HENKE; Wolfgang Helmut

Patent Applications and Registrations

Patent applications and USPTO patent grants for HENKE; Wolfgang Helmut.The latest application filed is for "device manufacturing method".

Company Profile

4.5.5

HENKE; Wolfgang Helmut - Kempen DE
HENKE; Wolfgang Helmut - Kempers DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Device Manufacturing Method App 20220276570 - RAHMAN; Rizvi ; et al.	2022-09-01
System and method for measurement of alignment Grant 11,249,404 - Schmitt-Weaver , et al. February 15, 2	2022-02-15
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method Grant 11,150,565 - Queens , et al. October 19, 2	2021-10-19
Method and apparatus to correct for patterning process error Grant 10,915,689 - Ten Berge , et al. February 9, 2	2021-02-09
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method Grant 10,845,719 - Queens , et al. November 24, 2	2020-11-24
System and Method for Measurement of Alignment App 20200133144 - SCHMITT-WEAVER; Emil Peter ; et al.	2020-04-30
Methods For Controlling Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20190384188 - QUEENS; Rene Marinus Gerardus Johan ; et al.	2019-12-19
Method of sequencing lots for a lithographic apparatus Grant 10,281,825 - Kupers , et al.	2019-05-07
Method Of Sequencing Lots For A Lithographic Apparatus App 20190072857 - KUPERS; Michiel ; et al.	2019-03-07
Method And Apparatus To Correct For Patterning Process Error App 20180307135 - TEN BERGE; Peter ; et al.	2018-10-25

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