Heinz; Tony Frederick
Patent Applications and Registrations
Patent applications and USPTO patent grants for Heinz; Tony Frederick.The latest application filed is for "in-situ monitoring and control of conductive films by detecting changes in induced eddy currents".
- Heinz; Tony Frederick - Chappaqua NY
| Patent | Date |
|---|---|
| In-situ monitoring and control of conductive films by detecting changes in induced eddy currents Grant 6,072,313 - Li , et al. June 6, 2 | 2000-06-06 |
| Real time measurement of etch rate during a chemical etching process Grant 5,788,801 - Barbee , et al. August 4, 1 | 1998-08-04 |
| In-situ monitoring of the change in thickness of films Grant 5,731,697 - Li , et al. March 24, 1 | 1998-03-24 |
| In-situ monitoring of conductive films on semiconductor wafers Grant 5,660,672 - Li , et al. August 26, 1 | 1997-08-26 |
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