loadpatents
Patent applications and USPTO patent grants for Hegedus; Andreas G..The latest application filed is for "photovoltaic device with back side contacts".
Patent | Date |
---|---|
Photovoltaic device with back side contacts Grant 10,797,187 - He , et al. October 6, 2 | 2020-10-06 |
Photovoltaic Device With Back Side Contacts App 20150243815 - HE; Gang ;   et al. | 2015-08-27 |
Wafer carrier track Grant 8,985,911 - He , et al. March 24, 2 | 2015-03-24 |
Photovoltaic device including an intermediate layer Grant 8,912,432 - Kizilyalli , et al. December 16, 2 | 2014-12-16 |
Photovoltaic device with increased light trapping Grant 8,895,847 - Kizilyalli , et al. November 25, 2 | 2014-11-25 |
Thin absorber layer of a photovoltaic device Grant 8,669,467 - Kizilyalli , et al. March 11, 2 | 2014-03-11 |
Processing Multilayer Semiconductors With Multiple Heat Sources App 20140003800 - RAMAMURTHY; Sundar ;   et al. | 2014-01-02 |
Processing multilayer semiconductors with multiple heat sources Grant 8,536,492 - Ramamurthy , et al. September 17, 2 | 2013-09-17 |
Substrate Processing Apparatus Using A Batch Processing Chamber App 20120210937 - THAKUR; RANDHIR ;   et al. | 2012-08-23 |
Heating Lamp System And Methods Thereof App 20120106935 - He; Gang ;   et al. | 2012-05-03 |
Wafer Carrier Track App 20120090548 - He; Gang ;   et al. | 2012-04-19 |
Vapor Deposition Reactor System And Methods Thereof App 20120067286 - He; Gang ;   et al. | 2012-03-22 |
Reactor Lid Assembly For Vapor Deposition App 20120067282 - He; Gang ;   et al. | 2012-03-22 |
Temperature uniformity measurements during rapid thermal processing Grant 8,104,951 - Aderhold , et al. January 31, 2 | 2012-01-31 |
Processing multilayer semiconductors with multiple heat sources Grant 7,986,871 - Ramamurthy , et al. July 26, 2 | 2011-07-26 |
Elimination of flow and pressure gradients in low utilization processes Grant 7,955,646 - Cruse , et al. June 7, 2 | 2011-06-07 |
Mixed Wiring Schemes For Shading Robustness App 20110073152 - HEGEDUS; Andreas G. ;   et al. | 2011-03-31 |
Method of feed forward control of scanned rapid thermal processing Grant 7,906,348 - Hegedus March 15, 2 | 2011-03-15 |
Thin Absorber Layer Of A Photovoltaic Device App 20110056546 - KIZILYALLI; Isik C. ;   et al. | 2011-03-10 |
Substrate Processing Apparatus Using A Batch Processing Chamber App 20100173495 - Thakur; Randhir ;   et al. | 2010-07-08 |
Method for fabricating a gate dielectric of a field effect transistor Grant 7,727,828 - Chua , et al. June 1, 2 | 2010-06-01 |
Contact opening metrology Grant 7,476,875 - Kadyshevitch , et al. January 13, 2 | 2009-01-13 |
Processing Multilayer Semiconductors With Multiple Heat Sources App 20090010626 - RAMAMURTHY; SUNDAR ;   et al. | 2009-01-08 |
Contact opening metrology Grant 7,381,978 - Kadyshevitch , et al. June 3, 2 | 2008-06-03 |
Temperature Uniformity Measurements During Rapid Thermal Processing App 20080025368 - ADERHOLD; WOLFGANG ;   et al. | 2008-01-31 |
Contact Opening Metrology App 20070257191 - Kadyshevitch; Alexander ;   et al. | 2007-11-08 |
Scanned rapid thermal processing with feed forward control Grant 7,279,657 - Hegedus October 9, 2 | 2007-10-09 |
Contact opening metrology Grant 7,279,689 - Kadyshevitch , et al. October 9, 2 | 2007-10-09 |
Method For Fabricating A Gate Dielectric Of A Field Effect Transistor App 20070093013 - Chua; Thai Cheng ;   et al. | 2007-04-26 |
Method of Feed Forward Control of Scanned Rapid Thermal Processing App 20070020783 - HEGEDUS; Andreas G. | 2007-01-25 |
Scanned rapid thermal processing with feed forward control App 20060289504 - Hegedus; Andreas G. | 2006-12-28 |
Substrate processing apparatus using a batch processing chamber App 20060156979 - Thakur; Randhir ;   et al. | 2006-07-20 |
Contact opening metrology App 20060113471 - Kadyshevitch; Alexander ;   et al. | 2006-06-01 |
Contact opening metrology Grant 7,038,224 - Kadyshevitch , et al. May 2, 2 | 2006-05-02 |
Elimination of flow and pressure gradients in low utilization processes App 20060029747 - Cruse; James P. ;   et al. | 2006-02-09 |
Processing multilayer semiconductors with multiple heat sources App 20060018639 - Ramamurthy; Sundar ;   et al. | 2006-01-26 |
Contact opening metrology App 20050173657 - Kadyshevitch, Alexander ;   et al. | 2005-08-11 |
Rate monitor for wet wafer cleaning App 20040139985 - Hegedus, Andreas G. ;   et al. | 2004-07-22 |
Contact opening metrology App 20040021076 - Kadyshevitch, Alexander ;   et al. | 2004-02-05 |
Semiconductor processing system with lamp cooling Grant 6,376,804 - Ranish , et al. April 23, 2 | 2002-04-23 |
Micro grooved support surface for reducing substrate wear and slip formation Grant 6,264,467 - Lue , et al. July 24, 2 | 2001-07-24 |
Semiconductor processing system Grant 6,121,581 - Hegedus September 19, 2 | 2000-09-19 |
Ceramic reinforced glass matrix Grant 5,147,721 - Baron , et al. September 15, 1 | 1992-09-15 |
Woven core structure Grant 5,128,195 - Hegedus July 7, 1 | 1992-07-07 |
Compound flow plasma reactor Grant 4,614,639 - Hegedus September 30, 1 | 1986-09-30 |
Variable duty cycle, multiple frequency, plasma reactor Grant 4,585,516 - Corn , et al. April 29, 1 | 1986-04-29 |
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