Heald; David

Patent Applications and Registrations

Patent applications and USPTO patent grants for Heald; David.The latest application filed is for "method and apparatus for application of anti-stiction coating".

Company Profile

0.14.19

Heald; David - Brookfield CT
Heald; David - Solvang CA US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Inspection apparatus, lithographic apparatus, and device manufacturing method Grant 9,285,687 - Smirnov , et al. March 15, 2	2016-03-15
Equipment and methods for etching of MEMS Grant 8,536,059 - Alam , et al. September 17, 2	2013-09-17
Optimization of desiccant usage in a MEMS package Grant 8,435,838 - Lin , et al. May 7, 2	2013-05-07
Method And Apparatus For Application Of Anti-stiction Coating App 20130098675 - Bos; Jan ; et al.	2013-04-25
Inspection Apparatus, Lithographic Apparatus, and Device Manufacturing Method App 20130083306 - Smirnov; Stanislav Y. ; et al.	2013-04-04
Mems Cavity-coating Layers And Methods App 20120206462 - Londergan; Ana R. ; et al.	2012-08-16
Apparatus And Method For Supporting A Mechanical Layer App 20120194496 - Zhong; Fan ; et al.	2012-08-02
Eliminate release etch attack by interface modification in sacrificial layers Grant 8,222,066 - Tu , et al. July 17, 2	2012-07-17
MEMS cavity-coating layers and methods Grant 8,164,815 - Londergan , et al. April 24, 2	2012-04-24
Optimization Of Desiccant Usage In A Mems Package App 20110012219 - Lin; Yen Hua ; et al.	2011-01-20
Mems Cavity-coating Layers And Methods App 20100245979 - Londergan; Ana R. ; et al.	2010-09-30
Equipment And Methods For Etching Of Mems App 20100219155 - Alam; Khurshid Syed ; et al.	2010-09-02
Electromechanical device treatment with water vapor Grant 7,738,158 - Natarajan , et al. June 15, 2	2010-06-15
MEMS cavity-coating layers and methods Grant 7,733,552 - Londergan , et al. June 8, 2	2010-06-08
Nanowire capacitor and methods of making same Grant 7,667,296 - Stumbo , et al. February 23, 2	2010-02-23
Process and structure for fabrication of MEMS device having isolated edge posts Grant 7,561,321 - Heald July 14, 2	2009-07-14
Etching Processes Used In Mems Production App 20090071933 - Floyd; Philip ; et al.	2009-03-19
Electromechanical Device Treatment With Water Vapor App 20090002804 - Natarajan; Bangalore R. ; et al.	2009-01-01
Eliminate Release Etch Attack By Interface Modification In Sacrificial Layers App 20080311690 - Tu; Thanh Nghia ; et al.	2008-12-18
Mems Cavity-coating Layers And Methods App 20080231931 - Londergan; Ana R. ; et al.	2008-09-25
Process And Structure For Fabrication Of Mems Device Having Isolated Edge Posts App 20080094687 - Heald; David	2008-04-24
Post-deposition encapsulation of nanostructures: compositions, devices and systems incorporating same App 20080032134 - Whiteford; Jeffery A. ; et al.	2008-02-07
Process and structure for fabrication of MEMS device having isolated edge posts Grant 7,321,457 - Heald January 22, 2	2008-01-22
Process And Structure For Fabrication Of Mems Device Having Isolated Egde Posts App 20070279730 - Heald; David	2007-12-06
Nanowire capacitor and methods of making same App 20070012985 - Stumbo; David ; et al.	2007-01-18
Nanowire varactor diode and methods of making same Grant 7,115,971 - Stumbo , et al. October 3, 2	2006-10-03
Post-deposition encapsulation of nanostructures: compositions, devices and systems incorporating same App 20060040103 - Whiteford; Jeffery A. ; et al.	2006-02-23
Nanowire varactor diode and methods of making same App 20050212079 - Stumbo, David ; et al.	2005-09-29

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