Hemker; David

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hemker; David.The latest application filed is for "system and method for automating user interaction for semiconductor manufacturing equipment".

Company Profile

1.24.23

Hemker; David - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System and method for automating user interaction for semiconductor manufacturing equipment Grant 10,747,210 - Unterguggenberger , et al. A	2020-08-18
System And Method For Automating User Interaction For Semiconductor Manufacturing Equipment App 20190079503 - UNTERGUGGENBERGER; Rainer ; et al.	2019-03-14
Controlled ambient system for interface engineering Grant 9,117,860 - Boyd , et al. August 25, 2	2015-08-25
Process integration scheme to lower overall dielectric constant in BEoL interconnect structures Grant 9,076,844 - Bright , et al. July 7, 2	2015-07-07
Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same Grant 8,114,246 - Ni , et al. February 14, 2	2012-02-14
Methods for providing a confined liquid for immersion lithography Grant 7,749,689 - Hemker , et al. July 6, 2	2010-07-06
Process Integration Scheme To Lower Overall Dielectric Constant In Beol Interconnect Structures App 20090134520 - Bright; Nicolas ; et al.	2009-05-28
Methods for Providing a Confined Liquid for Immersion Lithography App 20080171292 - Hemker; David ; et al.	2008-07-17
Process integration scheme to lower overall dielectric constant in BEoL interconnect structures App 20080150138 - Bright; Nicolas ; et al.	2008-06-26
Apparatus and method for providing a confined liquid for immersion lithography Grant 7,367,345 - Hemker , et al. May 6, 2	2008-05-06
Controlled ambient system for interface engineering App 20080057221 - Boyd; John ; et al.	2008-03-06
Method For Gap Fill In Controlled Ambient System App 20080057182 - Boyd; John ; et al.	2008-03-06
Method and apparatus for real time metal film thickness measurement Grant 7,309,618 - Gotkis , et al. December 18, 2	2007-12-18
Vacuum Plasma Processor Having A Chamber With Electrodes And A Coil For Plasma Excitation And Method Of Operating Same App 20070044915 - Ni; Tuqiang ; et al.	2007-03-01
Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same Grant 7,105,102 - Ni , et al. September 12, 2	2006-09-12
Enhancement of eddy current based measurement capabilities Grant 7,084,621 - Gotkis , et al. August 1, 2	2006-08-01
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection Grant 7,010,468 - Gotkis , et al. March 7, 2	2006-03-07
Method and apparatus of arrayed sensors for metrological control Grant 6,951,624 - Gotkis , et al. October 4, 2	2005-10-04
System, method and apparatus for improved global dual-damascene planarization Grant 6,939,796 - Lohokare , et al. September 6, 2	2005-09-06
System and method for metal residue detection and mapping within a multi-step sequence Grant 6,929,531 - Gotkis , et al. August 16, 2	2005-08-16
Complementary sensors metrological process and method and apparatus for implementing the same Grant 6,922,053 - Gotkis , et al. July 26, 2	2005-07-26
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection App 20050125202 - Gotkis, Yehiel ; et al.	2005-06-09
Method and apparatus for metrological process control implementing complementary sensors Grant 6,894,491 - Gotkis , et al. May 17, 2	2005-05-17
Integration of sensor based metrology into semiconductor processing tools App 20050072528 - Owczarz, Aleksander ; et al.	2005-04-07
Method and apparatus for wafer mechanical stress monitoring and wafer thermal stress monitoring App 20050066739 - Gotkis, Yehiel ; et al.	2005-03-31
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection Grant 6,859,765 - Gotkis , et al. February 22, 2	2005-02-22
Complementary sensors metrological process and method and apparatus for implementing the same App 20050007107 - Gotkis, Yehiel ; et al.	2005-01-13
Method and apparatus of arrayed sensors for metrological control App 20050000653 - Gotkis, Yehiel ; et al.	2005-01-06
System, method and apparatus for improved global dual-damascene planarization App 20040248408 - Lohokare, Shrikant P. ; et al.	2004-12-09
System, method and apparatus for improved local dual-damascene planarization Grant 6,821,899 - Lohokare , et al. November 23, 2	2004-11-23
Method and apparatus of arrayed sensors for metrological control Grant 6,808,590 - Gotkis , et al. October 26, 2	2004-10-26
System, method and apparatus for improved local dual-damascene planarization App 20040180545 - Lohokare, Shrikant P. ; et al.	2004-09-16
Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same App 20040154747 - Ni, Tuqiang ; et al.	2004-08-12
Methods For Reducing Contamination Of Semiconductor Substrates App 20040137741 - Chebi, Robert ; et al.	2004-07-15
Methods for reducing contamination of semiconductor substrates Grant 6,759,336 - Chebi , et al. July 6, 2	2004-07-06
Method And Apparatus For Metrological Process Control Implementing Complimentary Sensors App 20040119468 - Gotkis, Yehiel ; et al.	2004-06-24
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection App 20040117054 - Gotkis, Yehiel ; et al.	2004-06-17
Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same Grant 6,716,303 - Ni , et al. April 6, 2	2004-04-06
System and method for metal residue detection and mapping within a multi-step sequence App 20040058620 - Gotkis, Yehiel ; et al.	2004-03-25
Enhancement of eddy current based measurement capabilities App 20040058545 - Gotkis, Yehiel ; et al.	2004-03-25
Method and apparatus for applying differential removal rates to a surface of a substrate App 20040011462 - Gotkis, Yehiel ; et al.	2004-01-22
Method and apparatus for real time metal film thickness measurement App 20040002171 - Gotkis, Yehiel ; et al.	2004-01-01
Methods for reducing contamination of semiconductor substrates Grant 6,528,427 - Chebi , et al. March 4, 2	2003-03-04
Configurable plasma volume etch chamber Grant 6,527,911 - Yen , et al. March 4, 2	2003-03-04
Methods for reducing contamination of semiconductor substrates App 20020139388 - Chebi, Robert ; et al.	2002-10-03

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