HAYASHI; Tokutarou

Patent Applications and Registrations

Patent applications and USPTO patent grants for HAYASHI; Tokutarou.The latest application filed is for "substrate processing apparatus and substrate processing method".

Company Profile

2.16.13

HAYASHI; Tokutarou - Kumamoto JP
Hayashi; Tokutarou - Koshi JP
Hayashi; Tokutarou - Koshi City JP
Hayashi; Tokutarou - Koshi-Shi N/A JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Processing Apparatus And Substrate Processing Method App 20210384058 - HARADA; Hiroki ; et al.	2021-12-09
Substrate transfer device, substrate transfer method and recording medium Grant 10,879,100 - Hayashi , et al. December 29, 2	2020-12-29
Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium Grant 10,256,127 - Hayashi , et al.	2019-04-09
Substrate Transfer Device, Substrate Transfer Method And Recording Medium App 20180240695 - Hayashi; Tokutarou ; et al.	2018-08-23
Substrate Transfer Apparatus, Substrate Transfer Method, And Non-transitory Storage Medium App 20170018444 - HAYASHI; Tokutarou ; et al.	2017-01-19
Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium Grant 9,507,349 - Hayashi , et al. November 29, 2	2016-11-29
Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position Grant 9,299,599 - Douki , et al. March 29, 2	2016-03-29
Substrate processing apparatus and substrate processing method Grant 9,268,327 - Teramoto , et al. February 23, 2	2016-02-23
Substrate transport method, substrate transport apparatus, and coating and developing system Grant 9,240,337 - Hayashi January 19, 2	2016-01-19
Substrate processing apparatus, substrate processing method and non-transitory storage medium Grant 9,136,150 - Hayashi , et al. September 15, 2	2015-09-15
Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position App 20140234991 - DOUKI; Yuichi ; et al.	2014-08-21
Substrate carrying mechanism, substrate carrying method and recording medium storing program including set of instructions to be executed to accomplish the substrate carrying method Grant 8,781,787 - Hayashi , et al. July 15, 2	2014-07-15
Substrate holder positioning method and substrate processing system Grant 8,755,935 - Douki , et al. June 17, 2	2014-06-17
Substrate Processing Apparatus And Substrate Processing Method App 20130211571 - TERAMOTO; Akihiro ; et al.	2013-08-15
Substrate Transfer Apparatus, Substrate Transfer Method, And Non-transitory Storage Medium App 20130204421 - HAYASHI; Tokutarou ; et al.	2013-08-08
Substrate Processing Apparatus, Substrate Processing Method And Non-transitory Storage Medium App 20130202388 - HAYASHI; Tokutarou ; et al.	2013-08-08
Substrate processing system, substrate placing position adjusting method and storage medium Grant 8,433,436 - Doki , et al. April 30, 2	2013-04-30
Substrate Transport Method, Substrate Transport Apparatus, And Coating And Developing System App 20120257176 - HAYASHI; Tokutarou	2012-10-11
Substrate Holder Positioning Method And Substrate Processing System App 20120224945 - DOUKI; Yuichi ; et al.	2012-09-06
Substrate Processing System, Substrate Placing Position Adjusting Method And Storage Medium App 20120072005 - Doki; Yuichi ; et al.	2012-03-22
Substrate Carrying Mechanism, Substrate Carrying Method And Recording Medium Storing Program Including Set Of Instructions To Be Executed To Accomplish The Substrate Carrying Method App 20120046904 - HAYASHI; Tokutarou ; et al.	2012-02-23
Substrate processing system, substrate placing position adjusting method and storage medium Grant 8,055,376 - Doki , et al. November 8, 2	2011-11-08
Method of adjusting moving position of transfer arm and position detecting jig Grant 7,884,622 - Doki , et al. February 8, 2	2011-02-08
Method Of Adjusting Moving Position Of Transfer Arm And Position Detecting Jig App 20090051370 - Doki; Yuichi ; et al.	2009-02-26
Substrate Processing System, Substrate Placing Position Adjusting Method And Storage Medium App 20080102200 - DOKI; Yuichi ; et al.	2008-05-01

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