleaving App 20130032582 - HENLEY; FRANCOIS J.	2013-02-07
Race track configuration and method for wafering silicon solar substrates Grant 8,330,126 - Henley , et al. December 11, 2	2012-12-11
Techniques for forming thin films by implantation with reduced channeling Grant 8,329,557 - Brailove , et al. December 11, 2	2012-12-11
Layer transfer of films utilizing controlled propagation Grant 8,293,619 - Henley October 23, 2	2012-10-23
Substrate stiffness method and resulting devices for layer transfer process Grant 8,241,996 - Henley , et al. August 14, 2	2012-08-14
Apparatus and method of temperature control during cleaving processes of thick materials Grant 8,222,119 - Henley July 17, 2	2012-07-17
Method and system for continuous large-area scanning implantation process Grant 8,153,513 - Henley April 10, 2	2012-04-10
Apparatus And Method Of Temperature Control During Cleaving Processes Of Thick Materials App 20120077289 - HENLEY; FRANCOIS J.	2012-03-29
Method for fabricating semiconductor devices using strained silicon bearing material Grant 8,143,165 - Henley March 27, 2	2012-03-27
Free-standing thickness of single crystal material and method having carrier lifetimes Grant 8,133,800 - Henley , et al. March 13, 2	2012-03-13
Method And Structure For Fabricating Solar Cells Using A Thick Layer Transfer Process App 20120058624 - HENLEY; FRANCOIS J.	2012-03-08
Method and structure for thick layer transfer using a linear accelerator Grant 8,124,499 - Henley , et al. February 28, 2	2012-02-28
Method and structure for fabricating solar cells using a thick layer transfer process Grant 8,110,480 - Henley February 7, 2	2012-02-07
Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process Grant 8,071,463 - Henley December 6, 2	2011-12-06
Controlled Process And Resulting Device App 20110294306 - Henley; Francois J. ; et al.	2011-12-01
Method and structure for fabricating solar cells Grant 8,012,851 - Henley , et al. September 6, 2	2011-09-06
Controlled process and resulting device Grant 8,012,852 - Henley , et al. September 6, 2	2011-09-06
Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process Grant 8,012,855 - Henley September 6, 2	2011-09-06
Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process Grant 7,911,016 - Henley March 22, 2	2011-03-22
Method and structure using selected implant angles using a linear accelerator process for manufacture of free standing films of materials Grant 7,910,458 - Henley March 22, 2	2011-03-22
Method and structure for fabricating solar cells using a layer transfer process Grant 7,863,157 - Henley , et al. January 4, 2	2011-01-04
Techniques For Forming Thin Films By Implantation With Reduced Channeling App 20100317140 - BRAILOVE; ADAM ; et al.	2010-12-16
Controlled process and resulting device Grant 7,846,818 - Henley , et al. December 7, 2	2010-12-07
Controlled Process And Resulting Device App 20100282323 - Henley; Francois J. ; et al.	2010-11-11
Method and structure for fabricating solar cells using a thick layer transfer process Grant 7,811,900 - Henley October 12, 2	2010-10-12
Controlled cleaving process Grant 7,781,305 - Henley , et al. August 24, 2	2010-08-24
Controlled process and resulting device Grant 7,776,717 - Henley , et al. August 17, 2	2010-08-17
Method for manufacturing devices on a multi-layered substrate utilizing a stiffening backing substrate Grant 7,772,088 - Henley , et al. August 10, 2	2010-08-10
Method and Structure for Fabricating Solar Cells App 20100180945 - Henley; Francois J. ; et al.	2010-07-22
Method and structure for fabricating solar cells using a layer transfer process Grant 7,759,220 - Henley July 20, 2	2010-07-20
Controlled process and resulting device Grant 7,759,217 - Henley , et al. July 20, 2	2010-07-20
Method and Structure for Fabricating Solar Cells Using a Thick Layer Transfer Process App 20100178723 - Henley; Francois J.	2010-07-15
Method and Structure for Fabricating Multiple Tiled Regions Onto a Plate Using a Controlled Cleaving Process App 20100129951 - Henley; Francois J.	2010-05-27
Method and Structure for Fabricating Multiple Tiled Regions Onto a Plate Using a Controlled Cleaving Process App 20100126587 - Henley; Francois J.	2010-05-27
Method and Structure for Fabricating Multiple Tiled Regions Onto a Plate Using a Controlled Cleaving Process App 20100129950 - Henley; Francois J.	2010-05-27
Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process Grant 7,674,687 - Henley March 9, 2	2010-03-09
Free-standing thickness of single crystal material and method having carrier lifetimes App 20100052105 - Henley; Francois J. ; et al.	2010-03-04
Layer transfer of films utilizing controlled propagation App 20100055874 - Henley; Francois J.	2010-03-04
Race track configuration and method for wafering silicon solar substrates App 20100044595 - Henley; Francois J. ; et al.	2010-02-25
Method and structure for implanting bonded substrates for electrical conductivity Grant 7,629,666 - Henley December 8, 2	2009-12-08
Layer Transfer Of Films Utilizing Controlled Shear Region App 20090277314 - Henley; Francois J.	2009-11-12
Method for fabricating semiconductor devices using strained silicon bearing material App 20090258496 - Henley; Francois J.	2009-10-15
Method and structure for fabricating bonded substrate structures using thermal processing to remove oxygen species Grant 7,598,153 - Henley , et al. October 6, 2	2009-10-06
Method and system for fabricating strained layers for the manufacture of integrated circuits Grant 7,595,499 - Henley , et al. September 29, 2	2009-09-29
Accelerator Particle Beam Apparatus And Method For Low Contaminate Processing App 20090206275 - Henley; Francois J. ; et al.	2009-08-20
Method and structure for implanting bonded substrates for electrical conductivity Grant 7,547,609 - Henley June 16, 2	2009-06-16
Method and device for controlled cleaving process App 20090093103 - Henley; Francois J. ; et al.	2009-04-09
Method And Structure Using Selected Implant Angles Using A Linear Accelerator Process For Manufacture Of Free Standing Films Of Materials App 20090042369 - Henley; Francois J.	2009-02-12
Method and apparatus for flag-less water bonding tool Grant 7,479,441 - Kirk , et al. January 20, 2	2009-01-20
Method and structure for implanting bonded substrates for electrical conductivity App 20090001500 - Henley; Francois J.	2009-01-01
Method and device for controlled cleaving process Grant 7,470,600 - Henley , et al. December 30, 2	2008-12-30
Method for fabricating semiconductor devices using strained silicon bearing material Grant 7,462,526 - Henley December 9, 2	2008-12-09
Controlled process and resulting device App 20080286945 - Henley; Francois J. ; et al.	2008-11-20
Manufacturing strained silicon substrates using a backing material Grant 7,427,554 - Henley , et al. September 23, 2	2008-09-23
Cleaving process to fabricate multilayered substrates using low implantation doses App 20080206963 - Henley; Francois J. ; et al.	2008-08-28
Method And Structure For Thick Layer Transfer Using A Linear Accelerator App 20080206962 - Henley; Francois J. ; et al.	2008-08-28
Controlled process and resulting device Grant 7,410,887 - Henley , et al. August 12, 2	2008-08-12
Apparatus And Method Of Temperature Conrol During Cleaving Processes Of Thick Film Materials App 20080188011 - Henley; Francois J.	2008-08-07
Method And Structure For Fabricating Solar Cells Using A Thick Layer Transfer Process App 20080179547 - Henley; Francois J.	2008-07-31
Controlled cleaving process App 20080182386 - Henley; Francois J. ; et al.	2008-07-31
Method and structure for implanting bonded substrates for electrical conductivity Grant 7,399,680 - Henley July 15, 2	2008-07-15
Method and structure for fabricating solar cells using a layer transfer process App 20080160661 - Henley; Francois J.	2008-07-03
Method for fabricating semiconductor devices using strained silicon bearing material App 20080153220 - Henley; Francois J.	2008-06-26
System for forming a strained layer of semiconductor material Grant 7,391,047 - Henley , et al. June 24, 2	2008-06-24
Method and system for lattice space engineering Grant 7,390,724 - Henley , et al. June 24, 2	2008-06-24
Method and system for fabricating strained layers for the manufacture of integrated circuits App 20080141510 - Henley; Francois J. ; et al.	2008-06-19
Apparatus And Method For Introducing Particles Using A Radio Frequency Quadrupole Linear Accelerator For Semiconductor Materials App 20080128641 - Henley; Francois J. ; et al.	2008-06-05
Cleaving process to fabricate multilayered substrates using low implantation doses Grant 7,378,330 - Henley , et al. May 27, 2	2008-05-27
Controlled cleaving process Grant 7,371,660 - Henley , et al. May 13, 2	2008-05-13
Method for fabricating semiconductor devices using strained silicon bearing material Grant 7,354,815 - Henley April 8, 2	2008-04-08
Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process Grant 7,351,644 - Henley April 1, 2	2008-04-01
Method and device for controlled cleaving process Grant 7,348,258 - Henley , et al. March 25, 2	2008-03-25
Method and Device for Controlled Cleaving Process App 20080057675 - Henley; Francois J. ; et al.	2008-03-06
Controlled Process and Resulting Device App 20080038901 - Henley; Francois J. ; et al.	2008-02-14
Method And System For Continuous Large-area Scanning Implantation Process App 20080038908 - Henley; Francois J.	2008-02-14
Method And Structure For Fabricating Solar Cells Using A Layer Transfer Process App 20070235074 - Henley; Francois J. ; et al.	2007-10-11
Method and structure for fabricating bonded substrate structures using thermal processing to remove oxygen species App 20070232022 - Henley; Francois J. ; et al.	2007-10-04
Controlled Process And Resulting Device App 20070122997 - HENLEY; FRANCOIS J. ; et al.	2007-05-31
Controlled Process And Resulting Device App 20070123013 - HENLEY; FRANCOIS J. ; et al.	2007-05-31
Controlled Process And Resulting Device App 20070122995 - HENLEY; FRANCOIS J. ; et al.	2007-05-31
Method and apparatus for flag-less water bonding tool App 20070087531 - Kirk; Harry R. ; et al.	2007-04-19
Manufacturing strained silicon substrates using a backing material App 20070037323 - Henley; Francois J. ; et al.	2007-02-15
Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process App 20070032084 - Henley; Francois J.	2007-02-08
Method and structure for fabricating devices using one or more films provided by a layer transfer process and etch back App 20070032044 - Henley; Francois J.	2007-02-08
Pre-made cleavable substrate method and structure of fabricating devices using one or more films provided by a layer transfer process App 20070029043 - Henley; Francois J.	2007-02-08
Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process App 20070026638 - Henley; Francois J.	2007-02-01
Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process Grant 7,166,520 - Henley January 23, 2	2007-01-23
Controlled cleaving process Grant 7,160,790 - Henley , et al. January 9, 2	2007-01-09
Method and system for source switching and in-situ plasma bonding App 20060240645 - Henley; Francois J.	2006-10-26
Substrate stiffness method and resulting devices for layer transfer process App 20060211219 - Henley; Francois J. ; et al.	2006-09-21
Applications and equipment of substrate stiffness method and resulting devices for layer transfer processes on quartz or glass App 20060205180 - Henley; Francois J. ; et al.	2006-09-14
Method and system for fabricating strained layers for the manufacture of integrated circuits Grant 7,094,666 - Henley , et al. August 22, 2	2006-08-22
Cleaving process to fabricate multilayered substrates using low implantation doses App 20060166472 - Henley; Francois J. ; et al.	2006-07-27
Method and system for fabricating strained layers for the manufacture of integrated circuits App 20060160329 - Henley; Francois J. ; et al.	2006-07-20
Method and system for source switching and in-situ plasma bonding Grant 7,078,317 - Henley July 18, 2	2006-07-18
Controlled cleaving process App 20060141747 - Henley; Francois J. ; et al.	2006-06-29
Method and structure for implanting bonded substrates for electrical conductivity App 20060138583 - Henley; Francois J.	2006-06-29
Method and structure for implanting bonded substrates for electrical conductivity App 20060131687 - Henley; Francois J.	2006-06-22
Cleaving process to fabricate multilayered substrates using low implantation doses Grant 7,056,808 - Henley , et al. June 6, 2	2006-06-06
Method and system for source switching and in-situ plasma bonding App 20060030167 - Henley; Francois J.	2006-02-09
Method and system for fabricating strained layers for the manufacture of integrated circuits App 20060024917 - Henley; Francois J. ; et al.	2006-02-02
Method for smoothing a film of material using a ring structure App 20050247668 - Malik, Igor J. ; et al.	2005-11-10
Method and system for lattice space engineering App 20050233545 - Henley, Francois J. ; et al.	2005-10-20
Method for fabricating semiconductor devices using strained silicon bearing material App 20050227425 - Henley, Francois J.	2005-10-13
Controlled cleaving process App 20050186758 - Henley, Francois J. ; et al.	2005-08-25
Method for fabricating semiconductor devices using strained silicon bearing material App 20050118754 - Henley, Francois J.	2005-06-02
Gettering technique for wafers made using a controlled cleaving process Grant 6,890,838 - Henley , et al. May 10, 2	2005-05-10
Method and device for controlled cleaving process App 20050070071 - Henley, Francois J. ; et al.	2005-03-31
Method and device for controlled cleaving process Grant 6,790,747 - Henley , et al. September 14, 2	2004-09-14
Gettering technique for wafers made using a controlled cleaving process App 20040097055 - Henley, Francois J. ; et al.	2004-05-20
Controlled cleaving process Grant 6,632,724 - Henley , et al. October 14, 2	2003-10-14
Cleaving process to fabricate multilayered substrates using low implantation doses App 20030124815 - Henley, Francois J. ; et al.	2003-07-03
Controlled cleavage process using pressurized fluid Grant 6,582,999 - Henley , et al. June 24, 2	2003-06-24
Method and device for controlled cleaving process App 20030113983 - Henley, Francois J. ; et al.	2003-06-19
Silicon-on-silicon hybrid wafer assembly Grant 6,558,802 - Henley , et al. May 6, 2	2003-05-06
Gettering technique for wafers made using a controlled cleaving process Grant 6,548,382 - Henley , et al. April 15, 2	2003-04-15
Controlled cleavage process and device for patterned films Grant 6,528,391 - Henley , et al. March 4, 2	2003-03-04
Controlled cleavage process using pressurized fluid Grant 6,511,899 - Henley , et al. January 28, 2	2003-01-28
Cleaving process to fabricate multilayered substrates using low implantation doses Grant 6,500,732 - Henley , et al. December 31, 2	2002-12-31
Method and device for controlled cleaving process Grant 6,486,041 - Henley , et al. November 26, 2	2002-11-26
Controlled cleavage process and resulting device using beta annealing Grant 6,458,672 - Henley , et al. October 1, 2	2002-10-01
High temperature implant apparatus Grant 6,458,723 - Henley , et al. October 1, 2	2002-10-01
Method and apparatus for testing LCD panel array prior to shorting bar removal Grant RE37,847 - Henley , et al. September 17, 2	2002-09-17
Method and system for generating a plurality of donor wafers and handle wafers prior to an order being placed by a customer Grant 6,448,152 - Henley , et al. September 10, 2	2002-09-10
Controlled Cleavage Process Using Pressurized Fluid App 20020115264 - Henley, Francois J. ; et al.	2002-08-22
Controlled Cleaving Process App 20020106870 - Henley, Francois J. ; et al.	2002-08-08
Clustertool system software using plasma immersion ion implantation App 20020098713 - Henley, Francois J. ; et al.	2002-07-25
Method and resulting device for manufacturing for double gated transistors App 20020090758 - Henley, Francois J. ; et al.	2002-07-11
Generic layer transfer methodology by controlled cleavage process App 20020081823 - Cheung, Nathan W. ; et al.	2002-06-27
Generic layer transfer methodology by controlled cleavage process Grant 6,391,740 - Cheung , et al. May 21, 2	2002-05-21
Controlled cleavage using patterning App 20020056519 - Henley, Francois J. ; et al.	2002-05-16
Controlled cleavage process using pressurized fluid App 20020055266 - Henley, Francois J. ; et al.	2002-05-09
Controlled cleavage thin film separation process using a reusable substrate Grant 6,335,264 - Henley , et al. January 1, 2	2002-01-01
Clustertool system software using plasma immersion ion implantation Grant 6,321,134 - Henley , et al. November 20, 2	2001-11-20
Method and device for controlled cleaving process App 20010026997 - Henley, Francois J. ; et al.	2001-10-04
Method and device for controlled cleaving process Grant 6,291,313 - Henley , et al. September 18, 2	2001-09-18
Controlled cleavage process using patterning Grant 6,290,804 - Henley , et al. September 18, 2	2001-09-18
Controlled cleavage process and device for patterned films using a release layer Grant 6,291,314 - Henley , et al. September 18, 2	2001-09-18
Method and device for controlled cleaving process Grant 6,284,631 - Henley , et al. September 4, 2	2001-09-04
Wafer edge engineering method and device Grant 6,265,328 - Henley , et al. July 24, 2	2001-07-24
Pre-semiconductor process implant and post-process film separation App 20010007790 - Henley, Francois J. ; et al.	2001-07-12
Controlled cleavage process and device for patterned films using patterned implants Grant 6,248,649 - Henley , et al. June 19, 2	2001-06-19
Economical silicon-on-silicon hybrid wafer assembly Grant 6,245,161 - Henley , et al. June 12, 2	2001-06-12
Cluster tool apparatus using plasma immersion ion implantation Grant 6,207,005 - Henley , et al. March 27, 2	2001-03-27
Device for patterned films Grant 6,187,110 - Henley , et al. February 13, 2	2001-02-13
Pre-semiconductor process implant and post-process film separation Grant 6,184,111 - Henley , et al. February 6, 2	2001-02-06
Controlled cleavage process and resulting device using beta annealing Grant 6,162,705 - Henley , et al. December 19, 2	2000-12-19
Controlled cleavage thin film separation process using a reusable substrate Grant 6,159,825 - Henley , et al. December 12, 2	2000-12-12
Silicon-on-silicon wafer bonding process using a thin film blister-separation method Grant 6,159,824 - Henley , et al. December 12, 2	2000-12-12
Controlled cleavage system using pressurized fluid Grant 6,155,909 - Henley , et al. December 5, 2	2000-12-05
Cluster tool method using plasma immersion ion implantation Grant 6,153,524 - Henley , et al. November 28, 2	2000-11-28
Pressurized microbubble thin film separation process using a reusable substrate Grant 6,146,979 - Henley , et al. November 14, 2	2000-11-14
Planarizing technique for multilayered substrates Grant 6,103,599 - Henley , et al. August 15, 2	2000-08-15
Gettering technique for silicon-on-insulator wafers Grant 6,083,324 - Henley , et al. July 4, 2	2000-07-04
Silicon-on-silicon hybrid wafer assembly Grant 6,048,411 - Henley , et al. April 11, 2	2000-04-11
Method for controlled cleaving process Grant 6,033,974 - Henley , et al. March 7, 2	2000-03-07
Controlled cleavage process using pressurized fluid Grant 6,013,567 - Henley , et al. January 11, 2	2000-01-11
Controlled cleaning process Grant 6,013,563 - Henley , et al. January 11, 2	2000-01-11
Reusable substrate for thin film separation Grant 6,010,579 - Henley , et al. January 4, 2	2000-01-04
Controlled cleavage process using pressurized fluid Grant 5,994,207 - Henley , et al. November 30, 1	1999-11-30
Controlled cleavage process and device for patterned films Grant 5,985,742 - Henley , et al. November 16, 1	1999-11-16
Large area defect monitor tool for manufacture of clean surfaces Grant 5,801,824 - Henley September 1, 1	1998-09-01
Technique for determining defect positions in three dimensions in a transparent structure Grant 5,790,247 - Henley , et al. August 4, 1	1998-08-04
Large area defect monitor tool for manufacture of clean surfaces Grant 5,631,733 - Henley May 20, 1	1997-05-20
Electro-optical element and its manufacturing method Grant 5,615,039 - Henley March 25, 1	1997-03-25
Method for testing an electronic device using voltage imaging Grant 5,570,011 - Henley October 29, 1	1996-10-29
Testing apparatus and connector for liquid crystal display substrates Grant 5,543,729 - Henley August 6, 1	1996-08-06
Testing method for imaging defects in a liquid crystal display substrate Grant 5,504,438 - Henley April 2, 1	1996-04-02
Method and apparatus for automatically inspecting and repairing an active matrix LCD panel Grant 5,459,410 - Henley October 17, 1	1995-10-17
Method of testing active matrix liquid crystal display substrates Grant 5,432,461 - Henley July 11, 1	1995-07-11
Instrument for testing liquid crystal display base plates Grant 5,406,213 - Henley April 11, 1	1995-04-11
Method and apparatus for positioning and biasing an electro-optic modulator of an electro-optic imaging system Grant 5,387,788 - Miller , et al. * February 7, 1	1995-02-07
Method and apparatus for automatically inspecting and repairing an active matrix LCD panel Grant 5,235,272 - Henley August 10, 1	1993-08-10
Method and apparatus for automatically inspecting and repairing a simple matrix circuit panel Grant 5,175,504 - Henley December 29, 1	1992-12-29
Capacitance imaging system using electro-optics Grant 5,170,127 - Henley December 8, 1	1992-12-08
Laser-based system for material deposition and removal Grant 5,164,565 - Addiego , et al. November 17, 1	1992-11-17
Method and apparatus for electro-optically measuring a voltage signal Grant 5,157,327 - Henley October 20, 1	1992-10-20
Voltage imaging system using electro-optics Grant 5,124,635 - Henley June 23, 1	1992-06-23
Electro-optic sampling system clock and stimulus pattern generator Grant 5,095,262 - Henley , et al. March 10, 1	1992-03-10
Method and apparatus for testing LCD panel array prior to shorting bar removal Grant 5,081,687 - Henley , et al. January 14, 1	1992-01-14
Method and apparatus for testing LCD panel array using a magnetic field sensor Grant 5,073,754 - Henley December 17, 1	1991-12-17
Voltage imaging system using electro-optics Grant 4,983,911 - Henley January 8, 1	1991-01-08
High frequency test head using electro-optics Grant 4,862,075 - Choi , et al. August 29, 1	1989-08-29
Test system for VLSI digital circuit and method of testing Grant 4,588,950 - Henley May 13, 1	1986-05-13