| Patent | Date |
|---|
Micromechanical structure and method for manufacturing the same
Grant 10,710,874 - Frischmuth , et al. | 2020-07-14 |
Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
Grant 10,516,943 - Dorfmeister , et al. Dec | 2019-12-24 |
Semiconductor devices, a fluid sensor and a method for forming a semiconductor device
Grant 10,461,203 - Clara , et al. Oc | 2019-10-29 |
Sensing systems and methods using a coupling structure
Grant 10,345,227 - Lavchiev , et al. July 9, 2 | 2019-07-09 |
Plasmonic And Photonic Wavelength Separation Filters
App 20190204511 - GRILLE; Thomas ; et al. | 2019-07-04 |
Photonic crystal sensor structure and a method for manufacturing the same
Grant 10,247,671 - Silvano de Sousa , et al. | 2019-04-02 |
Production of adhesion structures in dielectric layers using photoprocess technology and devices incorporating adhesion structures
Grant 10,217,644 - Grille , et al. Feb | 2019-02-26 |
Micromechanical structure comprising carbon material and method for fabricating the same
Grant 10,106,398 - Schmid , et al. October 23, 2 | 2018-10-23 |
Micromechanical structure and method for fabricating the same
Grant 10,081,533 - Schmid , et al. September 25, 2 | 2018-09-25 |
Semiconductor Devices, A Fluid Sensor And A Method For Forming A Semiconductor Device
App 20180212085 - CLARA; Stefan ; et al. | 2018-07-26 |
Photonic Crystal Sensor Structure And A Method For Manufacturing The Same
App 20180180542 - Silvano de Sousa; Jonathan ; et al. | 2018-06-28 |
Method for simultaneous structuring and chip singulation
Grant 10,005,659 - Grille , et al. June 26, 2 | 2018-06-26 |
Semiconductor devices, a fluid sensor and a method for forming a semiconductor device
Grant 9,941,432 - Clara , et al. April 10, 2 | 2018-04-10 |
System and method for a capacitive thermometer
Grant 9,939,331 - Silvano de Sousa , et al. April 10, 2 | 2018-04-10 |
Photonic crystal sensor structure and a method for manufacturing the same
Grant 9,903,816 - Silvano de Sousa , et al. February 27, 2 | 2018-02-27 |
Micromechanical Structure And Method For Manufacturing The Same
App 20180002167 - Frischmuth; Tobias ; et al. | 2018-01-04 |
Microelectromechanical Device And A Method Of Manufacturing A Microelectromechanical Device
App 20170355591 - Hedenig; Ursula ; et al. | 2017-12-14 |
Microelectromechanical Device, An Array Of Microelectromechanical Devices, A Method Of Manufacturing A Microelectromechanical Device, And A Method Of Operating A Microelectromechanical Device
App 20170325025 - Dorfmeister; Manuel ; et al. | 2017-11-09 |
Sensing Systems And Methods Using A Coupling Structure
App 20170268991 - Lavchiev; Ventsislav ; et al. | 2017-09-21 |
Method of manufacturing semiconductor devices
Grant 9,748,140 - Hedenig , et al. August 29, 2 | 2017-08-29 |
Sensing systems and methods using a coupling structure
Grant 9,702,813 - Lavchiev , et al. July 11, 2 | 2017-07-11 |
Method for Simultaneous Structuring and Chip Singulation
App 20170158493 - Grille; Thomas ; et al. | 2017-06-08 |
Liquid sensing systems and methods using a ring resonator sensor
Grant 9,618,693 - Lavchiev , et al. April 11, 2 | 2017-04-11 |
Method for simultaneous structuring and chip singulation
Grant 9,610,543 - Grille , et al. April 4, 2 | 2017-04-04 |
Micromechanical Structure and Method for Fabricating the Same
App 20160353210 - Schmid; Ulrich ; et al. | 2016-12-01 |
Semiconductor Devices, A Fluid Sensor And A Method For Forming A Semiconductor Device
App 20160351739 - CLARA; Stefan ; et al. | 2016-12-01 |
Plasmonic And Photonic Wavelength Separation Filters
App 20160349456 - GRILLE; Thomas ; et al. | 2016-12-01 |
Method for manufacturing a plurality of microphone structures, microphone and mobile device
Grant 9,439,017 - Hedenig , et al. September 6, 2 | 2016-09-06 |
Opto-electronic sensor
Grant 9,417,186 - Jakoby , et al. August 16, 2 | 2016-08-16 |
Photonic Crystal Sensor Structure And A Method For Manufacturing The Same
App 20160153907 - Silvano de Sousa; Jonathan ; et al. | 2016-06-02 |
Micromechanical Structure and Method for Fabricating the Same
App 20160031701 - Schmid; Ulrich ; et al. | 2016-02-04 |
Sensing Systems And Methods Using A Coupling Structure
App 20160025622 - Lavchiev; Ventsislav ; et al. | 2016-01-28 |
Liquid Sensing Systems And Methods Using A Ring Resonator Sensor
App 20150362672 - Lavchiev; Ventsislav ; et al. | 2015-12-17 |
Micro mechanical structure and method for fabricating the same
Grant 9,212,045 - Schmid , et al. December 15, 2 | 2015-12-15 |
System and Method for a Capacitive Thermometer
App 20150338285 - Silvano de Sousa; Jonathan ; et al. | 2015-11-26 |
Method For Manufacturing A Plurality Of Microphone Structures, Microphone And Mobile Device
App 20150230039 - Hedenig; Ursula ; et al. | 2015-08-13 |
Method for Simultaneous Structuring and Chip Singulation
App 20150217997 - Grille; Thomas ; et al. | 2015-08-06 |
Carbon Layers for High Temperature Processes
App 20140335700 - Denifl; Guenter ; et al. | 2014-11-13 |
Method for processing a wafer at unmasked areas and previously masked areas to reduce a wafer thickness
Grant 8,871,550 - Grille , et al. October 28, 2 | 2014-10-28 |
Opto-Electronic Sensor
App 20140061677 - Jakoby; Bernhard ; et al. | 2014-03-06 |
Production Of Adhesion Structures In Dielectric Layers Using Photoprocess Technology And Devices Incorporating Adhesion Structures
App 20140027915 - GRILLE; Thomas ; et al. | 2014-01-30 |
Method for Processing a Wafer at Unmasked Areas and Previously Masked Areas to Reduce a Wafer Thickness
App 20130313661 - Grille; Thomas ; et al. | 2013-11-28 |
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