Hawryluk; Andrew M.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hawryluk; Andrew M..The latest application filed is for "laser-based systems and methods for melt-processing of metal layers in semiconductor manufacturing".

Company Profile

4.70.67

Hawryluk; Andrew M. - Los Altos CA
Hawryluk; Andrew M. - Los CA
Hawryluk; Andrew M. - Lost Altos CA
Hawryluk; Andrew M - Los Altos CA
Hawryluk; Andrew M. - Los Atros CA
Hawryluk; Andrew M. - Los Altos Hills CA
Hawryluk; Andrew M. - Modesto CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Laser annealing systems and methods with ultra-short dwell times Grant 10,847,381 - Hawryluk , et al. November 24, 2	2020-11-24
Laser-based systems and methods for melt-processing of metal layers in semiconductor manufacturing Grant 10,665,504 - Anikitchev , et al.	2020-05-26
Method and apparatus for forming device quality gallium nitride layers on silicon substrates Grant 10,249,491 - Sundaram , et al.	2019-04-02
Laser-Based Systems and Methods for Melt-Processing of Metal Layers in Semiconductor Manufacturing App 20190035682 - Anikitchev; Serguei ; et al.	2019-01-31
Laser Annealing Systems and Methods With Ultra-Short Dwell Times App 20190006189 - Hawryluk; Andrew M. ; et al.	2019-01-03
Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations Grant 10,090,153 - Hawryluk , et al. October 2, 2	2018-10-02
Laser annealing systems and methods with ultra-short dwell times Grant 10,083,843 - Hawryluk , et al. September 25, 2	2018-09-25
Method and Apparatus for Forming Device Quality Gallium Nitride Layers on Silicon Substrates App 20180226241 - Sundaram; Ganesh ; et al.	2018-08-09
Methods of Forming Product Wafers Having Semiconductor Light-Emitting Devices To Improve Emission Wavelength Uniformity App 20180226535 - Hawryluk; Andrew M.	2018-08-09
Method and apparatus for forming device quality gallium nitride layers on silicon substrates Grant 9,960,036 - Sundaram , et al. May 1, 2	2018-05-01
Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations Grant 9,929,011 - Hawryluk , et al. March 27, 2	2018-03-27
Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations Grant 9,768,016 - Hawryluk , et al. September 19, 2	2017-09-19
Formation Of Heteroepitaxial Layers With Rapid Thermal Processing To Remove Lattice Dislocations App 20170256394 - Hawryluk; Andrew M. ; et al.	2017-09-07
Formation Of Heteroepitaxial Layers With Rapid Thermal Processing To Remove Lattice Dislocations App 20170250070 - Hawryluk; Andrew M. ; et al.	2017-08-31
Method And Apparatus For Forming Device Quality Gallium Nitride Layers On Silicon Substrates App 20170213718 - Sundaram; Ganesh ; et al.	2017-07-27
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation Grant 9,711,361 - Hawryluk , et al. July 18, 2	2017-07-18
Full-wafer inspection methods having selectable pixel density App 20170178980 - Owen; David M. ; et al.	2017-06-22
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation App 20170162392 - Hawryluk; Andrew M. ; et al.	2017-06-08
Method and apparatus for forming device quality gallium nitride layers on silicon substrates Grant 9,666,432 - Sundaram , et al. May 30, 2	2017-05-30
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation Grant 9,613,815 - Hawryluk , et al. April 4, 2	2017-04-04
High-throughput multichamber atomic layer deposition systems and methods App 20170088952 - Hawryluk; Andrew M.	2017-03-30
Plasma-enhanced atomic layer deposition system with rotary reactor tube App 20170062191 - Zafiropoulo; Arthur W. ; et al.	2017-03-02
Laser annealing systems and methods with ultra-short dwell times Grant 9,558,973 - Hawryluk , et al. January 31, 2	2017-01-31
Non-melt thin-wafer laser thermal annealing methods Grant 9,490,128 - Wang , et al. November 8, 2	2016-11-08
Wynne-Dyson projection lens with reduced susceptibility to UV damage Grant 9,436,103 - Zhao , et al. September 6, 2	2016-09-06
Laser annealing systems and methods with ultra-short dwell times App 20160240407 - Hawryluk; Andrew M. ; et al.	2016-08-18
Systems And Processes For Forming Three-dimensional Integrated Circuits App 20160240440 - Zafiropoulo; Arthur W. ; et al.	2016-08-18
Apparatus and methods for improving the intensity profile of a beam image used to process a substrate Grant 9,401,278 - Hawryluk , et al. July 26, 2	2016-07-26
Method And Apparatus For Forming Device Quality Gallium Nitride Layers On Silicon Substrates App 20160203972 - Sundaram; Ganesh ; et al.	2016-07-14
Laser annealing systems and methods with ultra-short dwell times App 20160181120 - Hawryluk; Andrew M. ; et al.	2016-06-23
Formation Of Heteroepitaxial Layers With Rapid Thermal Processing To Remove Lattice Dislocations App 20160155629 - Hawryluk; Andrew M. ; et al.	2016-06-02
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation App 20160148810 - Hawryluk; Andrew M. ; et al.	2016-05-26
Wynn-dyson imaging system with reduced thermal distortion Grant 9,341,951 - Hawryluk May 17, 2	2016-05-17
Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabrication Grant 9,302,348 - Wang , et al. April 5, 2	2016-04-05
Laser annealing systems and methods with ultra-short dwell times App 20160086832 - Hawryluk; Andrew M. ; et al.	2016-03-24
Betavoltaic power sources for transportation applications Grant 9,266,437 - Zafiropoulo , et al. February 23, 2	2016-02-23
Wynne-Dyson projection lens with reduced susceptibility to UV damage App 20150331326 - Zhao; Peiqian ; et al.	2015-11-19
Laser annealing of GaN LEDs with reduced pattern effects Grant 9,190,570 - Hawryluk , et al. November 17, 2	2015-11-17
Epitaxial growth of compound semiconductors using lattice-tuned domain-matching epitaxy App 20150090180 - Hawryluk; Andrew M. ; et al.	2015-04-02
Methods of laser processing photoresist in a gaseous environment Grant 8,986,562 - Zafiropoulo , et al. March 24, 2	2015-03-24
Methods of laser processing photoresist in a gaseous environment App 20150041431 - Zafiropoulo; Arthur W. ; et al.	2015-02-12
Betavoltaic power sources for mobile device applications Grant 8,872,408 - Zafiropoulo , et al. October 28, 2	2014-10-28
Laser annealing systems and methods with ultra-short dwell times Grant 8,865,603 - Hawryluk , et al. October 21, 2	2014-10-21
LED-based photolithographic illuminator with high collection efficiency Grant 8,845,163 - Stites , et al. September 30, 2	2014-09-30
Programmable illuminator for a photolithography system Grant 8,823,921 - Zlatanov , et al. September 2, 2	2014-09-02
Systems and methods for material processing using light-emitting diodes App 20140238958 - Zafiropoulo; Arthur W. ; et al.	2014-08-28
Apparatus and methods for improving the intensity profile of a beam image used to process a substrate App 20140227890 - Hawryluk; Andrew M. ; et al.	2014-08-14
Photolithographic LED fabrication using phase-shift mask Grant 8,796,053 - Hawryluk , et al. August 5, 2	2014-08-05
Systems for and methods of laser-enhanced plasma processing of semiconductor materials Grant 8,796,151 - Hawryluk , et al. August 5, 2	2014-08-05
Optical alignment systems for forming LEDs having a rough surface Grant 8,781,213 - Hsieh , et al. July 15, 2	2014-07-15
Methods of characterizing semiconductor light-emitting devices based on product wafer characteristics Grant 8,765,493 - Hawryluk , et al. July 1, 2	2014-07-01
Wynn-Dyson imaging system with reduced thermal distortion App 20140176923 - Hawryluk; Andrew M.	2014-06-26
Apparatus and method for improving the intensity profile of a beam image used to process a substrate Grant 8,742,286 - Hawryluk , et al. June 3, 2	2014-06-03
Methods Of Characterizing Semiconductor Light-emitting Devices Based On Product Wafer Characteristics App 20140141538 - Hawryluk; Andrew M. ; et al.	2014-05-22
Laser Annealing Of Gan Leds With Reduced Pattern Effects App 20140131723 - Hawryluk; Andrew M. ; et al.	2014-05-15
Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabrication App 20140097171 - Wang; Yun ; et al.	2014-04-10
Non-melt thin-wafer laser thermal annealing methods App 20140057457 - Wang; Yun ; et al.	2014-02-27
Activating GaN LEDs by laser spike annealing and flash annealing Grant 8,658,451 - Wang , et al. February 25, 2	2014-02-25
LED-based photolithographic illuminator with high collection efficiency App 20140049978 - Stites; David G. ; et al.	2014-02-20
Betavoltaic power sources for transportation applications App 20140021826 - Zafiropoulo; Arthur W. ; et al.	2014-01-23
Laser annealing systems and methods with ultra-short dwell times App 20130330844 - Hawryluk; Andrew M. ; et al.	2013-12-12
Laser spike annealing for GaN LEDs Grant 8,592,309 - Wang , et al. November 26, 2	2013-11-26
Betavoltaic power sources for mobile device applications App 20130278109 - Zafiropoulo; Arthur W. ; et al.	2013-10-24
Systems for and methods of laser-enhanced plasma processing of semiconductor materials App 20130267096 - Hawryluk; Andrew M. ; et al.	2013-10-10
Fast thermal annealing of GaN LEDs Grant 8,460,959 - Wang , et al. June 11, 2	2013-06-11
Programmable illuminator for a photolithography system App 20130044301 - Zlatanov; Borislav ; et al.	2013-02-21
Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabrication Grant 8,309,474 - Wang , et al. November 13, 2	2012-11-13
Sub-field enhanced global alignment Grant 8,299,446 - Hawryluk , et al. October 30, 2	2012-10-30
Minimization of Surface Reflectivity App 20120223062 - Hawryluk; Andrew M.	2012-09-06
Photolithographic led fabrication using phase-shift mask App 20120153323 - Hawryluk; Andrew M. ; et al.	2012-06-21
Thermal Processing of Substrates with Pre- and Post-Spike Temperature Contro App 20120111838 - Zafiropoulo; Arthur W. ; et al.	2012-05-10
Apparatus and methods for improving the intensity profile of a beam image used to process a substrate Grant 8,153,930 - Hawryluk , et al. April 10, 2	2012-04-10
Optical alignment systems for forming LEDs having a rough surface App 20120062726 - Hsieh; Robert L. ; et al.	2012-03-15
Optical alignment methods for forming LEDs having a rough surface Grant 8,088,633 - Hsieh , et al. January 3, 2	2012-01-03
Fast thermal annealing of GaN LEDs App 20110309374 - Wang; Yun ; et al.	2011-12-22
Thermal Processing of Substrates with Pre- and Post-Spike Temperature Control App 20110298093 - Zafiropoulo; Arthur W. ; et al.	2011-12-08
Electrically conductive structure on a semiconductor substrate formed from printing Grant 8,067,305 - Zafiropoulo , et al. November 29, 2	2011-11-29
Fast Annealing for GaN LEDs App 20110278587 - Wang; Yun ; et al.	2011-11-17
Method for capacitive testing of flat panel displays Grant 7,960,993 - Gardner , et al. June 14, 2	2011-06-14
Optical alignment methods for forming LEDs having a rough surface App 20110129948 - Hsieh; Robert L. ; et al.	2011-06-02
Laser spike annealing for GaN LEDs App 20110108796 - Wang; Yun ; et al.	2011-05-12
Systems And Processes For Forming Three-dimensional Circuits App 20110089523 - Zafiropoulo; Arthur W. ; et al.	2011-04-21
Sub-field enhanced global alignment App 20110038704 - Hawryluk; Andrew M. ; et al.	2011-02-17
LED-based UV illuminators and lithography systems using same App 20100283978 - Hawryluk; Andrew M.	2010-11-11
Systems and processes for forming three-dimensional circuits App 20100140768 - Zafiropoulo; Arthur W. ; et al.	2010-06-10
Thermal processing of substrates with pre- and post-spike temperature control App 20100084744 - Zafiropoulo; Arthur W. ; et al.	2010-04-08
Electrically conductive structure on a semiconductor substrate formed from printing App 20100055895 - Zafiropoulo; Arthur W. ; et al.	2010-03-04
Direct Detect Sensor For Flat Panel Displays App 20100045334 - Gardner; David W. ; et al.	2010-02-25
Direct Detect Sensor For Flat Panel Displays App 20090295425 - Gardner; David W. ; et al.	2009-12-03
Minimization of surface reflectivity variations App 20090114630 - Hawryluk; Andrew M.	2009-05-07
Apparatus and methods for improving the intensity profile of a beam image used to process a substrate Grant 7,514,305 - Hawryluk , et al. April 7, 2	2009-04-07
Direct Detect Sensor For Flat Panel Displays App 20080315908 - Gardner; David W. ; et al.	2008-12-25
Direct detect sensor for flat panel displays Grant 7,466,161 - Gardner , et al. December 16, 2	2008-12-16
Direct Detect Sensor For Flat Panel Displays App 20080157802 - Gardner; David W. ; et al.	2008-07-03
Direct Detect Sensor For Flat Panel Displays App 20060237627 - Gardner; David W. ; et al.	2006-10-26
Methods for annealing a substrate and article produced by such methods Grant 6,825,101 - Hawryluk , et al. November 30, 2	2004-11-30
Radiation shield device and method App 20040041105 - Hawryluk, Andrew M. ; et al.	2004-03-04
Method of and apparatus for defining disk tracks in magnetic recording media Grant 6,671,235 - Hawryluk , et al. December 30, 2	2003-12-30
Method for laser thermal processing using thermally induced reflectivity switch Grant 6,635,588 - Hawryluk , et al. October 21, 2	2003-10-21
Radiation shield device and method Grant 6,617,600 - Hawryluk , et al. September 9, 2	2003-09-09
Illumination fluence regulation system and method for use in thermal processing employed in the fabrication of reduced-dimension integrated circuits Grant 6,570,656 - Owens, Jr. , et al. May 27, 2	2003-05-27
Apparatus for and method of reducing or eliminating interference effects in a light tunnel illuminator Grant 6,554,464 - Hawryluk , et al. April 29, 2	2003-04-29
Apparatus having line source of radiant energy for exposing a substrate Grant 6,531,681 - Markle , et al. March 11, 2	2003-03-11
Thermally induced reflectivity switch for laser thermal processing Grant 6,495,390 - Hawryluk , et al. December 17, 2	2002-12-17
Thermally induced phase switch for laser thermal processing Grant 6,479,821 - Hawryluk , et al. November 12, 2	2002-11-12
Laser thermal processing apparatus and method Grant 6,366,308 - Hawryluk , et al. April 2, 2	2002-04-02
Thermally induced reflectivity switch for laser thermal processing App 20020022294 - Hawryluk, Andrew M. ; et al.	2002-02-21
Thermally induced reflectivity switch for laser thermal processing App 20020019148 - Hawryluk, Andrew M. ; et al.	2002-02-14
Acousto-optical light tunnel apparatus and method Grant 6,347,176 - Hawryluk , et al. February 12, 2	2002-02-12
Methods For Determining Wavelength And Pulse Length Of Radiant Energy Used For Annealing App 20010039063 - MARKLE, DAVID A. ; et al.	2001-11-08
Radiant energy monitoring apparatuses including a calibration operation and related methods Grant 6,303,917 - Hawryluk October 16, 2	2001-10-16
Broadband diffractive lens or imaging element Grant 5,257,132 - Ceglio , et al. * October 26, 1	1993-10-26
Broadband diffractive lens or imaging element Grant 5,071,207 - Ceglio , et al. December 10, 1	1991-12-10
Soft x-ray reduction camera for submicron lithography Grant 5,003,567 - Hawryluk , et al. March 26, 1	1991-03-26
X-ray beamsplitter Grant 4,870,648 - Ceglio , et al. September 26, 1	1989-09-26

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