Heimel; Oliver

Patent Applications and Registrations

Patent applications and USPTO patent grants for Heimel; Oliver.The latest application filed is for "deposition apparatus, vacuum system, and method of operating a deposition apparatus".

Company Profile

8.4.25

Heimel; Oliver - Wabern N/A DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier Grant 10,837,111 - Vercesi , et al. November 17, 2	2020-11-17
Deposition Apparatus, Vacuum System, And Method Of Operating A Deposition Apparatus App 20200227637 - ZANG; Sebastian Gunther ; et al.	2020-07-16
Apparatus For Vacuum Processing Of A Substrate, System For Vacuum Processing Of A Substrate, And Method For Transportation Of A App 20200083452 - HEYMANNS; Matthias ; et al.	2020-03-12
Vacuum System And Method For Depositing A Plurality Of Materials On A Substrate App 20200040445 - HEIMEL; Oliver	2020-02-06
Apparatus For Routing A Carrier In A Processing System, A System For Processing A Substrate On The Carrier, And Method Of Routin App 20190393064 - ZANG; Sebastian Gunther ; et al.	2019-12-26
Positioning Arrangement For A Substrate Carrier And A Mask Carrier, Transportation System For A Substrate Carrier And A Mask Car App 20190368024 - HEYMANNS; Matthias ; et al.	2019-12-05
Mask Arrangement For Masking A Substrate In A Processing Chamber, Apparatus For Depositing A Layer On A Substrate, And Method Fo App 20190301002 - BANGERT; Stefan ; et al.	2019-10-03
Apparatus And Method For Transportation Of A Deposition Source App 20190292653 - BANGERT; Stefan ; et al.	2019-09-26
Apparatus For Transportation Of A Substrate, Apparatus For Vacuum Processing Of A Substrate, And Method For Maintenance Of A Magnetic Levitation System App 20180374732 - KLEIN; Wolfgang ; et al.	2018-12-27
Holding Arrangement For Supporting A Substrate Carrier And A Mask Carrier During Layer Deposition In A Processing Chamber, Apparatus For Depositing A Layer On A Substrate, And Method For Aligning A Substrate Carrier Supporting A Substrate And A Mask Carrier App 20180030596 - VERCESI; Tommaso ; et al.	2018-02-01
Mask Arrangement For Masking A Substrate In A Processing Chamber App 20170342541 - BANGERT; Stefan ; et al.	2017-11-30
Carrier For Substrates App 20160002780 - HEIMEL; Oliver ; et al.	2016-01-07
Vacuum transport device with movable guide rail Grant 8,282,089 - Heimel , et al. October 9, 2	2012-10-09
Carrier For A Substrate And A Method For Assembling The Same App 20120048186 - Bruning; Andre ; et al.	2012-03-01
Rotatable Sputter Target Base, Rotatable Sputter Target, Coating Installation, Method Of Producing A Rotatable Sputter Target, Target Base Connection Means, And Method Of Connecting A Rotatable Target Base Device For Sputtering Installations To A Target Base Support App 20120037503 - Lippert; Lothar ; et al.	2012-02-16
Substrate carrier Grant 8,083,912 - Klug , et al. December 27, 2	2011-12-27
Twin-type Coating Device With Improved Separating Plate App 20110303149 - Heimel; Oliver ; et al.	2011-12-15
Twin-type Coating Device With Improved Separating Plate App 20110303151 - Heimel; Oliver ; et al.	2011-12-15
Twin-type Coating Device With Improved Separating Plate App 20110303150 - Heimel; Oliver ; et al.	2011-12-15
Rotatable Sputter Target Base, Rotatable Sputter Target, Coating Installation, Method Of Producing A Rotatable Sputter Target, Target Base Connection Means, And Method Of Connecting A Rotatable Target Base Device For Sputtering Installations To A Target Base Support App 20100101948 - LIPPERT; Lothar ; et al.	2010-04-29
Twin-type Coating Device With Improved Separating Plate App 20090194027 - Heimel; Oliver ; et al.	2009-08-06
Flooding Chamber For Coating Installations App 20080223294 - Gebele; Thomas ; et al.	2008-09-18
Vacuum transport device with movable guide rail App 20070231111 - Heimel; Oliver ; et al.	2007-10-04
Substrate carrier App 20070068802 - Gebele; Thomas ; et al.	2007-03-29
Substrate carrier App 20070069351 - Klug; Thomas ; et al.	2007-03-29
Coating machine and method for operating a coating machine App 20070056844 - Heimel; Oliver	2007-03-15

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