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Patent applications and USPTO patent grants for Henke; Axel.The latest application filed is for "nvm device in soi technology and method of fabricating an according device".
Patent | Date |
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NVM device in SOI technology and method of fabricating an according device Grant 10,084,057 - Beyer , et al. September 25, 2 | 2018-09-25 |
Nvm Device In Soi Technology And Method Of Fabricating An According Device App 20180053832 - Beyer; Sven ;   et al. | 2018-02-22 |
Method and device for depositing a protective layer during an etching procedure App 20070232070 - Wege; Stephan ;   et al. | 2007-10-04 |
Method for etching high-aspect-ratio features Grant 6,897,155 - Kumar , et al. May 24, 2 | 2005-05-24 |
Method for etching high-aspect-ratio features App 20040033697 - Kumar, Ajay ;   et al. | 2004-02-19 |
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