| Patent | Date |
|---|
Reduced-pressure drying apparatus
Grant 10,615,378 - Shimamura , et al. | 2020-04-07 |
Reduced-pressure Drying Apparatus
App 20180097205 - SHIMAMURA; Akinori ; et al. | 2018-04-05 |
Substrate Processing Apparatus
App 20150114562 - TAMURA; Akitake ; et al. | 2015-04-30 |
Substrate processing apparatus and particle adhesion preventing method
Grant 8,950,999 - Tamura , et al. February 10, 2 | 2015-02-10 |
Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus
Grant 8,945,412 - Kawamura , et al. February 3, 2 | 2015-02-03 |
Pattern-forming method and method for manufacturing semiconductor device
Grant 8,809,207 - Ishikawa , et al. August 19, 2 | 2014-08-19 |
Pattern-forming Method And Method For Manufacturing Semiconductor Device
App 20140080307 - Ishikawa; Hiraku ; et al. | 2014-03-20 |
Sealing film forming method, sealing film forming device, and light-emitting device
Grant 8,674,397 - Ishikawa , et al. March 18, 2 | 2014-03-18 |
Substrate processing method and substrate processing apparatus
Grant 8,647,440 - Kawamura , et al. February 11, 2 | 2014-02-11 |
Particle sticking prevention apparatus and plasma processing apparatus
Grant 8,608,422 - Moriya , et al. December 17, 2 | 2013-12-17 |
Film Forming Device, Substrate Processing System And Semiconductor Device Manufacturing Method
App 20130330928 - Ishikawa; Hiraku ; et al. | 2013-12-12 |
Evaporating Apparatus And Evaporating Method
App 20130209666 - Kamada; Tomiko ; et al. | 2013-08-15 |
Sealing Film Forming Method, Sealing Film Forming Device, And Light-emitting Device
App 20130126939 - ISHIKAWA; Hiraku ; et al. | 2013-05-23 |
Substrate Cleaning Apparatus, Substrate Cleaning Method, And Substrate Processing Apparatus
App 20120298132 - KAWAMURA; Shigeru ; et al. | 2012-11-29 |
Method for analyzing quartz member
Grant 8,268,185 - Dobashi , et al. September 18, 2 | 2012-09-18 |
Sputtering Device
App 20120160671 - Ishikawa; Hiraku ; et al. | 2012-06-28 |
Vapor Deposition Apparatus And Vapor Deposition Method
App 20120094014 - Ono; Yuji ; et al. | 2012-04-19 |
Deposition Head And Film Forming Apparatus
App 20120031339 - Ono; Yuji ; et al. | 2012-02-09 |
Defect inspecting method and defect inspecting apparatus
Grant 8,040,504 - Saito , et al. October 18, 2 | 2011-10-18 |
Component For Semiconductor Processing Apparatus And Manufacturing Method Thereof
App 20110244693 - Tamura; Akitake ; et al. | 2011-10-06 |
Substrate Processing System
App 20110240223 - Matsubayashi; Shinji ; et al. | 2011-10-06 |
Examination method and examination assistant device for quartz product of semiconductor processing apparatus
Grant 8,021,623 - Oikawa , et al. September 20, 2 | 2011-09-20 |
Pattern forming method, semiconductor device manufacturing apparatus and storage medium
Grant 8,008,211 - Tamura , et al. August 30, 2 | 2011-08-30 |
Vacuum processing apparatus and method
Grant 7,993,458 - Kondo , et al. August 9, 2 | 2011-08-09 |
Apparatus and method for measuring the concentration of organic gas
Grant 7,946,152 - Saito , et al. May 24, 2 | 2011-05-24 |
Atmosphere Cleaning Device
App 20110090612 - Oikawa; Junji ; et al. | 2011-04-21 |
Analysis method and analysis apparatus
Grant 7,923,680 - Dobashi , et al. April 12, 2 | 2011-04-12 |
Phosphonamides, process for producing the same, and use thereof
Grant 7,829,044 - Makioka , et al. November 9, 2 | 2010-11-09 |
Defect Inspecting Method And Defect Inspecting Apparatus
App 20100245812 - Saito; Misako ; et al. | 2010-09-30 |
Source Gas Generating Device And Film Forming Apparatus
App 20100154712 - Tamura; Akitake ; et al. | 2010-06-24 |
Substrate Processing Apparatus And Particle Adhesion Preventing Method
App 20100111648 - Tamura; Akitake ; et al. | 2010-05-06 |
Substrate Processing Method And Substrate Processing Apparatus
App 20100043820 - Kawamura; Shigeru ; et al. | 2010-02-25 |
Analyzing Method and Analyzing Apparatus
App 20090218483 - Dobashi; Kazuya ; et al. | 2009-09-03 |
Substrate Inspection Method, Substrate Inspection Apparatus And Storage Medium
App 20090206253 - SAITO; Misako ; et al. | 2009-08-20 |
Substrate Inspection Device And Substrate Inspection Method
App 20090206255 - Saito; Misako ; et al. | 2009-08-20 |
Component for semicondutor processing apparatus and manufacturing method thereof
App 20090194233 - Tamura; Akitake ; et al. | 2009-08-06 |
Gas Purifying Apparatus And Semiconductor Manufacturing Apparatus
App 20090183476 - Dobashi; Kazuya ; et al. | 2009-07-23 |
Pattern Forming Method, Semiconductor Device Manufacturing Apparatus And Storage Medium
App 20090176374 - TAMURA; Akitake ; et al. | 2009-07-09 |
Apparatus And Method For Measuring The Concentration Of Organic Gas
App 20090113991 - Saito; Misako ; et al. | 2009-05-07 |
Particle measuring method and particle measuring apparatus
Grant 7,508,518 - Tamura , et al. March 24, 2 | 2009-03-24 |
Substrate Cleaning Apparatus, Substrate Cleaning Method, And Substrate Treatment Apparatus
App 20090065027 - Kawamura; Shigeru ; et al. | 2009-03-12 |
Method for Analyzing Quartz Member
App 20080302762 - Dobashi; Kazuya ; et al. | 2008-12-11 |
Vacuum Processing Apparatus And Method
App 20080274288 - KONDO; Masaki ; et al. | 2008-11-06 |
Particle measuring method and particle measuring apparatus
App 20080239283 - Tamura; Akitake ; et al. | 2008-10-02 |
Substrate Cleaning Device And Substrate Processing Apparatus
App 20080230096 - KAWAMURA; Shigeru ; et al. | 2008-09-25 |
Electric wire and cable with coating/covering of polyvinyl chloride family resin composition
Grant 7,420,118 - Watanabe , et al. September 2, 2 | 2008-09-02 |
Method and apparatus for treating article to be treated
Grant 7,208,428 - Hishiya , et al. April 24, 2 | 2007-04-24 |
Examination method and examination assistant device for quartz product of semiconductor processing apparatus
App 20070008638 - Oikawa; Masayuki ; et al. | 2007-01-11 |
Vacuum processing apparatus and method of using the same
App 20060174835 - Saito; Misako ; et al. | 2006-08-10 |
Electric wire and cable with coating/covering of polyvinyl chloride family resin composition
App 20050215682 - Watanabe, Kiyoshi ; et al. | 2005-09-29 |
Polymer containing 9-oxo-9-phosphafluorene-2,7-diyl skeleton in backbone and process for producing the same
Grant 6,949,621 - Makioka , et al. September 27, 2 | 2005-09-27 |
Process for producing carbonyl compound
App 20050143597 - Mizushima, Eiichiro ; et al. | 2005-06-30 |
Electric wire coated with polyvinyl chloride resin composition and cable
Grant 6,903,264 - Watanabe , et al. June 7, 2 | 2005-06-07 |
Novel phosphonamides, process for producing the same, and use thereof
App 20050107599 - Makioka, Yoshikazu ; et al. | 2005-05-19 |
Particle sticking prevention apparatus and plasma processing apparatus
App 20050087136 - Moriya, Tsuyoshi ; et al. | 2005-04-28 |
Method and apparatus for treating article to be treated
App 20040219793 - Hishiya, Shingo ; et al. | 2004-11-04 |
Film obtained from silsesquioxane polymer and method of preparing same
Grant 6,787,241 - Kobayashi , et al. September 7, 2 | 2004-09-07 |
Silsesquioxane polymer molding and method of preparing same
Grant 6,774,200 - Kobayashi , et al. August 10, 2 | 2004-08-10 |
Electric wire coated with polyvinyl chloride resin compostion and cable
App 20040149482 - Watanabe, Kiyoshi ; et al. | 2004-08-05 |
Silcon-containing polymers
Grant 6,753,401 - Reddy , et al. June 22, 2 | 2004-06-22 |
Polymer containing 9-oxo-9-phosphafluorene-2,7-diyl skeleton in backbone and process for producing the same
App 20040019180 - Makioka, Yoshikazu ; et al. | 2004-01-29 |
Modified silicone compound, process of producing the same, and cured object obtained therefrom
App 20030065117 - Poreddy, Narsi Reddy ; et al. | 2003-04-03 |
Method for deciding on the timing of replacing a chemical filter, filter life detection sensor, chemical filter unit, and semiconductor manufacturing apparatus
Grant 6,537,347 - Motouji , et al. March 25, 2 | 2003-03-25 |
Film obtained from silsesquioxane polymer and method of preparing same
App 20030054180 - Kobayashi, Toshiaki ; et al. | 2003-03-20 |
Quartz member for semiconductor manufacturing equipment and method for metal analysis in quartz member
App 20030000458 - Marumo, Yoshinori ; et al. | 2003-01-02 |
Silsesquioxane polymer molding and method of preparing same
App 20020143132 - Kobayashi, Toshiaki ; et al. | 2002-10-03 |
Method for deciding on the timing of replacing a chemical filter, filter life detection sensor, chemical filter unit, and semiconductor manufacturing apparatus
App 20020112605 - Motouji, Satoshi ; et al. | 2002-08-22 |
Wafer boat and film formation method
Grant 6,344,387 - Hasebe , et al. February 5, 2 | 2002-02-05 |
Thickness measuring apparatus, substrate processing method, and substrate processing apparatus
Grant 6,331,890 - Marumo , et al. December 18, 2 | 2001-12-18 |
Catalyst system for hydroformylation of olefins
Grant 4,370,258 - Ogata , et al. January 25, 1 | 1983-01-25 |
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