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Patent applications and USPTO patent grants for Hazenberg; Johannes Martinus Andreas.The latest application filed is for "substrate handler, lithographic apparatus and device manufacturing method".
Patent | Date |
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Substrate handler, lithographic apparatus and device manufacturing method Grant 8,174,680 - Van Der Schoot , et al. May 8, 2 | 2012-05-08 |
Lithographic apparatus, device manufacturing method and exchangeable optical element Grant 7,724,351 - Loopstra , et al. May 25, 2 | 2010-05-25 |
Substrate Handler, Lithographic Apparatus and Device Manufacturing Method App 20090284730 - VAN DER SCHOOT; Harmen Klaas ;   et al. | 2009-11-19 |
Substrate handler, lithographic apparatus and device manufacturing method Grant 7,576,835 - Van Der Schoot , et al. August 18, 2 | 2009-08-18 |
Method and device for alignment of a substrate Grant 7,307,695 - Hazenberg , et al. December 11, 2 | 2007-12-11 |
Lithographic apparatus, device manufacturing method and exchangeable optical element App 20070177122 - Loopstra; Erik Roelof ;   et al. | 2007-08-02 |
Substrate handler, lithographic apparatus and device manufacturing method App 20070008512 - Van Der Schoot; Harmen Klaas ;   et al. | 2007-01-11 |
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