Patent | Date |
---|
Method For Operating A Photodiode And Device For Carrying Out The Method App 20220221563 - Hattass; Mirko | 2022-07-14 |
Lidar System App 20210215828 - Hattass; Mirko ;   et al. | 2021-07-15 |
Sensor system for attaching a sensor set-up to a vehicle Grant 10,996,083 - Greiner , et al. May 4, 2 | 2021-05-04 |
Scanning System And Transmitting And Receiving Device For A Scanning System App 20200355802 - Holleczek; Annemarie ;   et al. | 2020-11-12 |
Lidar System Including Convection Cooling App 20200271759 - Hattass; Mirko ;   et al. | 2020-08-27 |
Micromechanical yaw rate sensor and method for the production thereof Grant 10,753,743 - Neul , et al. A | 2020-08-25 |
Micromechanical yaw rate sensor and method for operating same Grant 10,753,742 - Neul , et al. A | 2020-08-25 |
MEMS rotation rate sensor including combined driving and detection Grant 10,704,909 - Wellner , et al. | 2020-07-07 |
Rotational speed sensor with minimized interference movements in the driving mode Grant 10,655,965 - Schmidt , et al. | 2020-05-19 |
Micromechanical constituent and method for adjusting an adjustable element Grant 10,627,617 - Schatz , et al. | 2020-04-21 |
Sensor Unit Of A Vehicle App 20200079178 - Mitter Marques; Debora Maria ;   et al. | 2020-03-12 |
Dual-axis ultra-robust rotation rate sensor for automotive applications Grant 10,557,710 - Lassl , et al. Feb | 2020-02-11 |
Stabilized Lidar System And Method For Stabilization App 20200033459 - Hattass; Mirko ;   et al. | 2020-01-30 |
Rotation rate sensor and method Grant 10,502,569 - Maul , et al. Dec | 2019-12-10 |
Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another Grant 10,488,650 - Grutzeck , et al. Nov | 2019-11-26 |
Sensor System For Attaching A Sensor Set-up To A Vehicle App 20190250017 - Greiner; Alexander ;   et al. | 2019-08-15 |
Sensor device and method for operating a sensor device having at least one seismic mass Grant 10,260,879 - Maul , et al. | 2019-04-16 |
Micromechanical device and method for the two-dimensional deflection of light Grant 10,241,323 - Hattass , et al. | 2019-03-26 |
Micromechanical Yaw Rate Sensor and Method for Operating Same App 20190056226 - Neul; Reinhard ;   et al. | 2019-02-21 |
Micromechanical Yaw Rate Sensor and Method for the Production Thereof App 20180321039 - Neul; Reinhard ;   et al. | 2018-11-08 |
Micromechanical Constituent And Method For Adjusting An Adjustable Element App 20180314056 - Schatz; Frank ;   et al. | 2018-11-01 |
Dual-axis Ultra-robust Rotation Rate Sensor For Automotive Applications App 20180231381 - Lassl; Andreas ;   et al. | 2018-08-16 |
Mems Rotation Rate Sensor Including Combined Driving And Detection App 20180209790 - Wellner; Patrick ;   et al. | 2018-07-26 |
Multiaxial rotation rate sensor including a split central rotor Grant 10,030,977 - Hattass , et al. July 24, 2 | 2018-07-24 |
Rotational Speed Sensor With Minimized Interference Movements In The Driving Mode App 20180202808 - Schmidt; Benjamin ;   et al. | 2018-07-19 |
MEMS element including a stress decoupling structure and a component including such a MEMS element Grant 10,017,376 - Classen , et al. July 10, 2 | 2018-07-10 |
Rotation Rate Sensor and Method App 20180128614 - Maul; Robert ;   et al. | 2018-05-10 |
Rotation rate sensor and a method for operating a rotation rate sensor Grant 9,945,669 - Balslink , et al. April 17, 2 | 2018-04-17 |
Micromechanical Device And Method For The Two-dimensional Deflection Of Light App 20180067304 - Hattass; Mirko ;   et al. | 2018-03-08 |
Acceleration sensor and method for producing an acceleration sensor Grant 9,835,645 - Has , et al. December 5, 2 | 2017-12-05 |
Micromechanical Component and Method for Adjusting an Adjustable Part Simultaneously about Two Axes of Rotation Inclined in Relation to One Another App 20170343795 - Grutzeck; Helmut ;   et al. | 2017-11-30 |
Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate Grant 9,823,073 - Balslink , et al. November 21, 2 | 2017-11-21 |
Infrared sensor device and method for producing an infrared sensor device Grant 9,818,792 - Herrmann , et al. November 14, 2 | 2017-11-14 |
Method for calibrating yaw rate sensors Grant 9,791,275 - Franke , et al. October 17, 2 | 2017-10-17 |
Component including two semiconductor elements, which are bonded to one another via a structured bonding layer, and method for manufacturing a component of this type Grant 9,650,240 - Hattass , et al. May 16, 2 | 2017-05-16 |
Mems Element Including A Stress Decoupling Structure And A Component Including Such A Mems Element App 20170096331 - Classen; Johannes ;   et al. | 2017-04-06 |
Interposer For Mounting A Vertically Integrated Hybrid Component On A Component Carrier App 20170081177 - Neul; Reinhard ;   et al. | 2017-03-23 |
Combination Electrode For Drive, Drive Detection, Coriolis Detection, And Quadrature Compensation App 20170059323 - HATTASS; Mirko ;   et al. | 2017-03-02 |
Multiaxial Rotation Rate Sensor Including A Split Central Rotor App 20170016726 - Hattass; Mirko ;   et al. | 2017-01-19 |
Sensor Device and Method for Operating a Sensor Device Having at Least One Seismic Mass App 20160356599 - Maul; Robert ;   et al. | 2016-12-08 |
Micromechanical inertial sensor and method for manufacturing same Grant 9,434,606 - Classen , et al. September 6, 2 | 2016-09-06 |
Micromechanical spring for an inertial sensor App 20160138666 - HOEPPNER; Christian ;   et al. | 2016-05-19 |
Rotation Rate Sensor And A Method For Operating A Rotation Rate Sensor App 20160084653 - Balslink; Thorsten ;   et al. | 2016-03-24 |
Rotation Rate Sensor Having A Substrate Having A Main Extension Plance For Detecting A Rotation Rate App 20160069682 - BALSLINK; Thorsten ;   et al. | 2016-03-10 |
Hybrid integrated component Grant 9,266,720 - Classen , et al. February 23, 2 | 2016-02-23 |
Production process for a micromechanical component and micromechanical component Grant 9,233,841 - Heuck , et al. January 12, 2 | 2016-01-12 |
Hybridly integrated component and method for the production thereof Grant 9,212,048 - Classen , et al. December 15, 2 | 2015-12-15 |
Component Including Two Semiconductor Elements, Whichare Bonded To One Another Via A Structured Bonding Layer, Andmethod For Manufacturing A Component Of This Type App 20150353349 - HATTASS; Mirko ;   et al. | 2015-12-10 |
Vertical Hybrid Integrated MEMS ASIC Component Having A Stress Decoupling Structure App 20150353345 - HEUCK; Friedjof ;   et al. | 2015-12-10 |
Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration Grant 9,164,123 - Neul , et al. October 20, 2 | 2015-10-20 |
Energy source and method for supplying an autonomous electrical load system and the use of same Grant 9,112,108 - Scheben , et al. August 18, 2 | 2015-08-18 |
Infrared Sensor Device and Method for Producing an Infrared Sensor Device App 20150137300 - Herrmann; Ingo ;   et al. | 2015-05-21 |
Rotation rate sensor Grant 8,955,380 - Hattass , et al. February 17, 2 | 2015-02-17 |
Micromechanical angular acceleration sensor and method for measuring an angular acceleration Grant 8,950,258 - Neul , et al. February 10, 2 | 2015-02-10 |
Micromechanical structure, in particular sensor arrangement, and corresponding operating method Grant 8,901,679 - Classen , et al. December 2, 2 | 2014-12-02 |
Hybrid integrated component and method for the manufacture thereof Grant 8,836,053 - Weber , et al. September 16, 2 | 2014-09-16 |
Sensor system and method for calibrating a sensor system Grant 8,833,135 - Franke , et al. September 16, 2 | 2014-09-16 |
Method For Calibrating Yaw Rate Sensors App 20140116108 - FRANKE; Axel ;   et al. | 2014-05-01 |
Hybrid Integrated Component App 20140117475 - CLASSEN; Johannes ;   et al. | 2014-05-01 |
Micromechanical component, device for beam deflection of monochromatic light, and spectrometer Grant 8,711,459 - Hattass April 29, 2 | 2014-04-29 |
Production Process For A Micromechanical Component And Micromechanical Component App 20140103497 - Heuck; Friedjof ;   et al. | 2014-04-17 |
Acceleration Sensor And Method For Producing An Acceleration Sensor App 20140102196 - Has; Remigius ;   et al. | 2014-04-17 |
Micromechanical component having a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure Grant 8,695,427 - Reinmuth , et al. April 15, 2 | 2014-04-15 |
Hybridly Integrated Component And Method For The Production Thereof App 20130299928 - CLASSEN; Johannes ;   et al. | 2013-11-14 |
Micromechanical Inertial Sensor And Method For Manufacturing Same App 20130299925 - CLASSEN; Johannes ;   et al. | 2013-11-14 |
Hybrid Integrated Component And Method For The Manufacture Thereof App 20130299924 - WEBER; Heribert ;   et al. | 2013-11-14 |
Energy Source And Method For Supplying An Autonomous Electrical Load System And The Use Of Same App 20130284227 - Scheben; Rolf ;   et al. | 2013-10-31 |
Method for determining the sensitivity of an acceleration sensor or magnetic field sensor Grant 8,461,833 - Classen , et al. June 11, 2 | 2013-06-11 |
Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration App 20120297878 - Neul; Reinhard ;   et al. | 2012-11-29 |
Micromechanical Rotary Acceleration Sensor and Method for Detecting a Rotary Acceleration App 20120272735 - Neul; Reinhard ;   et al. | 2012-11-01 |
Rotation Rate Sensor App 20120067123 - Hattass; Mirko ;   et al. | 2012-03-22 |
Sensor System And Method For Calibrating A Sensor System App 20120036915 - FRANKE; Axel ;   et al. | 2012-02-16 |
Micromechanical Component Having A Test Structure For Determining The Layer Thickness Of A Spacer Layer And Method For Manufacturing Such A Test Structure App 20110296917 - Reinmuth; Jochen ;   et al. | 2011-12-08 |
Method for determining the sensitivity of an acceleration sensor or magnetic field sensor App 20110140692 - Classen; Johannes ;   et al. | 2011-06-16 |
Micromechanical component, device for beam deflection of monochromatic light, and spectrometer App 20110134502 - Hattass; Mirko | 2011-06-09 |