loadpatents
Patent applications and USPTO patent grants for Hellwig; Lance G..The latest application filed is for "low thermal mass semiconductor wafer boat".
Patent | Date |
---|---|
Epitaxial barrel susceptor having improved thickness uniformity Grant 8,404,049 - Hellwig , et al. March 26, 2 | 2013-03-26 |
Low thermal mass semiconductor wafer boat Grant 8,220,647 - Gilmore , et al. July 17, 2 | 2012-07-17 |
Low thermal mass semiconductor wafer plate Grant 8,220,646 - Gilmore , et al. July 17, 2 | 2012-07-17 |
Low Thermal Mass Semiconductor Wafer Plate App 20120074081 - Gilmore; Brian Lawrence ;   et al. | 2012-03-29 |
Low Thermal Mass Semiconductor Wafer Boat App 20120077138 - Gilmore; Brian Lawrence ;   et al. | 2012-03-29 |
Low thermal mass semiconductor wafer support Grant 8,042,697 - Gilmore , et al. October 25, 2 | 2011-10-25 |
Semiconductor Wafer Transport System App 20110148128 - Hellwig; Lance G. ;   et al. | 2011-06-23 |
Semiconductor wafer carrier blade Grant 7,878,562 - Hamano , et al. February 1, 2 | 2011-02-01 |
Low Thermal Mass Semiconductor Wafer Support App 20090321372 - Gilmore; Brian Lawrence ;   et al. | 2009-12-31 |
Susceptor with Support Bosses App 20090165721 - Pitney; John A. ;   et al. | 2009-07-02 |
Epitaxial Barrel Susceptor Having Improved Thickness Uniformity App 20090165719 - Hellwig; Lance G. ;   et al. | 2009-07-02 |
Semiconductor Wafer Carrier Blade App 20090169346 - Hamono; Manabu ;   et al. | 2009-07-02 |
Susceptor For Improving Throughput And Reducing Wafer Damage App 20080314319 - Hamano; Manabu ;   et al. | 2008-12-25 |
Modified susceptor for barrel reactor Grant 7,462,246 - Hellwig December 9, 2 | 2008-12-09 |
Modified susceptor for barrel reactor App 20060231035 - Hellwig; Lance G. | 2006-10-19 |
Method and system for monocrystalline epitaxial deposition Grant 5,789,309 - Hellwig August 4, 1 | 1998-08-04 |
Susceptor and baffle therefor Grant 5,518,549 - Hellwig May 21, 1 | 1996-05-21 |
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