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Semiconductor devices Grant 10,566,332 - Wang , et al. Feb | 2020-02-18 |
Semiconductor Devices App 20190088658 - Wang; Kuo-Chen ;   et al. | 2019-03-21 |
Methods for fabricating a semiconductor memory device Grant 10,163,909 - Wang , et al. Dec | 2018-12-25 |
Semiconductor Memory Device Having Coplanar Digit Line Contacts And Storage Node Contacts In Memory Array And Method For Fabricating The Same App 20180102366 - Wang; Kuo-Chen ;   et al. | 2018-04-12 |
Semiconductor memory device having coplanar digit line contacts and storage node contacts in memory array and method for fabricating the same Grant 9,881,924 - Wang , et al. January 30, 2 | 2018-01-30 |
Semiconductor Memory Device Having Coplanar Digit Line Contacts And Storage Node Contacts In Memory Array And Method For Fabricating The Same App 20170330882 - Wang; Kuo-Chen ;   et al. | 2017-11-16 |
Silicon buried digit line access device and method of forming the same Grant 9,691,773 - Surthi , et al. June 27, 2 | 2017-06-27 |
Memory cells, arrays of memory cells, and methods of forming memory cells Grant 9,337,201 - Heineck , et al. May 10, 2 | 2016-05-10 |
Method of forming buried word line structure Grant 9,263,317 - Park , et al. February 16, 2 | 2016-02-16 |
Buried digitline (BDL) access device and memory array Grant 9,070,584 - Surthi , et al. June 30, 2 | 2015-06-30 |
Silicon Buried Digit Line Access Device And Method Of Forming The Same App 20150123280 - Surthi; Shyam ;   et al. | 2015-05-07 |
Method for semiconductor cross pitch doubled patterning process Grant 9,012,330 - Nair , et al. April 21, 2 | 2015-04-21 |
Method For Semiconductor Cross Pitch Doubled Patterning Process App 20150056810 - Nair; Vinay ;   et al. | 2015-02-26 |
Buried Digitline (bdl) Access Device And Memory Array App 20140346652 - Surthi; Shyam ;   et al. | 2014-11-27 |
Method Of Forming Buried Word Line Structure App 20140213035 - Park; Inho ;   et al. | 2014-07-31 |
Buried Word Line Structure And Method Of Forming The Same App 20140159140 - Park; Inho ;   et al. | 2014-06-12 |
Buried word line structure and method of forming the same Grant 8,735,267 - Park , et al. May 27, 2 | 2014-05-27 |
Dram Structure With Buried Word Lines And Fabrication Thereof, And Ic Structure And Fabrication Thereof App 20140042548 - Liu; Hao-Chieh ;   et al. | 2014-02-13 |
Semiconductor process and semiconductor structure for memory array with buried digit lines (BDL) Grant 8,502,294 - Surthi , et al. August 6, 2 | 2013-08-06 |
Method of fabricating a cell contact and a digit line for a semiconductor device Grant 8,450,207 - Surthi , et al. May 28, 2 | 2013-05-28 |
Memory cells, arrays of memory cells, and methods of forming memory cells Grant 8,361,856 - Heineck , et al. January 29, 2 | 2013-01-29 |
Memory Cells, Arrays Of Memory Cells, And Methods Of Forming Memory Cells App 20130001666 - Heineck; Lars ;   et al. | 2013-01-03 |
Method Of Fabricating A Cell Contact And A Digit Line For A Semiconductor Device App 20120329274 - Surthi; Shyam ;   et al. | 2012-12-27 |
Dram Structure With Buried Word Lines And Fabrication Thereof, And Ic Structure And Fabrication Thereof App 20120292716 - Liu; Hao-Chieh ;   et al. | 2012-11-22 |
Memory Cells, Arrays Of Memory Cells, And Methods Of Forming Memory Cells App 20120104491 - Heineck; Lars ;   et al. | 2012-05-03 |
Interconnect structure for semiconductor devices Grant 8,138,538 - Moll , et al. March 20, 2 | 2012-03-20 |
Word line to bit line spacing method and apparatus Grant 7,838,928 - Graf , et al. November 23, 2 | 2010-11-23 |
Single-Sided Trench Contact Window App 20100090348 - Park; Inho ;   et al. | 2010-04-15 |
Interconnect Structure For Semiconductor Devices App 20100090264 - Moll; Hans-Peter ;   et al. | 2010-04-15 |
Word Line to Bit Line Spacing Method and Apparatus App 20090302380 - Graf; Werner ;   et al. | 2009-12-10 |
Method for forming an integrated circuit having an active semiconductor device and integrated circuit App 20080315326 - Graf; Werner ;   et al. | 2008-12-25 |
Manufacturing method for forming a recessed channel transistor, method for forming a corresponding integrated semiconductor memory device and corresponding self-aligned mask structure App 20080299722 - Hartwich; Jessica ;   et al. | 2008-12-04 |
Memory Cell Array And Method Of Forming The Memory Cell Array App 20080061340 - Heineck; Lars ;   et al. | 2008-03-13 |
Method for producing a semiconductor structure Grant 7,314,803 - Graf , et al. January 1, 2 | 2008-01-01 |
Integrated Circuit Including a Memory Cell Array App 20070290249 - Popp; Martin ;   et al. | 2007-12-20 |
Memory cell array and method of forming the same Grant 7,274,060 - Popp , et al. September 25, 2 | 2007-09-25 |
Manufacturing method for an integrated semiconductor structure and corresponding integrated semiconductor structure App 20070077720 - Heineck; Lars ;   et al. | 2007-04-05 |
Connecting structure and method for manufacturing the same App 20070032032 - Heineck; Lars ;   et al. | 2007-02-08 |
Connecting structure and method for manufacturing the same App 20070032033 - Heineck; Lars ;   et al. | 2007-02-08 |
Memory cell array and method of forming the same App 20060284225 - Popp; Martin ;   et al. | 2006-12-21 |
Method for production of contacts on a wafer App 20060276019 - Graf; Werner ;   et al. | 2006-12-07 |
Method for production of contacts on a wafer Grant 7,094,674 - Graf , et al. August 22, 2 | 2006-08-22 |
Method for fabricating transistors of different conduction types and having different packing densities in a semiconductor substrate Grant 7,087,492 - Popp , et al. August 8, 2 | 2006-08-08 |
Method for producing a semiconductor structure App 20060141756 - Graf; Werner ;   et al. | 2006-06-29 |
Method for fabricating a contact hole plane in a memory module Grant 7,018,781 - Frohlich , et al. March 28, 2 | 2006-03-28 |
Semiconductor trench structure Grant 6,919,255 - Birner , et al. July 19, 2 | 2005-07-19 |
Method for fabricating a trench capacitor with an insulation collar Grant 6,916,721 - Heineck , et al. July 12, 2 | 2005-07-12 |
Method for fabricating transistors of different conduction types and having different packing densities in a semiconductor substrate App 20050026373 - Popp, Martin ;   et al. | 2005-02-03 |
Method for fabricating a contact hole plane in a memory module App 20050003308 - Frohlich, Hans-Georg ;   et al. | 2005-01-06 |
Method for fabricating a trench capacitor with an insulation collar App 20040197988 - Heineck, Lars ;   et al. | 2004-10-07 |
Method for production of contacts on a wafer App 20040142548 - Graf, Werner ;   et al. | 2004-07-22 |
Semiconductor trench structure App 20040126961 - Birner, Albert ;   et al. | 2004-07-01 |
Method of fabricating a Si3N4/polycide structure using a dielectric sacrificial layer as a mask Grant 6,342,452 - Coronel , et al. January 29, 2 | 2002-01-29 |