He; Jim Zhongyi

Patent Applications and Registrations

Patent applications and USPTO patent grants for He; Jim Zhongyi.The latest application filed is for "substrate chucking and dechucking methods".

Company Profile

4.9.10

He; Jim Zhongyi - San Jose CA
He; Jim Zhongyi - Sunnyvale CA US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
ESC substrate support with chucking force control Grant 11,114,327 - Boyd, Jr. , et al. September 7, 2	2021-09-07
Substrate chucking and dechucking methods Grant 11,114,326 - Boyd, Jr. , et al. September 7, 2	2021-09-07
Polishing of electrostatic substrate support geometries Grant 10,654,147 - Boyd, Jr. , et al.	2020-05-19
Substrate Chucking And Dechucking Methods App 20190206712 - BOYD, JR.; Wendell Glenn ; et al.	2019-07-04
Cmp Soft Polishing Of Electrostatic Substrate Support Geometries App 20190111541 - BOYD, JR.; Wendell Glenn ; et al.	2019-04-18
Soft Chucking And Dechucking For Electrostatic Chucking Substrate Supports App 20190080949 - BOYD, JR.; Wendell Glenn ; et al.	2019-03-14
Esc Substrate Support With Chucking Force Control App 20190067070 - BOYD, JR.; Wendell Glenn ; et al.	2019-02-28
Methods for removing contamination from surfaces in substrate processing systems Grant 9,805,914 - Yan , et al. October 31, 2	2017-10-31
Methods of surface interface engineering Grant 9,472,416 - He , et al. October 18, 2	2016-10-18
Methods For Removing Contamination From Surfaces In Substrate Processing Systems App 20160293384 - YAN; Chun ; et al.	2016-10-06
Methods Of Surface Interface Engineering App 20150111389 - HE; JIM ZHONGYI ; et al.	2015-04-23
Apparatus for etching high aspect ratio features Grant 8,475,625 - Pamarthy , et al. July 2, 2	2013-07-02
Techniques for the use of amorphous carbon (APF) for various etch and litho integration schemes Grant 7,718,081 - Liu , et al. May 18, 2	2010-05-18
Apparatus For Etching High Aspect Ratio Features App 20070256785 - Pamarthy; Sharma ; et al.	2007-11-08
Techniques For The Use Of Amorphous Carbon (apf) For Various Etch And Litho Integration Schemes App 20060231524 - Liu; Wei ; et al.	2006-10-19
Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme Grant 7,064,078 - Liu , et al. June 20, 2	2006-06-20
Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme App 20050167394 - liu, Wei ; et al.	2005-08-04
Forming bilayer resist patterns App 20040018742 - He, Jim Zhongyi ; et al.	2004-01-29

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