| Patent | Date |
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Substrate Processing Apparatus
App 20200135505 - HAYASHI; Konosuke ; et al. | 2020-04-30 |
Substrate Processing Apparatus
App 20200135504 - HAYASHI; Konosuke ; et al. | 2020-04-30 |
Substrate processing apparatus
Grant 10,607,863 - Hayashi , et al. | 2020-03-31 |
Suction stage, lamination device, and method for manufacturing laminated substrate
Grant 10,586,727 - Matsui , et al. | 2020-03-10 |
Substrate processing apparatus
Grant 10,460,961 - Nagashima , et al. Oc | 2019-10-29 |
Substrate processing device and substrate processing method
Grant 10,406,566 - Matsushita , et al. Sept | 2019-09-10 |
Substrate processing apparatus and substrate processing method
Grant 10,325,787 - Hayashi , et al. | 2019-06-18 |
Substrate processing apparatus and substrate processing method
Grant 10,281,210 - Miyazaki , et al. | 2019-05-07 |
Substrate processing device and substrate processing method
Grant 10,276,406 - Hayashi , et al. | 2019-04-30 |
Device and method for treating a substrate with hydrofluoric and nitric acid
Grant 9,972,513 - Saito , et al. May 15, 2 | 2018-05-15 |
Substrate processing apparatus and substrate processing method
Grant 9,966,282 - Miyazaki , et al. May 8, 2 | 2018-05-08 |
Substrate processing apparatus and substrate processing method
Grant 9,964,358 - Matsushita , et al. May 8, 2 | 2018-05-08 |
Substrate Processing Apparatus
App 20180096864 - Nagashima; Yuji ; et al. | 2018-04-05 |
Processing Liquid Generator And Substrate Processing Apparatus Using The Same
App 20180033651 - HAYASHI; Konosuke ; et al. | 2018-02-01 |
Liquid feeding device and substrate treating device
Grant 9,811,096 - Hayashi , et al. November 7, 2 | 2017-11-07 |
Substrate processing apparatus and substrate processing method
Grant 9,795,999 - Ootagaki , et al. October 24, 2 | 2017-10-24 |
Substrate Processing Apparatus
App 20170278729 - HAYASHI; Konosuke ; et al. | 2017-09-28 |
Substrate Processing Device And Substrate Processing Method
App 20170259308 - MATSUSHITA; Jun ; et al. | 2017-09-14 |
Substrate Treating Device And Substrate Treating Method
App 20170256423 - SAITO; Yuki ; et al. | 2017-09-07 |
Bonding apparatus and bonding process method
Grant 9,741,596 - Hayashi , et al. August 22, 2 | 2017-08-22 |
Substrate treatment apparatus and substrate treatment method
Grant 9,694,371 - Ootagaki , et al. July 4, 2 | 2017-07-04 |
Substrate processing device and substrate processing method
Grant 9,607,865 - Hayashi , et al. March 28, 2 | 2017-03-28 |
Bonding apparatus and method for manufacturing bonded substrate
Grant 9,586,391 - Hayashi , et al. March 7, 2 | 2017-03-07 |
Substrate processing device and substrate processing method
Grant 9,553,003 - Hayashi , et al. January 24, 2 | 2017-01-24 |
Substrate Processing Apparatus And Substrate Processing Method
App 20160322241 - MATSUSHITA; Jun ; et al. | 2016-11-03 |
Substrate Treatment Device, Peeling Method For Laminated Substrate, And Method For Removing Adhesive
App 20160225613 - Kanai; Takahiro ; et al. | 2016-08-04 |
Suction Stage, Lamination Device, And Method For Manufacturing Laminated Substrate
App 20160225655 - Matsui; Emi ; et al. | 2016-08-04 |
Substrate Processing Apparatus And Substrate Processing Method
App 20160093486 - MIYAZAKI; Kunihiro ; et al. | 2016-03-31 |
Substrate Processing Apparatus And Substrate Processing Method
App 20160071746 - HAYASHI; Konosuke | 2016-03-10 |
Liquid Feeding Device And Substrate Treating Device
App 20160062372 - HAYASHI; Konosuke ; et al. | 2016-03-03 |
Substrate Processing Apparatus And Substrate Processing Method
App 20160025409 - MIYAZAKI; Kunihiro ; et al. | 2016-01-28 |
Bonding Apparatus and Method for Manufacturing Bonded Substrate
App 20160009070 - Hayashi; Konosuke ; et al. | 2016-01-14 |
Substrate treatment apparatus and substrate treatment method
Grant 9,202,724 - Hayashi December 1, 2 | 2015-12-01 |
Substrate Processing Apparatus And Substrate Processing Method
App 20150273534 - OOTAGAKI; Takashi ; et al. | 2015-10-01 |
Substrate Treatment Apparatus And Substrate Treatment Method
App 20150273491 - OOTAGAKI; Takashi ; et al. | 2015-10-01 |
Substrate Processing Device And Substrate Processing Method
App 20150090298 - NAGASHIMA; Yuji ; et al. | 2015-04-02 |
Substrate Processing Device And Substrate Processing Method
App 20150090296 - NAGASHIMA; Yuji ; et al. | 2015-04-02 |
Substrate Processing Device And Substrate Processing Method
App 20150090297 - MATSUSHITA; Jun ; et al. | 2015-04-02 |
Substrate Processing Device And Substrate Processing Method
App 20140261549 - HAYASHI; Konosuke ; et al. | 2014-09-18 |
Substrate Processing Device And Substrate Processing Method
App 20140261566 - HAYASHI; Konosuke ; et al. | 2014-09-18 |
Substrate Processing Device And Substrate Processing Method
App 20140261554 - HAYASHI; Konosuke ; et al. | 2014-09-18 |
Bonding Apparatus And Bonding Process Method
App 20140182761 - Hayashi; Konosuke ; et al. | 2014-07-03 |
Cleaning Solution Producing Apparatus, Cleaning Solution Producing Method, And Substrate Cleaning Apparatus
App 20140041694 - MIYAZAKI; Kunihiro ; et al. | 2014-02-13 |
Spin processing apparatus and spin processing method
Grant 8,377,251 - Hayashi February 19, 2 | 2013-02-19 |
Spin Processing Apparatus And Spin Processing Method
App 20110073565 - Hayashi; Konosuke | 2011-03-31 |
Substrate Treatment Apparatus And Substrate Treatment Method
App 20100122772 - HAYASHI; Konosuke | 2010-05-20 |
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