Hempenius; Peter Paul
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hempenius; Peter Paul.The latest application filed is for "e-beam apparatus".
- Hempenius; Peter Paul - Nuenen NL
- Hempenius; Peter Paul - Veldhoven NL
| Patent | Date |
|---|---|
| E-beam apparatus Grant 11,315,752 - Hempenius , et al. April 26, 2 | 2022-04-26 |
| Electron beam inspection apparatus stage positioning Grant 11,302,512 - Baggen , et al. April 12, 2 | 2022-04-12 |
| E-beam Apparatus App 20210151282 - HEMPENIUS; Peter Paul ; et al. | 2021-05-20 |
| E-beam apparatus Grant 10,867,770 - Hempenius , et al. December 15, 2 | 2020-12-15 |
| Substrate Positioning Device And Electron Beam Inspection Tool App 20200373118 - BAGGEN; Marcel Koenraad Marie ; et al. | 2020-11-26 |
| Stage system and metrology tool Grant 10,809,634 - Hempenius , et al. October 20, 2 | 2020-10-20 |
| Electron Beam Inspection Tool And Method For Positioning An Object Table App 20200303158 - Bosch; Niels Johannes Maria ; et al. | 2020-09-24 |
| Charged Particle Beam Apparatus, And Systems And Methods For Operating The Apparatus App 20200286707 - MAASSEN; Martinus Gerardus, Maria, Johannes ; et al. | 2020-09-10 |
| Electron Beam Inspection Apparatus Stage Positioning App 20200203118 - BAGGEN; Marcel Koenraad Marie ; et al. | 2020-06-25 |
| Stage Apparatus Suitable For Electron Beam Inspection Apparatus App 20200194222 - VAN DE RIJDT; Johannes Hubertus Antonius ; et al. | 2020-06-18 |
| E-beam Apparatus App 20190341224 - HEMPENIUS; Peter Paul ; et al. | 2019-11-07 |
| Lithographic apparatus, object positioning system and device manufacturing method Grant 10,191,396 - De Wit , et al. Ja | 2019-01-29 |
| Stage System and Metrology Tool App 20180267410 - HEMPENIUS; Peter Paul ; et al. | 2018-09-20 |
| Lithographic Apparatus, Object Positioning System And Device Manufacturing Method App 20180149986 - DE WIT; Paul Corne Henri ; et al. | 2018-05-31 |
| System for positioning an object in lithography Grant 9,946,172 - Hempenius , et al. April 17, 2 | 2018-04-17 |
| System For Positioning An Object In Lithography App 20160377996 - HEMPENIUS; Peter Paul ; et al. | 2016-12-29 |
| Lithographic apparatus with actuator to compensate acoustic vibration Grant 9,378,722 - Butler , et al. June 28, 2 | 2016-06-28 |
| Lithographic apparatus having a chuck with a visco-elastic damping layer Grant 8,928,860 - Hempenius , et al. January 6, 2 | 2015-01-06 |
| Lithographic apparatus, method and device manufacturing method Grant 8,310,651 - Hempenius , et al. November 13, 2 | 2012-11-13 |
| Lithographic apparatus and device manufacturing method Grant 7,969,550 - Geerke , et al. June 28, 2 | 2011-06-28 |
| Stage system and lithographic apparatus comprising such a stage system Grant 7,742,149 - De Vos , et al. June 22, 2 | 2010-06-22 |
| Lithographic Apparatus Having A Chuck With A Visco-elastic Damping Layer App 20090231567 - HEMPENIUS; Peter Paul ; et al. | 2009-09-17 |
| Lithographic Apparatus, Method and Device Manufacturing Method App 20090195760 - HEMPENIUS; Peter Paul ; et al. | 2009-08-06 |
| Lithographic Apparatus App 20090195763 - Butler; Hans ; et al. | 2009-08-06 |
| Stage system and lithographic apparatus comprising such a stage system App 20080309911 - Maria De Vos; Youssef Karel ; et al. | 2008-12-18 |
| Lithographic apparatus and device manufacturing method App 20080259299 - Geerke; Johan Hendrik ; et al. | 2008-10-23 |
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