Hauschild; Jan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hauschild; Jan.The latest application filed is for "lithographic apparatus, calibration method, device manufacturing method and computer program product".

Company Profile

0.7.7

Hauschild; Jan - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly Grant 7,834,975 - Burghoorn , et al. November 16, 2	2010-11-16
Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly Grant 7,518,706 - Hauschild , et al. April 14, 2	2009-04-14
Lithographic apparatus, calibration method, device manufacturing method and computer program product Grant 7,502,096 - Tempelaars , et al. March 10, 2	2009-03-10
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly Grant 7,502,097 - Hauschild March 10, 2	2009-03-10
Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus Grant 7,355,675 - Lalbahadoersing , et al. April 8, 2	2008-04-08
Lithographic apparatus and device manufacturing method Grant 7,298,455 - Sinke , et al. November 20, 2	2007-11-20
Lithographic apparatus, calibration method, device manufacturing method and computer program product App 20070181827 - Tempelaars; Jeffrey Godefridus Cornelis ; et al.	2007-08-09
Lithographic apparatus focus test method and system, and device manufacturing method Grant 7,209,214 - Hauschild , et al. April 24, 2	2007-04-24
Lithographic apparatus and device manufacturing method App 20060285099 - Sinke; Arnold ; et al.	2006-12-21
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly App 20060279718 - Den Boef; Arie Jeffrey ; et al.	2006-12-14
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly App 20060146302 - Hauschild; Jan	2006-07-06
Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly App 20060141375 - Hauschild; Jan ; et al.	2006-06-29
Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus App 20060138410 - Lalbahadoersing; Sanjay ; et al.	2006-06-29
Lithographic apparatus focus test method and system, and device manufacturing method App 20060132744 - Hauschild; Jan ; et al.	2006-06-22

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