Hendrickson; Scott A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hendrickson; Scott A..The latest application filed is for "method and hardware for cleaning uv chambers".

Company Profile

1.13.23

Hendrickson; Scott A. - Brentwood CA
Hendrickson; Scott A - Brentwood CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus and method for UV treatment, chemical treatment, and deposition Grant 10,570,517 - Bansal , et al. Feb	2020-02-25
Method and hardware for cleaning UV chambers Grant 9,506,145 - Baluja , et al. November 29, 2	2016-11-29
Method And Hardware For Cleaning Uv Chambers App 20160296981 - BALUJA; Sanjeev ; et al.	2016-10-13
Apparatus And Method For Uv Treatment, Chemical Treatment, And Deposition App 20160289838 - BANSAL; Amit ; et al.	2016-10-06
Method and hardware for cleaning UV chambers Grant 9,364,871 - Baluja , et al. June 14, 2	2016-06-14
Microwave excursion detection for semiconductor processing Grant 8,841,629 - Hendrickson , et al. September 23, 2	2014-09-23
Light Irradiance And Thermal Measurement In Uv And Cvd Chambers App 20140264059 - BALUJA; Sanjeev ; et al.	2014-09-18
Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric film Grant 8,753,449 - Chhabra , et al. June 17, 2	2014-06-17
Method And Hardware For Cleaning Uv Chambers App 20140053866 - BALUJA; Sanjeev ; et al.	2014-02-27
Method for UV based silylation chamber clean Grant 8,657,961 - Xie , et al. February 25, 2	2014-02-25
Microwave Excursion Detection For Semiconductor Processing App 20140000515 - HENDRICKSON; SCOTT A. ; et al.	2014-01-02
Enhancement In Uv Curing Efficiency Using Oxygen-doped Purge For Ultra Low-k Dielectric Film App 20130344704 - CHHABRA; Mahendra ; et al.	2013-12-26
Method For Uv Based Silylation Chamber Clean App 20130284204 - XIE; BO ; et al.	2013-10-31
Dual-bulb Lamphead Control Methodology App 20130122611 - YANG; YAO-HUNG ; et al.	2013-05-16
Silicon dioxide layer deposited with BDEAS Grant 8,343,881 - Lee , et al. January 1, 2	2013-01-01
Apparatus And Method For Uv Treatment, Chemical Treatment, And Deposition App 20120258259 - Bansal; Amit ; et al.	2012-10-11
Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation Grant 8,203,126 - Rocha-Alvarez , et al. June 19, 2	2012-06-19
Dual Delivery Chamber Design App 20120097330 - Iyengar; Prahallad ; et al.	2012-04-26
Silicon Dioxide Layer Deposited With Bdeas App 20110298099 - LEE; Yong-Won ; et al.	2011-12-08
Apparatus And Method For Exposing A Substrate To A Rotating Irradiance Pattern Of Uv Radiation App 20100285240 - Rocha-Alvarez; Juan Carlos ; et al.	2010-11-11
Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation Grant 7,777,198 - Rocha-Alvarez , et al. August 17, 2	2010-08-17
Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors Grant 7,692,171 - Kaszuba , et al. April 6, 2	2010-04-06
High efficiency UV curing system Grant 7,663,121 - Nowak , et al. February 16, 2	2010-02-16
Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors Grant 7,566,891 - Rocha-Alvarez , et al. July 28, 2	2009-07-28
High Efficiency Uv Curing System App 20090162259 - Nowak; Thomas ; et al.	2009-06-25
Apparatus And Method For Exposing A Substrate To Uv Radiation Using Asymmetric Reflectors App 20080067425 - Kaszuba; Andrzei ; et al.	2008-03-20
Ozone Abatement In A Re-circulating Cooling System App 20070298167 - HO; DUSTIN W. ; et al.	2007-12-27
Nitrogen Enriched Cooling Air Module For Uv Curing System App 20070295012 - Ho; Dustin W. ; et al.	2007-12-27
Apparatus And Method For Exposing A Substrate To A Rotating Irradiance Pattern Of Uv Radiation App 20070286963 - Rocha-Alvarez; Juan Carlos ; et al.	2007-12-13
Apparatus And Method For Treating A Substrate With Uv Radiation Using Primary And Secondary Reflectors App 20070257205 - Rocha-Alvarez; Juan Carlos ; et al.	2007-11-08
High efficiency UV curing system App 20060249175 - Nowak; Thomas ; et al.	2006-11-09
High Efficiency Uv Curing System App 20060249078 - Nowak; Thomas ; et al.	2006-11-09
Tandem Uv Chamber For Curing Dielectric Materials App 20060251827 - Nowak; Thomas ; et al.	2006-11-09

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