Hazelton; Andrew
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hazelton; Andrew.The latest application filed is for "base assembly for a stage chamber of a wafer manufacturing system".
- Hazelton; Andrew - San Carlos CA
| Patent | Date |
|---|---|
| Multiple stage, stage assembly having independent stage bases Grant 6,927,838 - Ono , et al. August 9, 2 | 2005-08-09 |
| Flatmotor device and exposure device Grant 6,555,936 - Tanaka , et al. April 29, 2 | 2003-04-29 |
| Base assembly for a stage chamber of a wafer manufacturing system App 20020159046 - Binnard, Michael ; et al. | 2002-10-31 |
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