Henke; Wolfgang

Patent Applications and Registrations

Patent applications and USPTO patent grants for Henke; Wolfgang.The latest application filed is for "lithographic apparatus with data processing apparatus".

Company Profile

0.9.11

Henke; Wolfgang - Kempen DE
Henke; Wolfgang - Veldhoven NL
Henke; Wolfgang - Radebeul DE
Henke; Wolfgang - Dresden DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic apparatus with data processing apparatus Grant 10,078,273 - Schmitt-Weaver , et al. September 18, 2	2018-09-18
Lithography system and a machine learning controller for such a lithography system Grant 9,971,251 - Schmitt-Weaver , et al. May 15, 2	2018-05-15
Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product Grant 9,715,181 - Schmitt-Weaver , et al. July 25, 2	2017-07-25
Lithographic Apparatus With Data Processing Apparatus App 20160370711 - SCHMITT-WEAVER; Emil Peter ; et al.	2016-12-22
Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product Grant 9,507,279 - Schmitt-Weaver , et al. November 29, 2	2016-11-29
Lithography System And A Machine Learning Controller For Such A Lithography System App 20160170311 - SCHMITT-WEAVER; Emil Peter ; et al.	2016-06-16
Method of Operating a Lithographic Apparatus, Device Manufacturing Method and Associated Data Processing Apparatus and Computer Program Product App 20140168627 - SCHMITT-WEAVER; Emil Peter ; et al.	2014-06-19
Method Of Calibrating A Lithographic Apparatus, Device Manufacturing Method And Associated Data Processing Apparatus And Computer Program Product App 20140168620 - SCHMITT-WEAVER; Emil Peter ; et al.	2014-06-19
Alignment calculation Grant 8,440,475 - Habets , et al. May 14, 2	2013-05-14
Method of producing an integrated circuit having a capacitor with a supporting layer Grant 7,727,837 - Gruening-von Schwerin , et al. June 1, 2	2010-06-01
Alignment Calculation App 20100030360 - Habets; Boris ; et al.	2010-02-04
Method for producing a phase mask Grant 7,462,426 - Henke , et al. December 9, 2	2008-12-09
Mask Structure for Manufacturing an Integrated Circuit by Photolithographic Patterning App 20080204686 - Henke; Wolfgang ; et al.	2008-08-28
Method Of Producing An Integrated Circuit Having A Capacitor App 20080182378 - Gruening-von Schwerin; Ulrike ; et al.	2008-07-31
Method for producing a phase mask App 20050196683 - Henke, Wolfgang ; et al.	2005-09-08
Method for the characterization of an illumination source in an exposure apparatus App 20040027553 - Henke, Wolfgang ; et al.	2004-02-12
Photomask, method of lithographically structuring a photoresist layer with the photomask, and method of producing magnetic memory elements Grant 6,620,559 - Czech , et al. September 16, 2	2003-09-16
Photomask, method of lithographically structuring a photoresist layer with the photomask, and method of producing magnetic memory elements App 20020039691 - Czech, Gunther ; et al.	2002-04-04

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