| Patent | Date |
|---|
Dichlorosilane compensating control strategy for improved polycrystalline silicon growth
Grant 10,851,459 - Bucci , et al. December 1, 2 | 2020-12-01 |
Polysilicon chip reclamation assembly and method of reclaiming polysilicon chips from a polysilicon cleaning apparatus
Grant 10,431,447 - Giardina , et al. O | 2019-10-01 |
Method of determining a concentration of a material not dissolved by silicon etchants contaminating a product
Grant 10,345,211 - Hadd , et al. July 9, 2 | 2019-07-09 |
Susceptor arrangement for a reactor and method of heating a process gas for a reactor
Grant 10,266,414 - Zalar | 2019-04-23 |
Heat exchanger
Grant 10,267,574 - Oliva , et al. | 2019-04-23 |
Tapered fluidized bed reactor and process for its use
Grant 10,105,669 - Bucci , et al. October 23, 2 | 2018-10-23 |
Polysilicon Chip Reclamation Assembly And Method Of Reclaiming Polysilicon Chips From A Polysilicon Cleaning Apparatus
App 20180226243 - Giardina; Jason L. ; et al. | 2018-08-09 |
Surface conditioning of conveyor materials or contact surfaces
Grant 10,005,614 - Berrie , et al. June 26, 2 | 2018-06-26 |
Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
Grant 9,909,231 - Arvidson , et al. March 6, 2 | 2018-03-06 |
Method Of Determining A Concentration Of A Material Not Dissolved By Silicon Etchants Contaminating A Product
App 20170276582 - Hadd; John W. ; et al. | 2017-09-28 |
Low Impurity Detection Method For Characterizing Metals Within A Surface And Sub-surface Of Polycrystalline Silicon
App 20170269004 - Fournier; Adam ; et al. | 2017-09-21 |
Surface Conditioning Of Conveyor Materials Or Contact Surfaces
App 20170246641 - Berrie; Jonathan Patrick ; et al. | 2017-08-31 |
Method of repairing and/or protecting a surface in a reactor
Grant 9,687,876 - Werner June 27, 2 | 2017-06-27 |
Dichlorosilane Compensating Control Strategy For Improved Polycrystalline Silicon Growth
App 20170058403 - Bucci; John Victor ; et al. | 2017-03-02 |
Susceptor Arrangement For A Reactor And Method Of Heating A Process Gas For A Reactor
App 20160374144 - Zalar; Michael Matthew | 2016-12-22 |
Method For Determining A Concentration Of Metal Impurities Contaminating A Silicon Product
App 20160320275 - Kreszowski; Douglas H. ; et al. | 2016-11-03 |
Heat Exchanger
App 20160131443 - Oliva; John C. ; et al. | 2016-05-12 |
Applying edge-on photoluminescence to measure bulk impurities of semiconductor materials
Grant 9,261,464 - Kreszowski , et al. February 16, 2 | 2016-02-16 |
Induction Heating Apparatus
App 20160037586 - Armstrong; Timothy ; et al. | 2016-02-04 |
Methods Of Forming And Analyzing Doped Silicon
App 20150284873 - Kreszowski; Douglas Homer ; et al. | 2015-10-08 |
Manufacturing Apparatus For Depositing A Material And A Socket For Use Therein
App 20150232987 - Deeg; Matthew ; et al. | 2015-08-20 |
Taper Fluidized Bed Reactor And Process For Its Use
App 20150217252 - Bucci; John V. ; et al. | 2015-08-06 |
Solids processing valve
Grant 9,079,145 - Baranowski , et al. July 14, 2 | 2015-07-14 |
Manufacturing apparatus for depositing a material and an electrode for use therein
Grant 8,951,352 - Hillabrand , et al. February 10, 2 | 2015-02-10 |
Method Of Repairing And/or Protecting A Surface In A Reactor
App 20150017335 - Werner; Brad Jason | 2015-01-15 |
Electrode For Use With A Manufacturing Apparatus For Depositing A Material
App 20140353290 - Dehtiar; Max ; et al. | 2014-12-04 |
Electrode For Use With Manufacturing Apparatus
App 20140353147 - Hillabrand; David ; et al. | 2014-12-04 |
Solids Processing Valve
App 20140348712 - Baranowski; Don ; et al. | 2014-11-27 |
Method of determining an amount of impurities that a contaminating material contributes to high purity silicon
Grant 8,895,324 - DePesa , et al. November 25, 2 | 2014-11-25 |
Method Of Controlling The Crystallinity Of A Silicon Powder
App 20140225030 - Dehtiar; Max ; et al. | 2014-08-14 |
Manufacturing apparatus for depositing a material and an electrode for use therein
Grant 8,784,565 - Hillabrand , et al. July 22, 2 | 2014-07-22 |
Manufacturing Apparatus For Depositing A Material On A Carrier Body
App 20140165909 - Anderson; Michael L. ; et al. | 2014-06-19 |
Silicon production with a fluidized bed reactor integrated into a Siemens-type process
Grant 8,609,058 - Arvidson , et al. December 17, 2 | 2013-12-17 |
Applying Edge-on Photoluminescence To Measure Bulk Impurities Of Semiconductor Materials
App 20130075627 - Kreszowski; Doug ; et al. | 2013-03-28 |
Quantitative Measurement Of Gas Phase Process Intermediates Using Raman Spectroscopy
App 20120070362 - Harms; Greg ; et al. | 2012-03-22 |
Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
Grant 8,021,483 - Arvidson , et al. September 20, 2 | 2011-09-20 |
Silicon production with a fluidized bed reactor integrated into a siemens-type process
Grant 7,935,327 - Arvidson , et al. May 3, 2 | 2011-05-03 |
Silicon production with a fluidized bed reactor utilizing tetrachlorosilane to reduce wall deposition
Grant 7,927,984 - Molnar April 19, 2 | 2011-04-19 |
Silicon Production with a Fluidized Bed Reactor Utilizing Tetrachlorosilane to Reduce Wall Deposition
App 20100112744 - Molnar; Michael John | 2010-05-06 |
Method and apparatus for improving silicon processing efficiency
Grant 7,080,742 - Arvidson , et al. July 25, 2 | 2006-07-25 |
Method of stacking polycrystalline silicon in process for single crystal production
Grant 6,605,149 - Arvidson August 12, 2 | 2003-08-12 |
Chlorosilane and hydrogen reactor
Grant 5,906,799 - Burgie , et al. May 25, 1 | 1999-05-25 |
Method for analyzing irregular shaped chunked silicon for contaminates
Grant 5,361,128 - Bourbina , et al. November 1, 1 | 1994-11-01 |
Separation by atomization of by-product stream into particulate silicon and silanes
Grant 5,118,486 - Burgie , et al. June 2, 1 | 1992-06-02 |
Recovery of lower-boiling silanes in a CVD process
Grant 5,118,485 - Arvidson , et al. June 2, 1 | 1992-06-02 |
Cleaning of CVD reactor used in the production of polycrystalline silicon by impacting with carbon dioxide pellets
Grant 5,108,512 - Goffnett , et al. April 28, 1 | 1992-04-28 |
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